[Scan]
initial_time=2016-01-18T21:07:45
final_time=2016-01-18T21:08:05
ip_count=19
run=1024
dataset=7
scan=560
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.7859E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.10654E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.44324E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.21776E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.59349E-8
mult1=-1.85429E-8
mult2=-2.64486E-9
rf_tmon=-5.5536E-3
rf_agc=3.28254E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.81217E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=2.53264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19848E1
lens5a_imon=2.01412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.80683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04168E1
cs_ea1_imon=2.54503E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0454E0
lens1_imon=1.38941E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64999E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.50303E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.93044E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.29341E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.26715E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=2.3854E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.06775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=1.19121E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.94954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.99569E-8
tplens_vset=1.4E-1
tplens_vmon=1.65264E0
tplens_imon=-4.51082E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26325E1
iondef3_imon=1.48746E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26531E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.97981E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=9.01294E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=1.76565E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.16419E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47626E0
os_ea2_imon=-7.83786E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.15605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03774E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67391E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11364E1
os_restr2_imon=3.40653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.23848E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73523E1
iondef1_imon=1.10697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68574E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.03187E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.60712E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.72932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=6.91443E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=6.47908E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.93212E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66246E0
defgridb_imon=6.08975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33319E1
os_fil1_imon=9.4188E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07149E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64506E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.95338E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6251E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65878E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86374E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.59117E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.91727E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22372E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.97963E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.49081E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.959E3	2.0E0	1.47E2	4.1E1	-7.201E-2	-8.8003E1	-8.58307E-4	-8.80009E1	3.09944E-4	4.76837E-3	9.48668E-2	2.73039E1	-3.26685E1	-3.26207E1	2.6843E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1
2.0E0	1.04689E5	8.6E1	3.16E2	1.6E2	-7.11597E-2	-8.8003E1	-5.48363E-4	-8.80004E1	1.90735E-4	4.76837E-3	9.50336E-2	2.73125E1	-3.26414E1	-3.26232E1	2.6796E1	1.20311E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9943E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80029E1	-5.00679E-4	-8.80009E1	2.6226E-4	4.52995E-3	9.51052E-2	2.73439E1	-3.26941E1	-3.26165E1	2.68506E1	1.20016E-7	2.52058E-3	2.52058E-3	6.29721E-3	2.98696E-1
4.0E0	2.3198E4	1.2E1	6.55E2	3.98E2	-7.201E-2	-8.8003E1	-5.00679E-4	-8.80008E1	3.8147E-4	4.52995E-3	9.50575E-2	2.73287E1	-3.26372E1	-3.26549E1	2.68322E1	1.19963E-7	2.51557E-3	2.51557E-3	6.3074E-3	2.99916E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80028E1	-5.00679E-4	-8.80012E1	7.39098E-4	4.60148E-3	9.5129E-2	2.73261E1	-3.26543E1	-3.26026E1	2.68707E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.97901E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80031E1	-7.15256E-4	-8.80008E1	1.90735E-4	4.48227E-3	9.48191E-2	2.73466E1	-3.26789E1	-3.25659E1	2.6816E1	1.19809E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80027E1	-6.19888E-4	-8.80007E1	2.38419E-4	4.50611E-3	9.46522E-2	2.73045E1	-3.26891E1	-3.2623E1	2.68725E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80031E1	-6.67572E-4	-8.80004E1	5.24521E-4	4.673E-3	9.46283E-2	2.73122E1	-3.26508E1	-3.26124E1	2.6849E1	1.20017E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00824E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80029E1	-6.19888E-4	-8.80007E1	8.58307E-4	4.93526E-3	9.48191E-2	2.73057E1	-3.26725E1	-3.26205E1	2.68635E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.0071E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80032E1	-1.90735E-4	-8.80007E1	7.15256E-4	4.55379E-3	9.48906E-2	2.72727E1	-3.25936E1	-3.26683E1	2.68487E1	1.20191E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.00942E-1
1.4E1	3.449E3	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80032E1	-5.72205E-4	-8.80004E1	6.19888E-4	4.31538E-3	9.48906E-2	2.7317E1	-3.26703E1	-3.26023E1	2.68188E1	1.20042E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.00852E-1
1.5E1	1.15E2	1.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80031E1	-5.00679E-4	-8.80006E1	2.86102E-4	4.14848E-3	9.47714E-2	2.73429E1	-3.26284E1	-3.26554E1	2.6855E1	1.19991E-7	2.51725E-3	2.51725E-3	6.33592E-3	3.01337E-1
1.6E1	4.91E2	2.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80032E1	-4.76837E-4	-8.8001E1	1.19209E-4	4.36306E-3	9.48668E-2	2.73219E1	-3.26717E1	-3.26062E1	2.67842E1	1.20363E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.99941E-1
1.7E1	8.88E2	1.0E0	6.87E2	4.7E2	-7.18554E-2	-8.8003E1	-3.33786E-4	-8.80005E1	4.76837E-4	4.36306E-3	9.51052E-2	2.73309E1	-3.26621E1	-3.26236E1	2.68418E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.8E1	3.957E3	7.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80029E1	-6.91414E-4	-8.80006E1	3.8147E-4	4.33922E-3	9.47952E-2	2.73207E1	-3.26603E1	-3.26068E1	2.68232E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00144E-1
1.9E1	2.066E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80031E1	-7.15256E-4	-8.80007E1	1.90735E-4	4.86374E-3	9.4986E-2	2.73541E1	-3.26632E1	-3.26113E1	2.68247E1	1.20158E-7	2.52815E-3	2.52815E-3	6.3074E-3	3.00966E-1
2.0E1	2.639E4	1.5E1	8.08E2	5.58E2	-7.23189E-2	-8.80029E1	-6.19888E-4	-8.80006E1	2.38419E-5	4.74453E-3	9.47952E-2	2.73165E1	-3.26609E1	-3.26182E1	2.68247E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80028E1	-8.34465E-4	-8.80003E1	1.90735E-4	4.673E-3	9.49383E-2	2.73246E1	-3.26419E1	-3.26484E1	2.68623E1	1.20278E-7	2.50789E-3	2.50789E-3	6.30192E-3	3.01609E-1
2.2E1	1.818E3	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80027E1	-8.82149E-4	-8.80003E1	3.57628E-4	4.31538E-3	9.4986E-2	2.73466E1	-3.265E1	-3.26074E1	2.67884E1	1.198E-7	2.52276E-3	2.52276E-3	6.28592E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80027E1	-7.62939E-4	-8.80001E1	4.29153E-4	4.60148E-3	9.50336E-2	2.73523E1	-3.26531E1	-3.26325E1	2.68574E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.97963E-1