[Scan]
initial_time=2016-01-18T21:01:32
final_time=2016-01-18T21:01:52
ip_count=19
run=1024
dataset=7
scan=546
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.77398E-6
ql1_vset=
ql1_vmon=-8.80032E1
ql1_imon=-6.99925E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.38065E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.18674E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.5973E-8
mult1=-2.02807E-8
mult2=-3.28572E-9
rf_tmon=3.57217E-3
rf_agc=4.20102E-2
counter1=5
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.52416E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64571E0
bslens_imon=2.28541E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19508E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12436E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54175E1
cs_ef1b_imon=2.80575E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02236E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.047E1
cs_ea1_imon=2.5577E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97406E0
lens1_imon=1.60046E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.47081E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84544E1
cs_ef1a_imon=2.91747E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.29648E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.26463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=2.40377E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.18097E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.95639E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.99748E-8
tplens_vset=1.4E-1
tplens_vmon=1.6883E0
tplens_imon=-5.15643E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26815E1
iondef3_imon=1.48487E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27399E1
iondef2_imon=1.56201E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98187E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=9.19306E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=1.77434E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.15142E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45458E0
os_ea2_imon=-8.22064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.41626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.27369E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73535E1
iondef1_imon=1.09914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.04676E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.65317E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-8.39144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.83703E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=7.07278E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.05115E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.42234E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07281E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64889E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=9.9499E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62882E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66195E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.52154E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22469E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=2.99594E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.51287E-3
foreline_cvt_pmon=2.51287E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.31061E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.988E3	3.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80029E1	-8.58307E-4	-8.80008E1	4.29153E-4	3.74317E-3	9.47714E-2	2.73E1	-3.2655E1	-3.26425E1	2.68412E1	1.20383E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9874E-1
2.0E0	1.05489E5	8.6E1	3.16E2	1.6E2	-7.19325E-2	-8.80029E1	-9.29832E-4	-8.80007E1	1.66893E-4	4.50611E-3	9.49621E-2	2.73394E1	-3.26725E1	-3.26205E1	2.68436E1	1.20028E-7	2.52509E-3	2.52509E-3	6.3074E-3	2.98768E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80031E1	-6.4373E-4	-8.80004E1	7.15256E-5	4.33922E-3	9.47952E-2	2.73184E1	-3.26677E1	-3.26463E1	2.68551E1	1.19913E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.99E-1
4.0E0	2.325E4	4.0E0	6.55E2	3.98E2	-7.13143E-2	-8.80027E1	-7.15256E-4	-8.80003E1	3.09944E-4	4.31538E-3	9.50336E-2	2.73387E1	-3.26585E1	-3.26313E1	2.6828E1	1.19902E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80029E1	-8.10623E-4	-8.80007E1	5.96046E-4	4.48227E-3	9.47237E-2	2.73149E1	-3.26774E1	-3.2637E1	2.68364E1	1.19851E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.10051E-2	-8.80028E1	-6.19888E-4	-8.80005E1	-9.53674E-5	4.14848E-3	9.4986E-2	2.72998E1	-3.26472E1	-3.26343E1	2.68117E1	1.19872E-7	2.52473E-3	2.52473E-3	6.30182E-3	3.03349E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.06187E-2	-8.80029E1	-5.00679E-4	-8.80007E1	2.86102E-4	4.72069E-3	9.49144E-2	2.73086E1	-3.26614E1	-3.26189E1	2.68226E1	1.2026E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.04322E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.06958E-2	-8.80028E1	-5.00679E-4	-8.80004E1	5.00679E-4	4.05312E-3	9.48906E-2	2.72965E1	-3.26719E1	-3.26346E1	2.68469E1	1.19953E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.03027E-1
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.09279E-2	-8.80029E1	-4.29153E-4	-8.80004E1	2.6226E-4	4.41074E-3	9.50098E-2	2.73129E1	-3.26494E1	-3.26278E1	2.6829E1	1.20031E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.01475E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.10825E-2	-8.80029E1	-8.82149E-4	-8.8001E1	2.86102E-4	4.24385E-3	9.50098E-2	2.7358E1	-3.26813E1	-3.25918E1	2.68581E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01347E-1
1.4E1	3.327E3	0.0E0	5.66E2	3.82E2	-7.13143E-2	-8.80029E1	-5.48363E-4	-8.80009E1	3.57628E-4	4.22001E-3	9.51529E-2	2.73237E1	-3.26428E1	-3.26272E1	2.68581E1	1.19913E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
1.5E1	1.13E2	0.0E0	6.06E2	4.11E2	-7.02322E-2	-8.80031E1	-5.96046E-4	-8.80007E1	5.48363E-4	4.22001E-3	9.51529E-2	2.73755E1	-3.26701E1	-3.25825E1	2.68532E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01871E-1
1.6E1	4.67E2	1.0E0	6.47E2	4.41E2	-7.05415E-2	-8.80029E1	-5.96046E-4	-8.80007E1	6.91414E-4	4.48227E-3	9.49383E-2	2.7324E1	-3.26685E1	-3.26673E1	2.68298E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
1.7E1	9.83E2	4.0E0	6.87E2	4.7E2	-7.13143E-2	-8.80028E1	-8.34465E-4	-8.80007E1	6.67572E-4	4.72069E-3	9.4986E-2	2.73429E1	-3.26591E1	-3.26248E1	2.68406E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3514E-3	2.9978E-1
1.8E1	3.839E3	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80028E1	-8.34465E-4	-8.80007E1	3.33786E-4	4.41074E-3	9.54151E-2	2.73296E1	-3.2664E1	-3.26199E1	2.68313E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00041E-1
1.9E1	2.119E3	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80029E1	-7.86781E-4	-8.80009E1	6.19888E-4	4.48227E-3	9.53197E-2	2.72961E1	-3.26398E1	-3.26452E1	2.68364E1	1.19913E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.01085E-1
2.0E1	2.6275E4	2.2E1	8.08E2	5.58E2	-7.31692E-2	-8.80031E1	-8.34465E-4	-8.80008E1	6.4373E-4	4.72069E-3	9.51529E-2	2.73039E1	-3.26337E1	-3.26231E1	2.68574E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80028E1	-7.15256E-4	-8.80007E1	8.58307E-4	4.98295E-3	9.52244E-2	2.73315E1	-3.26554E1	-3.2638E1	2.68394E1	1.19809E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.02133E-1
2.2E1	1.868E3	1.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80032E1	-5.48363E-4	-8.80007E1	6.91414E-4	4.76837E-3	9.48906E-2	2.73128E1	-3.26236E1	-3.26649E1	2.68328E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
2.3E1	5.0E0	1.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80032E1	-7.62939E-4	-8.80008E1	5.72205E-4	4.57764E-3	9.52721E-2	2.73535E1	-3.27399E1	-3.26815E1	2.68238E1	1.20092E-7	2.51287E-3	2.51287E-3	6.32858E-3	2.99594E-1