[Scan]
initial_time=2016-01-18T21:08:49
final_time=2016-01-18T21:09:08
ip_count=19
run=1024
dataset=8
scan=562
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.2047E-1
ql1_imon=1.4696E-8
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=1.92007E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=3.81728E-9
ql4_vset=
ql4_vmon=-9.14254E0
ql4_imon=-3.5485E-10
mult1=-9.59393E-9
mult2=-2.74677E-9
rf_tmon=-4.49178E-3
rf_agc=3.32973E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.62745E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.4123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19618E1
lens5a_imon=2.01129E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04966E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53835E1
cs_ef1b_imon=3.15455E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02418E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04805E1
cs_ea1_imon=1.08149E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42801E0
lens1_imon=2.87596E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97904E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03466E1
cs_ea2_imon=1.34765E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84458E1
cs_ef1a_imon=3.04195E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.28537E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.28956E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14645E1
os_ea1_imon=2.42115E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.08087E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21434E0
cs_ionrep_imon=9.32831E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93632E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=1.96184E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.28799E-8
tplens_vset=1.4E-1
tplens_vmon=1.68921E0
tplens_imon=-3.76754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.52568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.56285E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98215E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=3.99063E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2869E0
ionrepsh_imon=8.57795E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.16313E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45207E0
os_ea2_imon=-9.57217E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00534E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.1674E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08352E0
os_ef2alow_imon=-2.40082E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22137E-1
os_ef2bup_imon=-5.21577E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1132E1
os_restr2_imon=3.42283E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.28477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.0932E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73328E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.10067E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.86366E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.58639E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14694E0
cs_ionaccel_imon=-9.62065E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47358E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55322E1
einzel_imon=7.85465E-6
window_vset=0.0E0
window_vmon=2.57072E-1
window_imon=-7.84827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86303E1
mask2_imon=-6.66668E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.67894E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.2259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=6.32335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.41435E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08418E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64154E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31826E1
cs_fil1_imon=6.31434E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.98653E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66808E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.4375E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.79493E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.85453E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.73859E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22317E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.57672E-1
res40_imon=-2.44252E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.20661E-1	-7.98702E-1	-9.13196E0	-9.14249E0	4.98295E-3	9.49383E-2	2.73484E1	-3.26747E1	-3.26254E1	2.68238E1	1.20226E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00041E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.20875E-1	-7.98702E-1	-9.13193E0	-9.14257E0	5.26905E-3	9.46522E-2	2.73219E1	-3.26585E1	-3.26188E1	2.68022E1	1.20106E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.20899E-1	-7.98512E-1	-9.13174E0	-9.14276E0	4.69685E-3	9.44853E-2	2.73309E1	-3.26603E1	-3.26314E1	2.68599E1	1.19965E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.01085E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.20923E-1	-7.98488E-1	-9.13191E0	-9.14278E0	4.55379E-3	9.48668E-2	2.73202E1	-3.26753E1	-3.26243E1	2.6858E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.20756E-1	-7.98345E-1	-9.13174E0	-9.14273E0	4.69685E-3	9.48191E-2	2.73225E1	-3.26476E1	-3.26068E1	2.68412E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.20947E-1	-7.98583E-1	-9.13165E0	-9.14257E0	4.98295E-3	9.49383E-2	2.73139E1	-3.26278E1	-3.26413E1	2.67836E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.20994E-1	-7.98774E-1	-9.13112E0	-9.14266E0	5.10216E-3	9.47237E-2	2.73271E1	-3.26591E1	-3.26034E1	2.68809E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.20684E-1	-7.98845E-1	-9.13134E0	-9.14276E0	5.03063E-3	9.50575E-2	2.73088E1	-3.26444E1	-3.26027E1	2.67982E1	1.19819E-7	2.50914E-3	2.50914E-3	6.31858E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.20732E-1	-7.98678E-1	-9.13115E0	-9.14285E0	4.86374E-3	9.48906E-2	2.73399E1	-3.26464E1	-3.2626E1	2.68478E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.20756E-1	-7.98678E-1	-9.13081E0	-9.14299E0	4.74453E-3	9.50575E-2	2.72919E1	-3.26627E1	-3.26482E1	2.68106E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9952E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.20541E-1	-7.98607E-1	-9.13093E0	-9.14276E0	4.81606E-3	9.50336E-2	2.7301E1	-3.26508E1	-3.26384E1	2.68441E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.20637E-1	-7.98607E-1	-9.13076E0	-9.14276E0	4.57764E-3	9.50336E-2	2.73381E1	-3.26759E1	-3.26218E1	2.68262E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.02253E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.20804E-1	-7.98655E-1	-9.13088E0	-9.14288E0	4.69685E-3	9.50813E-2	2.73316E1	-3.26697E1	-3.26343E1	2.68118E1	1.19978E-7	2.52809E-3	2.52809E-3	6.31299E-3	2.99879E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.20589E-1	-7.98941E-1	-9.13093E0	-9.1428E0	4.673E-3	9.4986E-2	2.73339E1	-3.26695E1	-3.26217E1	2.68292E1	1.198E-7	2.52384E-3	2.52384E-3	6.33436E-3	3.02253E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.20541E-1	-7.98702E-1	-9.13086E0	-9.14261E0	4.36306E-3	9.46283E-2	2.73369E1	-3.265E1	-3.2617E1	2.68623E1	1.20084E-7	2.52362E-3	2.52362E-3	6.34099E-3	3.02813E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.20351E-1	-7.98726E-1	-9.1311E0	-9.14278E0	4.88758E-3	9.48429E-2	2.72603E1	-3.26349E1	-3.26832E1	2.68424E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01871E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.20422E-1	-7.98893E-1	-9.13091E0	-9.1424E0	4.52995E-3	9.48906E-2	2.7352E1	-3.26711E1	-3.26272E1	2.68016E1	1.19891E-7	2.51709E-3	2.51709E-3	6.29157E-3	3.01104E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.20613E-1	-7.98917E-1	-9.13095E0	-9.14214E0	4.74453E-3	9.49621E-2	2.7312E1	-3.2655E1	-3.26457E1	2.68331E1	1.19757E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.20494E-1	-7.98988E-1	-9.13095E0	-9.1424E0	4.60148E-3	9.4986E-2	2.73562E1	-3.26777E1	-3.26176E1	2.68466E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.2047E-1	-7.99012E-1	-9.13115E0	-9.14254E0	4.93526E-3	9.4986E-2	2.73328E1	-3.26549E1	-3.26219E1	2.68196E1	1.19749E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01995E-1