[Scan]
initial_time=2016-01-18T21:04:12
final_time=2016-01-18T21:04:32
ip_count=19
run=1024
dataset=7
scan=552
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.79723E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-7.01427E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.38832E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.16079E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.59663E-8
mult1=-1.35934E-8
mult2=-2.84636E-9
rf_tmon=-5.68403E-3
rf_agc=3.13268E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=5.5964E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.2818E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19412E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04963E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=2.78881E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.0237E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=2.5714E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02273E0
lens1_imon=1.66535E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.9618E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03504E1
cs_ea2_imon=1.51407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=2.92936E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.2959E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14873E1
os_ea1_imon=2.37457E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.17232E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.93801E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.99684E-8
tplens_vset=1.4E-1
tplens_vmon=1.67448E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25912E1
iondef3_imon=1.51623E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.56273E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98173E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=8.74209E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.7574E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.15791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4744E0
os_ea2_imon=-8.40089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7163E1
cs_ef2a_imon=3.14812E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03714E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11448E1
os_restr2_imon=3.42022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23015E2
cs_ionfoca_imon=6.29063E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.24533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73646E1
iondef1_imon=1.10779E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.06006E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.63455E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15597E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55853E1
einzel_imon=7.87525E-6
window_vset=0.0E0
window_vmon=2.9663E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-8.57164E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.28548E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50984E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.42823E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06873E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64673E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=9.95236E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62636E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6626E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.58728E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.66597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22461E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0254E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.037E3	2.0E0	1.47E2	4.1E1	-7.17779E-2	-8.8003E1	-4.05312E-4	-8.80006E1	2.6226E-4	4.81606E-3	9.48906E-2	2.73271E1	-3.2695E1	-3.26341E1	2.68586E1	1.19851E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.9943E-1
2.0E0	1.05579E5	9.2E1	3.16E2	1.6E2	-7.25507E-2	-8.80032E1	-6.67572E-4	-8.80006E1	1.66893E-4	4.74453E-3	9.47714E-2	2.73488E1	-3.26678E1	-3.26366E1	2.68101E1	1.19953E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.02769E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.8003E1	-7.39098E-4	-8.80001E1	3.09944E-4	4.48227E-3	9.46283E-2	2.73381E1	-3.26393E1	-3.26399E1	2.6829E1	1.19872E-7	2.52027E-3	2.52027E-3	6.34099E-3	2.99879E-1
4.0E0	2.3119E4	1.7E1	6.55E2	3.98E2	-7.29374E-2	-8.8003E1	-1.00136E-3	-8.80005E1	-1.19209E-4	4.41074E-3	9.47714E-2	2.73181E1	-3.2685E1	-3.26095E1	2.682E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80027E1	-1.0252E-3	-8.80004E1	1.19209E-4	4.95911E-3	9.48429E-2	2.73225E1	-3.26657E1	-3.2605E1	2.68798E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80026E1	-8.82149E-4	-8.80007E1	1.90735E-4	4.91142E-3	9.4986E-2	2.73063E1	-3.26434E1	-3.2623E1	2.68337E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80025E1	-1.07288E-3	-8.80005E1	5.48363E-4	4.57764E-3	9.48191E-2	2.72955E1	-3.26494E1	-3.26056E1	2.68004E1	1.20435E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80026E1	-1.00136E-3	-8.80002E1	4.05312E-4	4.74453E-3	9.46522E-2	2.73297E1	-3.26356E1	-3.26188E1	2.68671E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80027E1	-1.00136E-3	-8.80003E1	5.72205E-4	4.98295E-3	9.44853E-2	2.73111E1	-3.26783E1	-3.26356E1	2.68178E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9874E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80028E1	-7.86781E-4	-8.80005E1	5.96046E-4	4.81606E-3	9.4676E-2	2.73305E1	-3.26639E1	-3.26298E1	2.68339E1	1.19549E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98222E-1
1.4E1	3.432E3	1.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80028E1	-4.76837E-4	-8.80004E1	5.96046E-4	4.45843E-3	9.45091E-2	2.73057E1	-3.26741E1	-3.26098E1	2.68314E1	1.20146E-7	2.51923E-3	2.51923E-3	6.28737E-3	2.99339E-1
1.5E1	1.13E2	1.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80028E1	-4.76837E-4	-8.80004E1	7.15256E-4	4.48227E-3	9.47952E-2	2.73263E1	-3.26661E1	-3.26425E1	2.68641E1	1.20209E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.99686E-1
1.6E1	4.51E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80027E1	-4.05312E-4	-8.80006E1	5.72205E-4	4.95911E-3	9.50575E-2	2.73577E1	-3.26768E1	-3.26144E1	2.68298E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
1.7E1	8.9E2	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.8003E1	-4.76837E-4	-8.80007E1	5.48363E-4	4.86374E-3	9.47952E-2	2.73261E1	-3.2644E1	-3.26296E1	2.68113E1	1.19872E-7	2.51248E-3	2.51248E-3	6.33538E-3	3.01742E-1
1.8E1	3.939E3	6.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80028E1	-3.33786E-4	-8.80003E1	6.4373E-4	4.74453E-3	9.48429E-2	2.73153E1	-3.26771E1	-3.26657E1	2.68053E1	1.19819E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.0201E-1
1.9E1	2.084E3	1.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80031E1	-6.4373E-4	-8.80004E1	4.52995E-4	4.64916E-3	9.47952E-2	2.7334E1	-3.26401E1	-3.26279E1	2.68556E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.03545E-1
2.0E1	2.5976E4	1.2E1	8.08E2	5.58E2	-7.19325E-2	-8.80028E1	-3.57628E-4	-8.80007E1	6.19888E-4	4.76837E-3	9.5129E-2	2.73277E1	-3.26591E1	-3.26083E1	2.68328E1	1.19935E-7	2.52325E-3	2.52325E-3	6.31925E-3	3.00479E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80029E1	-5.00679E-4	-8.80004E1	2.6226E-4	4.55379E-3	9.52005E-2	2.73287E1	-3.26419E1	-3.26254E1	2.68088E1	1.20252E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00302E-1
2.2E1	1.823E3	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80031E1	-8.34465E-4	-8.80004E1	1.43051E-4	4.72069E-3	9.50098E-2	2.73021E1	-3.26621E1	-3.26512E1	2.68412E1					
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80029E1	-6.19888E-4	-8.80003E1	5.72205E-4	4.79221E-3	9.48191E-2	2.73646E1	-3.26855E1	-3.25912E1	2.68514E1	1.20209E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00197E-1