[Scan]
initial_time=2016-01-18T21:06:25
final_time=2016-01-18T21:06:45
ip_count=19
run=1024
dataset=7
scan=557
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13143E-2
qbias_imon=-3.83052E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-6.98328E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.40128E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.20648E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.59648E-8
mult1=-1.71574E-8
mult2=-2.63078E-9
rf_tmon=-4.59053E-3
rf_agc=3.24023E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.61774E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.18447E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1922E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=2.80034E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.56852E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02453E0
lens1_imon=1.34091E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03444E1
cs_ea2_imon=1.48126E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.92504E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.29075E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.26391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.39259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22086E0
cs_ionrep_imon=1.17592E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93763E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.94558E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.99515E-8
tplens_vset=1.4E-1
tplens_vmon=1.74057E0
tplens_imon=-1.83987E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.57103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=9.04405E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=1.75704E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33592E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47861E0
os_ea2_imon=-8.43694E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11334E1
os_restr2_imon=3.41193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23107E2
cs_ionfoca_imon=6.30072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.24677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.98379E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.62562E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15837E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47468E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57108E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.64795E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=8.00286E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.5032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33317E1
os_fil1_imon=9.42216E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07407E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64513E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.95482E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62666E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66023E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.87335E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.56537E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.92058E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22337E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=3.00348E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.76711E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.023E3	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80031E1	-5.72205E-4	-8.80005E1	2.14577E-4	4.26769E-3	9.46283E-2	2.73234E1	-3.26797E1	-3.26307E1	2.68352E1	1.20226E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01609E-1
2.0E0	1.05385E5	7.5E1	3.16E2	1.6E2	-7.31692E-2	-8.8003E1	-3.57628E-4	-8.80004E1	7.15256E-5	4.31538E-3	9.4676E-2	2.73544E1	-3.26506E1	-3.26374E1	2.68142E1	1.20004E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.98665E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80031E1	-5.72205E-4	-8.80005E1	1.19209E-4	4.31538E-3	9.48668E-2	2.72986E1	-3.26697E1	-3.26331E1	2.68046E1	1.19819E-7	2.52139E-3	2.52139E-3	6.34099E-3	2.98026E-1
4.0E0	2.308E4	1.1E1	6.55E2	3.98E2	-7.201E-2	-8.80028E1	-5.48363E-4	-8.80003E1	3.09944E-4	4.74453E-3	9.44853E-2	2.72951E1	-3.26933E1	-3.25847E1	2.68893E1	1.19991E-7	2.51287E-3	2.51287E-3	6.33919E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80029E1	-5.72205E-4	-8.80005E1	8.58307E-4	4.50611E-3	9.47952E-2	2.73045E1	-3.26699E1	-3.2602E1	2.68304E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.8003E1	-9.53674E-4	-8.80005E1	4.52995E-4	4.76837E-3	9.48429E-2	2.73535E1	-3.26791E1	-3.2629E1	2.68377E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80029E1	-7.15256E-4	-8.80007E1	7.39098E-4	4.3869E-3	9.50098E-2	2.73045E1	-3.26536E1	-3.26567E1	2.6846E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.8003E1	-6.91414E-4	-8.80006E1	4.29153E-4	4.64916E-3	9.52244E-2	2.73399E1	-3.26536E1	-3.25894E1	2.68148E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80031E1	-5.00679E-4	-8.80006E1	5.00679E-4	4.43459E-3	9.48429E-2	2.7321E1	-3.26437E1	-3.26225E1	2.68388E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.97963E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.8003E1	-2.38419E-4	-8.80006E1	7.86781E-4	4.41074E-3	9.52005E-2	2.73243E1	-3.26434E1	-3.26158E1	2.68611E1	1.20004E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.99941E-1
1.4E1	3.474E3	2.0E0	5.66E2	3.82E2	-7.22418E-2	-8.8003E1	-5.72205E-4	-8.80007E1	7.15256E-4	4.673E-3	9.53436E-2	2.73375E1	-3.26849E1	-3.26176E1	2.6807E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
1.5E1	8.8E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80032E1	-6.19888E-4	-8.80006E1	6.91414E-4	5.00679E-3	9.53674E-2	2.73535E1	-3.26402E1	-3.26391E1	2.6806E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
1.6E1	4.61E2	0.0E0	6.47E2	4.41E2	-7.13915E-2	-8.80033E1	-9.77516E-4	-8.80008E1	4.52995E-4	4.64916E-3	9.53197E-2	2.73412E1	-3.26615E1	-3.26229E1	2.68537E1	1.1993E-7	2.51265E-3	2.51265E-3	6.29703E-3	3.01237E-1
1.7E1	8.9E2	0.0E0	6.87E2	4.7E2	-7.09279E-2	-8.80032E1	-8.34465E-4	-8.80009E1	5.00679E-4	4.69685E-3	9.52005E-2	2.73406E1	-3.26774E1	-3.26383E1	2.68472E1	1.20137E-7	2.52473E-3	2.52473E-3	6.33538E-3	3.02545E-1
1.8E1	3.92E3	3.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80031E1	-7.39098E-4	-8.80006E1	7.86781E-4	4.81606E-3	9.51767E-2	2.73075E1	-3.26651E1	-3.26236E1	2.68226E1	1.20031E-7	2.52473E-3	2.52473E-3	6.31858E-3	3.00942E-1
1.9E1	2.089E3	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80031E1	-7.15256E-4	-8.80007E1	7.62939E-4	4.72069E-3	9.53913E-2	2.73315E1	-3.27318E1	-3.26891E1	2.68635E1	1.20069E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01609E-1
2.0E1	2.6284E4	2.3E1	8.08E2	5.58E2	-7.10825E-2	-8.80032E1	-6.91414E-4	-8.80007E1	6.19888E-4	4.3869E-3	9.50813E-2	2.73309E1	-3.26597E1	-3.26188E1	2.68526E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.03712E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.10825E-2	-8.80029E1	-7.15256E-4	-8.80005E1	3.09944E-4	4.43459E-3	9.52005E-2	2.73261E1	-3.26711E1	-3.26182E1	2.67962E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
2.2E1	1.836E3	1.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80028E1	-1.0252E-3	-8.80006E1	2.86102E-4	4.64916E-3	9.48668E-2	2.73619E1	-3.26556E1	-3.26231E1	2.68441E1	1.20122E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.13143E-2	-8.80028E1	-6.19888E-4	-8.80006E1	5.24521E-4	4.74453E-3	9.51052E-2	2.73063E1	-3.26717E1	-3.25996E1	2.68334E1	1.19891E-7	2.52342E-3	2.52342E-3	6.33388E-3	3.00348E-1