[Scan]
initial_time=2016-01-18T21:10:35
final_time=2016-01-18T21:10:55
ip_count=19
run=1024
dataset=8
scan=566
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09279E0
qbias_imon=-1.08721E-4
ql1_vset=
ql1_vmon=-8.19397E-1
ql1_imon=1.40551E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.9732E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=1.40265E-9
ql4_vset=
ql4_vmon=-9.14249E0
ql4_imon=-2.22194E-10
mult1=-9.47593E-9
mult2=-2.76238E-9
rf_tmon=-4.63409E-3
rf_agc=3.34825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.67667E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70397E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19406E1
lens5a_imon=2.00173E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=3.15209E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04687E1
cs_ea1_imon=1.10803E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36961E0
lens1_imon=2.6282E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65107E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0392E1
cs_ea2_imon=1.37561E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.06019E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.28055E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.27328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15241E1
os_ea1_imon=2.40416E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24089E0
cs_ionrep_imon=9.68932E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=1.979E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.28781E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25941E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27013E1
iondef2_imon=1.57063E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98218E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=4.02433E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28749E0
ionrepsh_imon=8.47177E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.19463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54705E0
os_ea2_imon=-8.54574E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.15857E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.42849E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11418E1
os_restr2_imon=3.41626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.2922E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.09757E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73323E1
iondef1_imon=1.10839E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68302E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.82963E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.57485E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-9.04015E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47482E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=8.03742E-6
window_vset=0.0E0
window_vmon=2.65395E-1
window_imon=-8.67976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-4.78747E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.43826E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.50386E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.23297E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.39767E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.42384E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.082E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64109E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31859E1
cs_fil1_imon=6.90857E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.83379E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66708E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.34493E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.93793E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.99516E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22342E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.519E-3
foreline_cvt_pmon=2.519E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.49081E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-8.19421E-1	-7.98845E-1	-9.13112E0	-9.14266E0	4.45843E-3	9.50098E-2	2.73116E1	-3.26756E1	-3.26048E1	2.69547E1	1.19902E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.98665E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.19445E-1	-7.99131E-1	-9.13134E0	-9.14266E0	4.673E-3	9.49144E-2	2.73522E1	-3.26768E1	-3.25979E1	2.68001E1	1.198E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-8.19349E-1	-7.98821E-1	-9.13138E0	-9.14276E0	4.79221E-3	9.48429E-2	2.73097E1	-3.26474E1	-3.26579E1	2.68221E1	1.19925E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.01209E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09356E0	-8.19588E-1	-7.99036E-1	-9.13134E0	-9.1429E0	4.64916E-3	9.49383E-2	2.73252E1	-3.26756E1	-3.26071E1	2.68383E1	1.19891E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.19731E-1	-7.98702E-1	-9.13122E0	-9.14278E0	4.52995E-3	9.49621E-2	2.73153E1	-3.26296E1	-3.2617E1	2.68563E1	1.198E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-8.19802E-1	-7.98798E-1	-9.13122E0	-9.14278E0	4.74453E-3	9.48191E-2	2.72949E1	-3.26651E1	-3.26068E1	2.67947E1	1.19872E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09317E0	-8.19516E-1	-7.98726E-1	-9.13126E0	-9.14292E0	4.62532E-3	9.51052E-2	2.73339E1	-3.265E1	-3.25773E1	2.68235E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09325E0	-8.19755E-1	-7.98512E-1	-9.13157E0	-9.14235E0	5.00679E-3	9.53436E-2	2.73529E1	-3.26885E1	-3.25995E1	2.68394E1	1.19749E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09294E0	-8.19445E-1	-7.98416E-1	-9.13143E0	-9.14254E0	4.76837E-3	9.49144E-2	2.73231E1	-3.26104E1	-3.26464E1	2.67944E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09271E0	-8.19302E-1	-7.98535E-1	-9.13134E0	-9.14233E0	4.86374E-3	9.48906E-2	2.73514E1	-3.27101E1	-3.26008E1	2.68484E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.02922E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09271E0	-8.19039E-1	-7.98726E-1	-9.13162E0	-9.14247E0	4.52995E-3	9.49621E-2	2.73261E1	-3.26801E1	-3.26278E1	2.68304E1	1.20004E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.98665E-1
1.5E1	0.0E0	1.0E0	6.06E2	4.11E2	-2.09348E0	-8.19397E-1	-7.98607E-1	-9.13146E0	-9.14268E0	4.81606E-3	9.48191E-2	2.73069E1	-3.26554E1	-3.25985E1	2.68292E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09248E0	-8.19302E-1	-7.9875E-1	-9.13157E0	-9.14292E0	4.74453E-3	9.49144E-2	2.73568E1	-3.26813E1	-3.2641E1	2.67962E1	1.19978E-7	2.52362E-3	2.52362E-3	6.33538E-3	2.99613E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-8.19445E-1	-7.9844E-1	-9.13134E0	-9.1428E0	4.43459E-3	9.49383E-2	2.73219E1	-3.26506E1	-3.26494E1	2.68136E1	1.20278E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09248E0	-8.19445E-1	-7.98559E-1	-9.13134E0	-9.14237E0	4.64916E-3	9.48191E-2	2.73187E1	-3.26213E1	-3.26478E1	2.68514E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09255E0	-8.19588E-1	-7.98774E-1	-9.13129E0	-9.14237E0	4.86374E-3	9.48906E-2	2.73411E1	-3.26747E1	-3.25918E1	2.68617E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9892E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09193E0	-8.19588E-1	-7.98845E-1	-9.13143E0	-9.14261E0	4.52995E-3	9.49621E-2	2.73326E1	-3.26634E1	-3.25917E1	2.6798E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09225E0	-8.19588E-1	-7.98488E-1	-9.13146E0	-9.1428E0	4.60148E-3	9.47952E-2	2.73346E1	-3.26496E1	-3.26349E1	2.68478E1	1.20031E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.0041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09255E0	-8.19206E-1	-7.9875E-1	-9.13115E0	-9.14242E0	4.55379E-3	9.47475E-2	2.72898E1	-3.2659E1	-3.26248E1	2.68516E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09279E0	-8.19397E-1	-7.98535E-1	-9.13124E0	-9.14249E0	4.69685E-3	9.48429E-2	2.73323E1	-3.27013E1	-3.25941E1	2.68302E1	1.20055E-7	2.519E-3	2.519E-3	6.31817E-3	3.01609E-1