[Scan]
initial_time=2016-01-18T21:04:39
final_time=2016-01-18T21:04:58
ip_count=19
run=1024
dataset=7
scan=553
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.76412E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-6.83463E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.39153E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.18449E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.59135E-8
mult1=-1.64831E-8
mult2=-2.8803E-9
rf_tmon=-4.57852E-3
rf_agc=3.36039E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.58281E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63912E0
bslens_imon=2.23453E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.99346E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04942E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54151E1
cs_ef1b_imon=2.78845E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02136E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04621E1
cs_ea1_imon=2.55616E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99982E0
lens1_imon=1.50361E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.95423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03941E1
cs_ea2_imon=1.48402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=2.93765E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.29766E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.26823E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15196E1
os_ea1_imon=2.38793E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25822E0
cs_ionrep_imon=1.17953E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02085E1
cs_anode1_imon=2.94486E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.99143E-8
tplens_vset=1.4E-1
tplens_vmon=1.68979E0
tplens_imon=-3.73282E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.49173E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26909E1
iondef2_imon=1.5718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98037E-4
ql6_vset=1.0E-1
ql6_vmon=9.46999E-2
ql6_imon=9.33075E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28638E0
ionrepsh_imon=1.76316E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33872E1
lens5b_imon=2.16021E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48656E0
os_ea2_imon=-8.03019E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00615E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71678E1
cs_ef2a_imon=3.15461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02933E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11562E1
os_restr2_imon=3.44076E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.29524E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01629E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73466E1
iondef1_imon=1.11672E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68675E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.01734E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.63836E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15957E0
cs_ionaccel_imon=-1.74734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.94733E-6
window_vset=0.0E0
window_vmon=2.56986E-1
window_imon=-8.06708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39012E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-8.67976E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=6.85145E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=7.07918E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=8.05619E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27178E0
defgridb_imon=6.23072E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.41507E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06662E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64733E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30917E1
cs_fil1_imon=9.94684E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63075E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66237E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84391E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.49657E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37938E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22404E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.96533E-1
res40_imon=-2.64473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.06E3	2.0E0	1.47E2	4.1E1	-7.15461E-2	-8.8003E1	-1.12057E-3	-8.80003E1	4.76837E-4	4.98295E-3	9.51529E-2	2.73157E1	-3.26531E1	-3.26077E1	2.68036E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
2.0E0	1.05672E5	8.8E1	3.16E2	1.6E2	-7.19325E-2	-8.80028E1	-9.05991E-4	-8.80005E1	5.24521E-4	4.43459E-3	9.49383E-2	2.73045E1	-3.2653E1	-3.2617E1	2.68202E1	1.198E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0148E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.11597E-2	-8.80026E1	-8.58307E-4	-8.80005E1	4.29153E-4	4.55379E-3	9.52005E-2	2.73459E1	-3.26668E1	-3.25958E1	2.68205E1	1.19978E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00942E-1
4.0E0	2.3338E4	1.1E1	6.55E2	3.98E2	-7.16233E-2	-8.80028E1	-6.91414E-4	-8.80005E1	3.09944E-4	4.50611E-3	9.50575E-2	2.73057E1	-3.2659E1	-3.26408E1	2.68148E1	1.19956E-7	2.52725E-3	2.52725E-3	6.30239E-3	2.99577E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80028E1	-6.67572E-4	-8.80005E1	4.05312E-4	4.72069E-3	9.52721E-2	2.73135E1	-3.26687E1	-3.26549E1	2.68124E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80028E1	-1.00136E-3	-8.80003E1	5.00679E-4	4.76837E-3	9.50575E-2	2.73033E1	-3.265E1	-3.25707E1	2.68617E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80029E1	-8.10623E-4	-8.80004E1	3.09944E-4	4.55379E-3	9.48668E-2	2.7346E1	-3.26356E1	-3.26434E1	2.68502E1	1.20311E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.8003E1	-5.96046E-4	-8.80006E1	4.29153E-4	4.81606E-3	9.52721E-2	2.73293E1	-3.26703E1	-3.26124E1	2.68316E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.97445E-1
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80031E1	-7.86781E-4	-8.80008E1	6.4373E-4	4.81606E-3	9.4676E-2	2.73165E1	-3.26536E1	-3.26104E1	2.6818E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.97445E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80029E1	-8.58307E-4	-8.80005E1	2.6226E-4	4.673E-3	9.46522E-2	2.73291E1	-3.26765E1	-3.26621E1	2.68351E1	1.19749E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.97394E-1
1.4E1	3.404E3	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80031E1	-1.04904E-3	-8.80004E1	5.96046E-4	4.62532E-3	9.48668E-2	2.72997E1	-3.26567E1	-3.26314E1	2.6856E1	1.20137E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99083E-1
1.5E1	9.8E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80032E1	-8.10623E-4	-8.80003E1	4.29153E-4	4.24385E-3	9.46522E-2	2.73387E1	-3.26585E1	-3.2623E1	2.68358E1	1.19953E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9841E-1
1.6E1	4.35E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80032E1	-8.10623E-4	-8.80005E1	5.24521E-4	4.26769E-3	9.49621E-2	2.73369E1	-3.26543E1	-3.26056E1	2.68436E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.7E1	9.88E2	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.80032E1	-7.86781E-4	-8.80009E1	4.29153E-4	4.60148E-3	9.46283E-2	2.73175E1	-3.26655E1	-3.26107E1	2.68196E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1
1.8E1	4.097E3	3.0E0	7.27E2	5.0E2	-7.14689E-2	-8.80032E1	-5.96046E-4	-8.80007E1	6.19888E-4	4.48227E-3	9.47714E-2	2.73326E1	-3.26432E1	-3.26309E1	2.68599E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02133E-1
1.9E1	2.092E3	4.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80033E1	-4.29153E-4	-8.80009E1	1.90735E-4	5.24521E-3	9.50336E-2	2.7349E1	-3.26615E1	-3.2599E1	2.68346E1	1.20278E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01871E-1
2.0E1	2.607E4	1.4E1	8.08E2	5.58E2	-7.22418E-2	-8.80032E1	-7.15256E-4	-8.80009E1	1.66893E-4	4.81606E-3	9.51529E-2	2.73027E1	-3.26458E1	-3.26146E1	2.68286E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80035E1	-5.00679E-4	-8.80005E1	5.72205E-4	4.79221E-3	9.49383E-2	2.73204E1	-3.2659E1	-3.26189E1	2.68328E1	1.19965E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00041E-1
2.2E1	1.801E3	2.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80031E1	-5.72205E-4	-8.80005E1	5.72205E-4	4.91142E-3	9.48906E-2	2.72945E1	-3.26608E1	-3.26101E1	2.68233E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99175E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80031E1	-5.72205E-4	-8.80005E1	5.00679E-4	4.60148E-3	9.46999E-2	2.73466E1	-3.26909E1	-3.26212E1	2.68675E1	1.19697E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1