[Scan]
initial_time=2016-01-18T21:08:22
final_time=2016-01-18T21:08:42
ip_count=19
run=1024
dataset=8
scan=561
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.2109E-1
ql1_imon=1.61862E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.75263E-9
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=7.3432E-9
ql4_vset=
ql4_vmon=-9.14278E0
ql4_imon=-6.31237E-10
mult1=-9.86583E-9
mult2=-2.73306E-9
rf_tmon=-4.32661E-3
rf_agc=3.39049E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.57205E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.4123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19382E1
lens5a_imon=2.01589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.16794E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04416E1
cs_ea1_imon=1.08892E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39321E0
lens1_imon=2.97153E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.3388E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.04721E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.28406E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.27833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14781E1
os_ea1_imon=2.40098E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63347E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=9.53713E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93519E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=1.96566E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.28246E-8
tplens_vset=1.4E-1
tplens_vmon=1.65913E0
tplens_imon=-6.35131E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26874E1
iondef2_imon=1.56214E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98268E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=3.83776E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=8.39036E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33575E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.1492E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53938E0
os_ea2_imon=-7.66089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10638E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.41518E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.28406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01437E1
cs_anode2_imon=2.07955E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73482E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.44422E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.59359E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-9.18431E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.94012E-6
window_vset=0.0E0
window_vmon=2.58788E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39333E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.24713E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.41891E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=6.80825E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55615E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.4188E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07425E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64276E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31807E1
cs_fil1_imon=8.87874E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.98996E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66641E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.28755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.79366E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.01725E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22157E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.20249E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.22854E-1	-7.98941E-1	-9.13248E0	-9.1428E0	4.93526E-3	9.50098E-2	2.73074E1	-3.2655E1	-3.26419E1	2.68149E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09348E0	-8.22997E-1	-7.98655E-1	-9.13255E0	-9.1429E0	4.8399E-3	9.51052E-2	2.73362E1	-3.26851E1	-3.26176E1	2.68685E1	1.19919E-7	2.52058E-3	2.52058E-3	6.31761E-3	3.00149E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-8.23164E-1	-7.98368E-1	-9.13258E0	-9.14292E0	4.76837E-3	9.48191E-2	2.7326E1	-3.26498E1	-3.26214E1	2.68516E1	1.19747E-7	2.52191E-3	2.52191E-3	6.31949E-3	3.00312E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09271E0	-8.22592E-1	-7.98631E-1	-9.13258E0	-9.14273E0	4.8399E-3	9.50575E-2	2.73405E1	-3.26639E1	-3.26254E1	2.6831E1	1.20042E-7	2.51603E-3	2.51603E-3	6.27577E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09209E0	-8.22496E-1	-7.98559E-1	-9.13234E0	-9.14273E0	4.74453E-3	9.47475E-2	2.73189E1	-3.26813E1	-3.25966E1	2.68244E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09248E0	-8.22353E-1	-7.98631E-1	-9.13246E0	-9.14278E0	4.93526E-3	9.48191E-2	2.73257E1	-3.26431E1	-3.25835E1	2.68508E1	1.198E-7	2.51632E-3	2.51632E-3	6.28592E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09294E0	-8.2233E-1	-7.98321E-1	-9.1326E0	-9.14307E0	4.8399E-3	9.50813E-2	2.73417E1	-3.26685E1	-3.26543E1	2.68412E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.219E-1	-7.98631E-1	-9.13246E0	-9.14304E0	4.81606E-3	9.53436E-2	2.73147E1	-3.26711E1	-3.26116E1	2.68204E1	1.20311E-7	2.51847E-3	2.51847E-3	6.36144E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-8.21686E-1	-7.98726E-1	-9.13208E0	-9.14237E0	4.98295E-3	9.52721E-2	2.731E1	-3.26432E1	-3.26358E1	2.68272E1	1.19913E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.21328E-1	-7.98631E-1	-9.13258E0	-9.14271E0	4.64916E-3	9.49383E-2	2.73312E1	-3.26753E1	-3.26359E1	2.68071E1	1.20141E-7	2.52079E-3	2.52079E-3	6.31189E-3	2.99473E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09317E0	-8.20661E-1	-7.98869E-1	-9.13262E0	-9.14228E0	4.673E-3	9.50098E-2	2.72995E1	-3.26684E1	-3.2641E1	2.68601E1	1.19991E-7	2.51077E-3	2.51077E-3	6.31798E-3	3.00852E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-8.20851E-1	-7.9906E-1	-9.13229E0	-9.14276E0	4.69685E-3	9.50336E-2	2.7299E1	-3.26572E1	-3.26156E1	2.68022E1	1.201E-7	2.51725E-3	2.51725E-3	6.30171E-3	3.00522E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.2047E-1	-7.98941E-1	-9.13236E0	-9.14245E0	4.69685E-3	9.50813E-2	2.73045E1	-3.26428E1	-3.26068E1	2.68052E1	1.20031E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.00942E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.20851E-1	-7.98631E-1	-9.13262E0	-9.14259E0	4.88758E-3	9.51767E-2	2.73269E1	-3.2678E1	-3.25869E1	2.68602E1	1.20122E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.20971E-1	-7.98559E-1	-9.13239E0	-9.14249E0	4.673E-3	9.50336E-2	2.73305E1	-3.26521E1	-3.26425E1	2.68381E1	1.20003E-7	2.51423E-3	2.51423E-3	6.29237E-3	3.00532E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.20899E-1	-7.98559E-1	-9.13253E0	-9.14245E0	4.41074E-3	9.50098E-2	2.7358E1	-3.27053E1	-3.25978E1	2.6828E1	1.1995E-7	2.52338E-3	2.52338E-3	6.31321E-3	3.00916E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.21114E-1	-7.98845E-1	-9.13222E0	-9.14242E0	4.673E-3	9.47237E-2	2.73333E1	-3.265E1	-3.2614E1	2.67914E1	1.19872E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.99348E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.20899E-1	-7.98702E-1	-9.13219E0	-9.14292E0	4.3869E-3	9.48906E-2	2.73074E1	-3.26561E1	-3.25884E1	2.68785E1	1.19757E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.20899E-1	-7.98583E-1	-9.13219E0	-9.14257E0	4.43459E-3	9.48429E-2	2.72907E1	-3.26332E1	-3.26236E1	2.68209E1	1.19841E-7	2.51498E-3	2.51498E-3	6.33388E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.2109E-1	-7.98178E-1	-9.13205E0	-9.14278E0	4.98295E-3	9.49144E-2	2.73482E1	-3.26874E1	-3.26248E1	2.68088E1	1.19861E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.9952E-1