[Scan]
initial_time=2016-01-18T21:07:19
final_time=2016-01-18T21:07:38
ip_count=19
run=1024
dataset=7
scan=559
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.75833E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-6.7867E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.37895E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.1673E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.58927E-8
mult1=-2.27683E-8
mult2=-2.75254E-9
rf_tmon=-5.17333E-3
rf_agc=3.20779E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.52809E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6355E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19664E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54253E1
cs_ef1b_imon=2.80178E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.55301E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98067E0
lens1_imon=1.61488E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.95423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.50505E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=2.91711E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.28974E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.26571E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15131E1
os_ea1_imon=2.36339E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21785E0
cs_ionrep_imon=1.19359E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.95495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.99418E-8
tplens_vset=1.4E-1
tplens_vmon=1.64384E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.50253E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.55877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98086E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=8.9277E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=1.75199E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33477E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4738E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.15533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03714E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11087E1
os_restr2_imon=3.40076E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73712E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.02684E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.6182E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15717E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86224E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.14488E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93674E3
defgrida_imon=6.26888E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.43688E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.41916E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64635E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.94221E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62666E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65784E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82176E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73688E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.60275E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22286E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.34975E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.009E3	0.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80028E1	-1.00136E-3	-8.80005E1	8.34465E-4	4.26769E-3	9.5129E-2	2.73016E1	-3.26767E1	-3.26378E1	2.68777E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01871E-1
2.0E0	1.05335E5	1.08E2	3.16E2	1.6E2	-7.03094E-2	-8.80029E1	-7.39098E-4	-8.80007E1	3.33786E-4	4.36306E-3	9.51529E-2	2.73237E1	-3.26843E1	-3.26242E1	2.68184E1	1.19749E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80027E1	-1.23978E-3	-8.80006E1	4.05312E-4	4.22001E-3	9.51767E-2	2.73311E1	-3.26225E1	-3.26638E1	2.68472E1	1.19933E-7	2.51593E-3	2.51593E-3	6.32371E-3	2.98445E-1
4.0E0	2.2852E4	4.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80031E1	-8.82149E-4	-8.80004E1	6.4373E-4	4.62532E-3	9.51529E-2	2.73322E1	-3.26933E1	-3.26172E1	2.68677E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80028E1	-9.77516E-4	-8.80006E1	5.72205E-4	4.3869E-3	9.48906E-2	2.73291E1	-3.26561E1	-3.26254E1	2.68163E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80031E1	-9.53674E-4	-8.80005E1	3.09944E-4	4.07696E-3	9.48191E-2	2.72805E1	-3.26735E1	-3.25942E1	2.6852E1	1.20069E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.8003E1	-1.07288E-3	-8.80007E1	0.0E0	4.673E-3	9.51767E-2	2.7312E1	-3.26324E1	-3.26208E1	2.68233E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.8003E1	-7.62939E-4	-8.80006E1	1.90735E-4	4.24385E-3	9.4986E-2	2.73275E1	-3.26467E1	-3.26183E1	2.68947E1	1.20127E-7	2.52301E-3	2.52301E-3	6.33341E-3	3.00494E-1
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.11597E-2	-8.80032E1	-9.29832E-4	-8.80008E1	2.38419E-4	4.24385E-3	9.50336E-2	2.73116E1	-3.26543E1	-3.26313E1	2.68516E1	1.20114E-7	2.51538E-3	2.51538E-3	6.32371E-3	3.00766E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80028E1	-9.05991E-4	-8.80008E1	4.52995E-4	4.33922E-3	9.5129E-2	2.73363E1	-3.26861E1	-3.25834E1	2.68364E1					
1.4E1	3.326E3	1.0E0	5.66E2	3.82E2	-7.16233E-2	-8.8003E1	-5.96046E-4	-8.80007E1	5.48363E-4	4.3869E-3	9.47714E-2	2.72791E1	-3.26661E1	-3.26219E1	2.68418E1	1.20055E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.01223E-1
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80031E1	-9.05991E-4	-8.80008E1	4.52995E-4	4.48227E-3	9.49383E-2	2.73511E1	-3.26703E1	-3.26366E1	2.67966E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
1.6E1	4.28E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80033E1	-9.29832E-4	-8.8001E1	1.19209E-4	4.31538E-3	9.51052E-2	2.73363E1	-3.26579E1	-3.26482E1	2.68659E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9926E-1
1.7E1	9.56E2	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80031E1	-1.04904E-3	-8.80006E1	2.86102E-4	4.57764E-3	9.4986E-2	2.73237E1	-3.26422E1	-3.26296E1	2.68194E1	1.19757E-7	2.5199E-3	2.5199E-3	6.28006E-3	2.99E-1
1.8E1	3.9E3	2.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80032E1	-9.77516E-4	-8.80006E1	4.05312E-4	4.74453E-3	9.49621E-2	2.72973E1	-3.26302E1	-3.26446E1	2.68412E1	1.20226E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.98222E-1
1.9E1	2.109E3	1.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80032E1	-9.53674E-4	-8.80006E1	3.09944E-4	4.64916E-3	9.49383E-2	2.72552E1	-3.26705E1	-3.27342E1	2.68611E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.99E-1
2.0E1	2.6355E4	7.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80031E1	-9.05991E-4	-8.80007E1	4.05312E-4	4.33922E-3	9.48429E-2	2.73237E1	-3.26567E1	-3.2623E1	2.67998E1	1.19887E-7	2.51935E-3	2.51935E-3	6.31014E-3	3.00041E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.12368E-2	-8.8003E1	-1.00136E-3	-8.80008E1	2.86102E-4	4.55379E-3	9.49383E-2	2.73027E1	-3.26573E1	-3.26218E1	2.684E1					
2.2E1	1.871E3	0.0E0	8.89E2	6.17E2	-7.12368E-2	-8.80034E1	-1.00136E-3	-8.80009E1	2.86102E-4	4.55379E-3	9.48906E-2	2.73092E1	-3.26644E1	-3.26349E1	2.68569E1	1.20435E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80031E1	-9.53674E-4	-8.80007E1	2.86102E-4	4.74453E-3	9.52244E-2	2.73712E1	-3.26927E1	-3.26224E1	2.68256E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1