[Scan]
initial_time=2016-01-18T21:01:59
final_time=2016-01-18T21:02:18
ip_count=19
run=1024
dataset=7
scan=547
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.7764E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-6.90854E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.40787E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.19438E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.59633E-8
mult1=-1.51974E-8
mult2=-2.31366E-9
rf_tmon=-6.04912E-3
rf_agc=3.20644E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.2346E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.32381E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19671E1
lens5a_imon=2.00987E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=2.79241E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02358E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04817E1
cs_ea1_imon=2.53512E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95809E0
lens1_imon=1.34694E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.49206E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.91855E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.29431E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.26247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.36204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=1.20643E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93286E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.95459E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.99911E-8
tplens_vset=1.4E-1
tplens_vmon=1.66503E0
tplens_imon=-3.87372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.48639E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26891E1
iondef2_imon=1.56391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98233E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=9.00698E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.74619E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34041E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45384E0
os_ea2_imon=-7.30695E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.40797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.25539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.24461E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72992E1
iondef1_imon=1.1183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68325E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.94298E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.65166E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.7113E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57018E1
einzel_imon=7.5581E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.42764E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.44369E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.40641E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4026E0
defgridb_imon=6.1039E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.43147E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64643E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.94696E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62924E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66216E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76243E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.6304E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22466E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99348E-1
chamber_ion_pmon=1.20111E-7
chamber_cvt_pmon=2.51915E-3
foreline_cvt_pmon=2.51915E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.29569E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.046E3	1.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80031E1	-6.91414E-4	-8.80006E1	3.09944E-4	4.76837E-3	9.47952E-2	2.73305E1	-3.26697E1	-3.26178E1	2.68621E1	1.20055E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.00197E-1
2.0E0	1.04782E5	1.14E2	3.16E2	1.6E2	-7.27053E-2	-8.8003E1	-7.15256E-4	-8.80005E1	3.33786E-4	4.52995E-3	9.49621E-2	2.73622E1	-3.2641E1	-3.26338E1	2.68169E1	1.19953E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.00197E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80028E1	-8.34465E-4	-8.80006E1	3.33786E-4	4.19617E-3	9.47475E-2	2.72919E1	-3.26819E1	-3.26302E1	2.68586E1	1.20122E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
4.0E0	2.3356E4	2.0E1	6.55E2	3.98E2	-7.20871E-2	-8.80031E1	-4.05312E-4	-8.80005E1	-2.38419E-5	4.48227E-3	9.50575E-2	2.73193E1	-3.26797E1	-3.26531E1	2.68358E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80029E1	-5.00679E-4	-8.80006E1	1.19209E-4	4.52995E-3	9.49383E-2	2.73183E1	-3.26422E1	-3.262E1	2.68508E1	1.20106E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99941E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80028E1	-5.96046E-4	-8.80003E1	1.90735E-4	4.33922E-3	9.52005E-2	2.73424E1	-3.26446E1	-3.26326E1	2.68022E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80031E1	-7.62939E-4	-8.80005E1	1.66893E-4	4.72069E-3	9.49383E-2	2.7308E1	-3.26443E1	-3.26236E1	2.68586E1	1.20363E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80033E1	-8.82149E-4	-8.80005E1	1.90735E-4	4.07696E-3	9.50336E-2	2.73204E1	-3.26697E1	-3.26124E1	2.68665E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9952E-1
1.2E1	1.02E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80032E1	-6.67572E-4	-8.80006E1	4.05312E-4	4.33922E-3	9.48906E-2	2.73183E1	-3.26729E1	-3.26074E1	2.68382E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.9943E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80032E1	-8.34465E-4	-8.80006E1	1.43051E-4	4.50611E-3	9.50813E-2	2.73045E1	-3.26425E1	-3.26438E1	2.68274E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
1.4E1	3.488E3	3.0E0	5.66E2	3.82E2	-7.25507E-2	-8.8003E1	-6.4373E-4	-8.80006E1	2.14577E-4	4.55379E-3	9.52005E-2	2.73496E1	-3.26458E1	-3.26597E1	2.6804E1	1.19913E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00563E-1
1.5E1	1.06E2	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.80028E1	-7.15256E-4	-8.80006E1	9.53674E-5	4.48227E-3	9.51767E-2	2.73352E1	-3.26443E1	-3.26231E1	2.68412E1	1.20137E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.99879E-1
1.6E1	4.49E2	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80028E1	-6.4373E-4	-8.80005E1	3.8147E-4	4.26769E-3	9.52244E-2	2.72973E1	-3.26615E1	-3.26356E1	2.68022E1	1.19646E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00197E-1
1.7E1	9.49E2	2.0E0	6.87E2	4.7E2	-7.07733E-2	-8.80028E1	-7.86781E-4	-8.80004E1	2.38419E-5	4.60148E-3	9.51052E-2	2.73357E1	-3.26729E1	-3.26356E1	2.68587E1	1.19851E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00197E-1
1.8E1	3.963E3	3.0E0	7.27E2	5.0E2	-7.03094E-2	-8.80032E1	-7.15256E-4	-8.80005E1	1.19209E-4	4.26769E-3	9.49383E-2	2.73423E1	-3.27045E1	-3.26573E1	2.68499E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.9E1	2.159E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.8003E1	-8.58307E-4	-8.80004E1	4.52995E-4	4.50611E-3	9.50575E-2	2.72847E1	-3.26573E1	-3.2635E1	2.68202E1					
2.0E1	2.6137E4	1.8E1	8.08E2	5.58E2	-7.16233E-2	-8.80028E1	-8.34465E-4	-8.80004E1	3.09944E-4	4.69685E-3	9.5129E-2	2.73159E1	-3.26416E1	-3.2626E1	2.68178E1	1.19757E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80028E1	-6.67572E-4	-8.80006E1	4.76837E-5	4.55379E-3	9.4986E-2	2.73252E1	-3.2659E1	-3.2635E1	2.68634E1	1.19953E-7	2.51203E-3	2.51203E-3	6.33436E-3	3.00453E-1
2.2E1	1.874E3	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80028E1	-9.53674E-4	-8.80005E1	1.19209E-4	4.81606E-3	9.47952E-2	2.73433E1	-3.26934E1	-3.26107E1	2.68432E1	1.1993E-7	2.52301E-3	2.52301E-3	6.323E-3	2.99506E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80031E1	-9.53674E-4	-8.80004E1	4.76837E-4	4.86374E-3	9.50336E-2	2.72992E1	-3.26891E1	-3.26136E1	2.68325E1	1.20111E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.99348E-1