[Scan]
initial_time=2016-01-18T21:02:25
final_time=2016-01-18T21:02:45
ip_count=19
run=1024
dataset=7
scan=548
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.79781E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-6.57976E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.37327E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.18816E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.59212E-8
mult1=-1.47245E-8
mult2=-2.89768E-9
rf_tmon=-5.5772E-3
rf_agc=3.25304E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.831E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65565E0
bslens_imon=2.35574E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19401E1
lens5a_imon=2.00227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05023E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54181E1
cs_ef1b_imon=2.80899E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02242E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04713E1
cs_ea1_imon=2.53816E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95942E0
lens1_imon=1.5183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03341E1
cs_ea2_imon=1.47373E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.9272E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.2937E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15526E1
os_ea1_imon=2.37655E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.06992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17864E0
cs_ionrep_imon=1.20267E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.9335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.94522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.98612E-8
tplens_vset=1.4E-1
tplens_vmon=1.68306E0
tplens_imon=-9.78087E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25971E1
iondef3_imon=1.4719E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26431E1
iondef2_imon=1.56445E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=9.25505E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2772E0
ionrepsh_imon=1.73598E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33511E1
lens5b_imon=2.17968E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46329E0
os_ea2_imon=-8.54441E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08519E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.39968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23015E2
cs_ionfoca_imon=6.28128E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02043E1
cs_anode2_imon=2.24281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73452E1
iondef1_imon=1.08513E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68917E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.04398E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.63465E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47478E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.5098E-1
window_imon=-7.52649E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82675E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.9947E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50178E3
multb_neg_imon=7.46484E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37904E0
defgridb_imon=5.9479E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.41591E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64577E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.93795E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6263E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66041E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.81763E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.50445E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22496E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.79714E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.088E3	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.8003E1	-7.62939E-4	-8.80008E1	-9.53674E-5	4.52995E-3	9.4986E-2	2.73538E1	-3.26486E1	-3.2648E1	2.68677E1	1.19965E-7	2.51007E-3	2.51007E-3	6.33486E-3	3.01347E-1
2.0E0	1.05672E5	9.4E1	3.16E2	1.6E2	-7.23964E-2	-8.80032E1	-5.96046E-4	-8.80007E1	3.09944E-4	4.33922E-3	9.52244E-2	2.73045E1	-3.26634E1	-3.26627E1	2.68424E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.0148E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.8003E1	-6.67572E-4	-8.80006E1	3.57628E-4	4.45843E-3	9.49144E-2	2.73387E1	-3.26474E1	-3.26457E1	2.6843E1	1.19925E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.98554E-1
4.0E0	2.3126E4	1.1E1	6.55E2	3.98E2	-7.201E-2	-8.80031E1	-5.48363E-4	-8.80005E1	2.86102E-4	4.72069E-3	9.50575E-2	2.7329E1	-3.26523E1	-3.26585E1	2.6828E1	1.20293E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.97344E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80026E1	-1.07288E-3	-8.80007E1	5.72205E-4	4.64916E-3	9.48906E-2	2.72915E1	-3.26703E1	-3.26219E1	2.68749E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80028E1	-7.62939E-4	-8.80006E1	4.05312E-4	4.62532E-3	9.49383E-2	2.73147E1	-3.26729E1	-3.25966E1	2.68514E1	1.19913E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80028E1	-5.48363E-4	-8.80004E1	4.05312E-4	4.8399E-3	9.52005E-2	2.73419E1	-3.26439E1	-3.2633E1	2.68552E1	1.19757E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80032E1	-6.4373E-4	-8.80004E1	6.67572E-4	4.45843E-3	9.49144E-2	2.7329E1	-3.27031E1	-3.25966E1	2.68334E1	1.1971E-7	2.51498E-3	2.51498E-3	6.31234E-3	3.03501E-1
1.2E1	1.01E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.8003E1	-8.82149E-4	-8.80005E1	2.38419E-4	4.19617E-3	9.49383E-2	2.73128E1	-3.26467E1	-3.26136E1	2.68196E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01871E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80028E1	-7.15256E-4	-8.80007E1	4.05312E-4	4.45843E-3	9.50575E-2	2.73496E1	-3.26819E1	-3.2587E1	2.68292E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
1.4E1	3.379E3	4.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80026E1	-8.10623E-4	-8.80007E1	1.66893E-4	4.48227E-3	9.52482E-2	2.73063E1	-3.26567E1	-3.26092E1	2.68262E1	1.20174E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00041E-1
1.5E1	8.4E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80028E1	-8.10623E-4	-8.80004E1	3.57628E-4	4.50611E-3	9.51052E-2	2.73198E1	-3.26231E1	-3.26467E1	2.68274E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
1.6E1	4.84E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80029E1	-6.4373E-4	-8.80004E1	3.8147E-4	4.8399E-3	9.50575E-2	2.73387E1	-3.26502E1	-3.26089E1	2.68783E1	1.20158E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00966E-1
1.7E1	9.15E2	1.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80027E1	-6.91414E-4	-8.80006E1	5.24521E-4	4.17233E-3	9.48429E-2	2.73231E1	-3.26723E1	-3.2614E1	2.68292E1	1.1983E-7	2.51863E-3	2.51863E-3	6.31283E-3	3.00896E-1
1.8E1	3.986E3	1.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80027E1	-5.00679E-4	-8.80006E1	3.57628E-4	4.62532E-3	9.50098E-2	2.7361E1	-3.26615E1	-3.2626E1	2.6786E1					
1.9E1	2.056E3	3.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80026E1	-3.8147E-4	-8.80003E1	4.52995E-4	4.64916E-3	9.50575E-2	2.73173E1	-3.26836E1	-3.26383E1	2.68875E1	1.19705E-7	2.52318E-3	2.52318E-3	6.3514E-3	3.01347E-1
2.0E1	2.5785E4	1.2E1	8.08E2	5.58E2	-7.34782E-2	-8.80028E1	-6.19888E-4	-8.80005E1	7.15256E-4	4.69685E-3	9.49383E-2	2.73075E1	-3.26903E1	-3.26242E1	2.68144E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.03349E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80028E1	-6.91414E-4	-8.80006E1	5.96046E-4	4.74453E-3	9.49383E-2	2.73033E1	-3.2685E1	-3.26154E1	2.68621E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
2.2E1	1.871E3	1.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80029E1	-3.8147E-4	-8.80003E1	4.76837E-4	4.81606E-3	9.48191E-2	2.73358E1	-3.26832E1	-3.26484E1	2.67827E1	1.19891E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80028E1	-6.91414E-4	-8.80004E1	4.76837E-4	4.52995E-3	9.48191E-2	2.73452E1	-3.26431E1	-3.25971E1	2.68917E1	1.19861E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9926E-1