[Scan]
initial_time=2016-01-18T21:00:39
final_time=2016-01-18T21:00:58
ip_count=19
run=1024
dataset=7
scan=544
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.81913E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.29513E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.36486E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.20983E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.59586E-8
mult1=-1.89876E-8
mult2=-2.90026E-9
rf_tmon=-3.12452E-3
rf_agc=3.57729E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.674E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.30343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54115E1
cs_ef1b_imon=2.79277E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02417E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04423E1
cs_ea1_imon=2.55301E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97647E0
lens1_imon=1.61849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03468E1
cs_ea2_imon=1.48559E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.91567E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.29385E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.27364E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.3789E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63425E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26952E0
cs_ionrep_imon=1.17088E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.9427E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.99126E-8
tplens_vset=1.4E-1
tplens_vmon=1.64384E0
tplens_imon=-1.55148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=9.3509E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.77651E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34036E1
lens5b_imon=2.14529E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44136E0
os_ea2_imon=-7.93225E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04615E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11087E1
os_restr2_imon=3.40905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.27693E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.23848E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73231E1
iondef1_imon=1.11248E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68599E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.06927E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.64444E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.74734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5581E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=2.62993E-1
window_imon=-5.61639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.5032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.00068E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.43099E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64548E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.96492E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63039E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6615E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86045E-2
os_fil2_imon=-2.8762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.54732E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.89325E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.966E3	1.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80027E1	-6.91414E-4	-8.80008E1	2.14577E-4	4.19617E-3	9.49621E-2	2.7304E1	-3.26653E1	-3.26545E1	2.68592E1	1.20226E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.97963E-1
2.0E0	1.0548E5	9.4E1	3.16E2	1.6E2	-7.286E-2	-8.80028E1	-6.19888E-4	-8.80008E1	5.24521E-4	4.26769E-3	9.47237E-2	2.73235E1	-3.26699E1	-3.26184E1	2.68088E1	1.19732E-7	2.51162E-3	2.51162E-3	6.3074E-3	2.99014E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80026E1	-4.29153E-4	-8.80006E1	7.39098E-4	4.14848E-3	9.50098E-2	2.73611E1	-3.2636E1	-3.26065E1	2.68749E1	1.1973E-7	2.52686E-3	2.52686E-3	6.3074E-3	3.00916E-1
4.0E0	2.3013E4	6.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80026E1	-4.76837E-4	-8.80005E1	5.72205E-4	4.48227E-3	9.50336E-2	2.73263E1	-3.26644E1	-3.26101E1	2.68059E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80028E1	-6.67572E-4	-8.80007E1	4.29153E-4	4.31538E-3	9.50813E-2	2.73311E1	-3.26579E1	-3.26254E1	2.68472E1	1.19749E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.98156E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80028E1	-5.96046E-4	-8.80007E1	3.09944E-4	4.45843E-3	9.4986E-2	2.73075E1	-3.26817E1	-3.2615E1	2.68148E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9841E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80025E1	-6.91414E-4	-8.80007E1	6.4373E-4	4.14848E-3	9.48191E-2	2.73234E1	-3.26354E1	-3.26219E1	2.6843E1	1.20137E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80027E1	-9.05991E-4	-8.80004E1	2.38419E-5	4.26769E-3	9.49383E-2	2.72827E1	-3.26561E1	-3.26136E1	2.68394E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
1.2E1	9.6E1	1.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80029E1	-7.62939E-4	-8.80007E1	3.09944E-4	4.33922E-3	9.5129E-2	2.73369E1	-3.26474E1	-3.26174E1	2.68226E1	1.20122E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.01347E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80028E1	-7.86781E-4	-8.80007E1	6.4373E-4	4.36306E-3	9.51529E-2	2.73616E1	-3.2647E1	-3.259E1	2.684E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01347E-1
1.4E1	3.39E3	1.0E0	5.66E2	3.82E2	-7.37874E-2	-8.8003E1	-1.04904E-3	-8.80007E1	3.57628E-4	4.52995E-3	9.50098E-2	2.73143E1	-3.2648E1	-3.26297E1	2.68196E1	1.19913E-7	2.50789E-3	2.50789E-3	6.33486E-3	3.01085E-1
1.5E1	9.8E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80032E1	-1.0252E-3	-8.80006E1	3.8147E-4	4.50611E-3	9.50098E-2	2.72877E1	-3.26795E1	-3.26615E1	2.68382E1	1.19819E-7	2.5147E-3	2.5147E-3	6.29624E-3	2.99613E-1
1.6E1	4.42E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80026E1	-6.67572E-4	-8.80006E1	5.72205E-4	4.41074E-3	9.54151E-2	2.73269E1	-3.26502E1	-3.26408E1	2.68424E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9926E-1
1.7E1	8.88E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80028E1	-6.91414E-4	-8.8001E1	4.05312E-4	4.673E-3	9.52005E-2	2.73111E1	-3.26404E1	-3.2623E1	2.6834E1	1.19902E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99175E-1
1.8E1	3.795E3	2.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80028E1	-7.39098E-4	-8.8001E1	2.86102E-4	4.31538E-3	9.53674E-2	2.7355E1	-3.26663E1	-3.25821E1	2.68659E1	1.20278E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00824E-1
1.9E1	2.066E3	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80027E1	-1.00136E-3	-8.80007E1	5.48363E-4	4.43459E-3	9.52959E-2	2.73568E1	-3.26891E1	-3.26236E1	2.6798E1	1.19913E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.00302E-1
2.0E1	2.6105E4	8.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80029E1	-7.86781E-4	-8.80008E1	5.00679E-4	4.60148E-3	9.53197E-2	2.7311E1	-3.26667E1	-3.26284E1	2.6828E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
2.1E1	6.6E1	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80031E1	-6.4373E-4	-8.80009E1	4.05312E-4	4.55379E-3	9.48429E-2	2.73322E1	-3.26679E1	-3.26349E1	2.68221E1	1.20055E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.00966E-1
2.2E1	1.869E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80029E1	-5.00679E-4	-8.80009E1	8.82149E-4	4.48227E-3	9.50098E-2	2.73357E1	-3.26579E1	-3.26146E1	2.68286E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9892E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80027E1	-3.8147E-4	-8.80007E1	3.57628E-4	4.72069E-3	9.52244E-2	2.73231E1	-3.26771E1	-3.26278E1	2.68599E1	1.19809E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.99E-1