[Scan]
initial_time=2016-01-18T21:05:05
final_time=2016-01-18T21:05:25
ip_count=19
run=1024
dataset=7
scan=554
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.7523E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-7.05791E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.34667E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.20659E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.58695E-8
mult1=-1.6486E-8
mult2=-2.66446E-9
rf_tmon=-4.58616E-3
rf_agc=3.33681E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.43451E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.39355E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19592E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=2.80106E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02366E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04579E1
cs_ea1_imon=2.56419E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02213E0
lens1_imon=1.67256E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.47802E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.93297E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.29225E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.27725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.38899E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.1871E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=2.9463E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.98964E-8
tplens_vset=1.4E-1
tplens_vmon=1.64083E0
tplens_imon=-2.59691E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26809E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98104E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=9.24873E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29716E0
ionrepsh_imon=1.77038E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3355E1
lens5b_imon=2.15611E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4738E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.15749E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01552E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11472E1
os_restr2_imon=3.41914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.29063E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73582E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.01722E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.64585E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16078E0
cs_ionaccel_imon=-1.72932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.46174E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86206E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.3792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93662E3
defgrida_imon=6.71589E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50068E3
multb_neg_imon=6.9394E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53991E0
defgridb_imon=5.90838E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.43387E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07269E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64638E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=9.95032E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6293E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66148E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98915E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.43647E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22439E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33538E-3
inlet_lpb_pmon=2.97499E-1
chamber_ion_pmon=1.19978E-7
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82117E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.948E3	2.0E0	1.47E2	4.1E1	-7.11597E-2	-8.80032E1	-7.86781E-4	-8.80009E1	4.29153E-4	4.33922E-3	9.49621E-2	2.73381E1	-3.2637E1	-3.26318E1	2.68366E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98481E-1
2.0E0	1.05368E5	1.1E2	3.16E2	1.6E2	-7.13915E-2	-8.80032E1	-1.00136E-3	-8.80009E1	8.58307E-4	4.74453E-3	9.47714E-2	2.73051E1	-3.26676E1	-3.26064E1	2.68431E1	1.19891E-7	2.51393E-3	2.51393E-3	6.30212E-3	2.98342E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80031E1	-9.53674E-4	-8.80009E1	5.96046E-4	4.64916E-3	9.46522E-2	2.73299E1	-3.26638E1	-3.26443E1	2.68146E1	1.19991E-7	2.50931E-3	2.50931E-3	6.3245E-3	3.00251E-1
4.0E0	2.3301E4	6.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80033E1	-6.19888E-4	-8.80009E1	8.34465E-4	4.72069E-3	9.45807E-2	2.73141E1	-3.26428E1	-3.26122E1	2.68262E1	1.20092E-7	2.52236E-3	2.52236E-3	6.31798E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80033E1	-1.16825E-3	-8.80008E1	4.29153E-4	5.07832E-3	9.47952E-2	2.73216E1	-3.26933E1	-3.26166E1	2.68923E1	1.19913E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.80033E1	-7.15256E-4	-8.80008E1	5.72205E-4	4.673E-3	9.4533E-2	2.73002E1	-3.26634E1	-3.26003E1	2.6822E1	1.20069E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.08504E-2	-8.80031E1	-5.96046E-4	-8.80005E1	3.8147E-4	4.64916E-3	9.45807E-2	2.73051E1	-3.26697E1	-3.26278E1	2.68496E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.05415E-2	-8.80034E1	-6.19888E-4	-8.8001E1	6.19888E-4	4.50611E-3	9.46999E-2	2.73021E1	-3.2638E1	-3.26404E1	2.68611E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.80033E1	-8.34465E-4	-8.80006E1	3.33786E-4	4.57764E-3	9.45807E-2	2.73195E1	-3.26741E1	-3.2623E1	2.68226E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01085E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.10051E-2	-8.80032E1	-7.15256E-4	-8.80005E1	0.0E0	4.76837E-3	9.46045E-2	2.73123E1	-3.26386E1	-3.26789E1	2.6795E1	1.20226E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02922E-1
1.4E1	3.322E3	1.0E0	5.66E2	3.82E2	-7.14689E-2	-8.80032E1	-7.15256E-4	-8.80007E1	4.52995E-4	4.72069E-3	9.46999E-2	2.73321E1	-3.26458E1	-3.26278E1	2.68581E1	1.19757E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
1.5E1	1.01E2	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80028E1	-5.72205E-4	-8.80006E1	2.6226E-4	5.07832E-3	9.45807E-2	2.73369E1	-3.26524E1	-3.26428E1	2.68599E1	1.19705E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
1.6E1	4.97E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80027E1	-7.86781E-4	-8.80007E1	3.33786E-4	4.98295E-3	9.49144E-2	2.73351E1	-3.27068E1	-3.26101E1	2.68502E1	1.1966E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.00144E-1
1.7E1	9.38E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80028E1	-7.86781E-4	-8.80005E1	1.19209E-4	4.76837E-3	9.47237E-2	2.73735E1	-3.26803E1	-3.25953E1	2.68466E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.97963E-1
1.8E1	4.002E3	3.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80032E1	-9.53674E-4	-8.80007E1	5.00679E-4	5.00679E-3	9.4986E-2	2.73315E1	-3.26873E1	-3.26158E1	2.68178E1	1.2026E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.98665E-1
1.9E1	2.153E3	2.0E0	7.68E2	5.29E2	-7.11597E-2	-8.80028E1	-1.23978E-3	-8.80008E1	3.8147E-4	4.33922E-3	9.47475E-2	2.73033E1	-3.26514E1	-3.2636E1	2.68325E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
2.0E1	2.6393E4	1.0E1	8.08E2	5.58E2	-7.15461E-2	-8.80031E1	-7.62939E-4	-8.80007E1	2.86102E-4	4.45843E-3	9.50336E-2	2.73429E1	-3.26861E1	-3.26242E1	2.68388E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.10825E-2	-8.80028E1	-9.77516E-4	-8.80005E1	3.57628E-4	5.05447E-3	9.4986E-2	2.73017E1	-3.26881E1	-3.26243E1	2.68117E1	1.2033E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
2.2E1	1.854E3	1.0E0	8.89E2	6.17E2	-7.10825E-2	-8.80028E1	-8.10623E-4	-8.80005E1	4.29153E-4	4.98295E-3	9.50098E-2	2.73606E1	-3.27003E1	-3.26173E1	2.68364E1	1.19634E-7	2.51783E-3	2.51783E-3	6.3074E-3	3.01237E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.8003E1	-4.76837E-4	-8.80004E1	2.6226E-4	4.52995E-3	9.4986E-2	2.73582E1	-3.26809E1	-3.26272E1	2.68064E1	1.19978E-7	2.52139E-3	2.52139E-3	6.33538E-3	2.97499E-1