[Scan]
initial_time=2016-01-18T21:03:19
final_time=2016-01-18T21:03:38
ip_count=19
run=1024
dataset=7
scan=550
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.81818E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-6.88255E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.41832E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.18116E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.59493E-8
mult1=-2.51162E-8
mult2=-2.59286E-9
rf_tmon=-4.75876E-3
rf_agc=3.2907E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=5.57637E-10
bslens_vset=-6.2E0
bslens_vmon=-6.72502E0
bslens_imon=2.43321E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19658E1
lens5a_imon=2.02128E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04855E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54079E1
cs_ef1b_imon=2.80755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04459E1
cs_ea1_imon=2.55193E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00411E0
lens1_imon=1.44185E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03408E1
cs_ea2_imon=1.52777E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=2.9254E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.2987E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.26932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=2.38647E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63335E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=1.20188E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.94414E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.9891E-8
tplens_vset=1.4E-1
tplens_vmon=1.68529E0
tplens_imon=-3.6784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.5238E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.54038E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02987E2
lens6_imon=2.98173E-4
ql6_vset=1.0E-1
ql6_vmon=9.43899E-2
ql6_imon=8.6242E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=1.75488E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34421E1
lens5b_imon=2.16981E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46239E0
os_ea2_imon=-5.80532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00349E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.41301E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73466E1
iondef1_imon=1.11067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68319E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.02785E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.6358E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.64283E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=2.43171E-1
window_imon=-7.88688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.28548E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=7.10883E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.68202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.41483E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07437E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64894E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30932E1
cs_fil1_imon=9.94768E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63189E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66181E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6283E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.47772E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00407E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22402E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32087E-3
inlet_lpb_pmon=2.99302E-1
chamber_ion_pmon=1.20132E-7
chamber_cvt_pmon=2.51471E-3
foreline_cvt_pmon=2.51471E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.52394E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.007E3	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80029E1	-5.00679E-4	-8.80005E1	6.4373E-4	4.14848E-3	9.50813E-2	2.72937E1	-3.26747E1	-3.25888E1	2.68238E1	1.19809E-7	2.52318E-3	2.52318E-3	6.27461E-3	3.02133E-1
2.0E0	1.05876E5	9.3E1	3.16E2	1.6E2	-7.21643E-2	-8.80032E1	-9.53674E-4	-8.80005E1	1.19209E-4	4.43459E-3	9.48429E-2	2.73173E1	-3.26523E1	-3.2626E1	2.68244E1	1.20004E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80031E1	-6.91414E-4	-8.80003E1	2.86102E-4	4.41074E-3	9.4676E-2	2.73275E1	-3.26579E1	-3.26225E1	2.68777E1	1.20191E-7	2.52139E-3	2.52139E-3	6.3074E-3	2.98026E-1
4.0E0	2.3354E4	1.0E1	6.55E2	3.98E2	-7.30918E-2	-8.80032E1	-8.58307E-4	-8.80005E1	5.72205E-4	4.91142E-3	9.46999E-2	2.73263E1	-3.26762E1	-3.26107E1	2.684E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80032E1	-6.91414E-4	-8.80005E1	7.39098E-4	4.88758E-3	9.49144E-2	2.72973E1	-3.26374E1	-3.26296E1	2.68382E1	1.19851E-7	2.52169E-3	2.52169E-3	6.35601E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80032E1	-7.15256E-4	-8.80005E1	4.52995E-4	4.81606E-3	9.47952E-2	2.73111E1	-3.26236E1	-3.26464E1	2.68454E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80029E1	-6.4373E-4	-8.80004E1	2.14577E-4	4.50611E-3	9.46045E-2	2.73345E1	-3.26783E1	-3.26224E1	2.68587E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80031E1	-8.10623E-4	-8.80007E1	3.33786E-4	4.72069E-3	9.47475E-2	2.73159E1	-3.2635E1	-3.26398E1	2.6831E1	1.20031E-7	2.51136E-3	2.51136E-3	6.32418E-3	2.99879E-1
1.2E1	1.2E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80028E1	-9.53674E-4	-8.80007E1	1.43051E-4	4.52995E-3	9.46522E-2	2.72805E1	-3.2638E1	-3.26128E1	2.68226E1	1.19809E-7	2.52209E-3	2.52209E-3	6.28552E-3	2.98222E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80027E1	-8.82149E-4	-8.80006E1	1.66893E-4	4.55379E-3	9.48191E-2	2.73381E1	-3.27145E1	-3.26278E1	2.68471E1	1.2026E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.97394E-1
1.4E1	3.457E3	6.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80026E1	-7.62939E-4	-8.80006E1	4.05312E-4	4.62532E-3	9.48429E-2	2.7329E1	-3.26823E1	-3.26107E1	2.67837E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80029E1	-7.62939E-4	-8.80008E1	-4.76837E-5	4.673E-3	9.50098E-2	2.73393E1	-3.26596E1	-3.26549E1	2.68719E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.6E1	4.71E2	1.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80027E1	-9.05991E-4	-8.80006E1	-9.53674E-5	4.60148E-3	9.49621E-2	2.72985E1	-3.26957E1	-3.2638E1	2.68052E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
1.7E1	9.5E2	1.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80026E1	-7.86781E-4	-8.80009E1	2.38419E-4	4.673E-3	9.48429E-2	2.73033E1	-3.26472E1	-3.26549E1	2.68274E1	1.19902E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.99941E-1
1.8E1	3.958E3	6.0E0	7.27E2	5.0E2	-7.44831E-2	-8.8003E1	-9.77516E-4	-8.80011E1	3.09944E-4	4.55379E-3	9.48429E-2	2.73275E1	-3.26697E1	-3.2626E1	2.68123E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9874E-1
1.9E1	2.104E3	4.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80027E1	-9.29832E-4	-8.80007E1	1.43051E-4	4.55379E-3	9.49144E-2	2.73309E1	-3.26524E1	-3.26254E1	2.6852E1	1.20106E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01223E-1
2.0E1	2.6225E4	1.7E1	8.08E2	5.58E2	-7.40967E-2	-8.80028E1	-8.82149E-4	-8.80005E1	4.52995E-4	4.673E-3	9.48429E-2	2.73117E1	-3.26567E1	-3.26386E1	2.68244E1	1.20017E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00824E-1
2.1E1	6.3E1	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80027E1	-8.34465E-4	-8.80007E1	5.72205E-4	4.55379E-3	9.48906E-2	2.73664E1	-3.26632E1	-3.26472E1	2.68064E1	1.2033E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
2.2E1	1.781E3	2.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80023E1	-5.96046E-4	-8.80006E1	3.09944E-4	4.86374E-3	9.45807E-2	2.73104E1	-3.26573E1	-3.2626E1	2.68178E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80024E1	-5.72205E-4	-8.80006E1	4.29153E-4	4.50611E-3	9.43899E-2	2.73466E1	-3.26494E1	-3.26284E1	2.68319E1	1.20132E-7	2.51471E-3	2.51471E-3	6.32087E-3	2.99302E-1