[Scan]
initial_time=2016-01-18T21:11:02
final_time=2016-01-18T21:11:21
ip_count=19
run=1024
dataset=8
scan=567
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08685E-4
ql1_vset=
ql1_vmon=-8.1892E-1
ql1_imon=1.40365E-8
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=1.96404E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=1.2531E-9
ql4_vset=
ql4_vmon=-9.14276E0
ql4_imon=-1.61397E-10
mult1=-9.66486E-9
mult2=-2.75265E-9
rf_tmon=-4.52717E-3
rf_agc=3.28195E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.66833E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66598E0
bslens_imon=2.4999E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19551E1
lens5a_imon=2.00125E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12439E2
lens4a_imon=2.04744E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=3.16703E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0505E1
cs_ea1_imon=1.10091E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38504E0
lens1_imon=2.83308E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64733E1
os_ef1alow_imon=2.98477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.35061E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84413E1
cs_ef1a_imon=3.04839E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.28356E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11392E1
os_restr1_imon=4.27371E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15131E1
os_ea1_imon=2.37823E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63423E1
os_ef1bup_imon=3.0832E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23962E0
cs_ionrep_imon=9.45178E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01778E1
cs_anode1_imon=1.95818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.29061E-8
tplens_vset=1.4E-1
tplens_vmon=1.71381E0
tplens_imon=-1.91752E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26301E1
iondef3_imon=1.50035E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26378E1
iondef2_imon=1.57635E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98297E-4
ql6_vset=1.0E-1
ql6_vmon=9.48668E-2
ql6_imon=4.02739E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29702E0
ionrepsh_imon=8.54582E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33596E1
lens5b_imon=2.17083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74595E1
cs_ef2b_imon=3.12661E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48919E0
os_ea2_imon=-6.2601E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00802E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71301E1
cs_ef2a_imon=3.16329E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09697E0
os_ef2alow_imon=-2.31233E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16345E-1
os_ef2bup_imon=-5.26523E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11348E1
os_restr2_imon=3.41516E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.2727E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01859E1
cs_anode2_imon=2.07457E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73157E1
iondef1_imon=1.12599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6818E1
iondef4_imon=1.10449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.88918E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.59056E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14012E0
cs_ionaccel_imon=-7.21738E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47361E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56929E1
einzel_imon=7.55311E-6
window_vset=0.0E0
window_vmon=2.5128E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39223E-4
mask2_vset=0.0E0
mask2_vmon=-1.86556E1
mask2_imon=-4.9344E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.74469E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.40822E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.07459E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41811E0
defgridb_imon=5.96648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33235E1
os_fil1_imon=9.42102E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08315E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64067E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31842E1
cs_fil1_imon=7.28652E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.27009E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66649E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20174E-2
os_fil2_imon=-2.61884E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.69551E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30862E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.61651E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22164E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40039E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.89127E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09248E0	-8.19492E-1	-7.98726E-1	-9.13138E0	-9.14271E0	4.36306E-3	9.48906E-2	2.73514E1	-3.2644E1	-3.26332E1	2.68358E1	1.1984E-7	2.51527E-3	2.51527E-3	6.31902E-3	3.00363E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.19206E-1	-7.98798E-1	-9.13138E0	-9.14264E0	4.43459E-3	9.4533E-2	2.73442E1	-3.26518E1	-3.26188E1	2.67758E1	1.20158E-7	2.51847E-3	2.51847E-3	6.34518E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09325E0	-8.19421E-1	-7.99012E-1	-9.13134E0	-9.14268E0	4.60148E-3	9.48429E-2	2.73181E1	-3.26744E1	-3.26172E1	2.68713E1	1.20191E-7	2.52139E-3	2.52139E-3	6.29624E-3	2.99083E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09325E0	-8.19325E-1	-7.9906E-1	-9.13105E0	-9.14266E0	4.76837E-3	9.48191E-2	2.73352E1	-3.26732E1	-3.26124E1	2.6847E1	1.19941E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-8.19063E-1	-7.99036E-1	-9.131E0	-9.14299E0	4.36306E-3	9.48429E-2	2.7351E1	-3.26413E1	-3.26352E1	2.67957E1	1.19646E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-8.19159E-1	-7.98941E-1	-9.13112E0	-9.14268E0	4.3869E-3	9.49383E-2	2.73429E1	-3.26621E1	-3.25948E1	2.68581E1	1.19925E-7	2.52027E-3	2.52027E-3	6.34661E-3	3.00144E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09333E0	-8.1923E-1	-7.98917E-1	-9.13129E0	-9.14252E0	4.31538E-3	9.46283E-2	2.73411E1	-3.2626E1	-3.25835E1	2.68447E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09309E0	-8.18658E-1	-7.99298E-1	-9.13126E0	-9.14299E0	4.60148E-3	9.48191E-2	2.73202E1	-3.26596E1	-3.26014E1	2.68093E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-8.19039E-1	-7.98941E-1	-9.13143E0	-9.1428E0	4.62532E-3	9.46045E-2	2.73369E1	-3.26407E1	-3.26383E1	2.685E1	1.1993E-7	2.51265E-3	2.51265E-3	6.323E-3	3.00494E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09279E0	-8.19063E-1	-7.98988E-1	-9.13126E0	-9.14271E0	4.41074E-3	9.48668E-2	2.72757E1	-3.2641E1	-3.2647E1	2.68172E1	1.19601E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09333E0	-8.19159E-1	-7.99131E-1	-9.13129E0	-9.14252E0	4.33922E-3	9.45807E-2	2.73435E1	-3.2635E1	-3.26158E1	2.68665E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.19039E-1	-7.98798E-1	-9.13169E0	-9.14237E0	4.45843E-3	9.4986E-2	2.73505E1	-3.26856E1	-3.26006E1	2.68256E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09325E0	-8.18872E-1	-7.98821E-1	-9.13162E0	-9.14235E0	4.50611E-3	9.49144E-2	2.7321E1	-3.26567E1	-3.26384E1	2.68124E1	1.19953E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.19278E-1	-7.98678E-1	-9.13184E0	-9.14261E0	4.673E-3	9.47714E-2	2.73147E1	-3.26554E1	-3.26254E1	2.68605E1	1.20158E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00197E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09294E0	-8.19016E-1	-7.98631E-1	-9.13162E0	-9.14247E0	4.76837E-3	9.45091E-2	2.73177E1	-3.26524E1	-3.26134E1	2.68112E1	1.20191E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.01209E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.19039E-1	-7.98893E-1	-9.13162E0	-9.14237E0	4.57764E-3	9.46999E-2	2.73598E1	-3.26657E1	-3.2605E1	2.68472E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09294E0	-8.19063E-1	-7.98655E-1	-9.13186E0	-9.14247E0	4.69685E-3	9.49144E-2	2.73261E1	-3.2653E1	-3.26068E1	2.68518E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09286E0	-8.19302E-1	-7.9875E-1	-9.13146E0	-9.14249E0	4.24385E-3	9.47714E-2	2.7324E1	-3.26531E1	-3.26172E1	2.68188E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-8.18849E-1	-7.98678E-1	-9.13134E0	-9.14292E0	4.24385E-3	9.47475E-2	2.7321E1	-3.26767E1	-3.26254E1	2.68136E1	1.19851E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-8.1892E-1	-7.98917E-1	-9.13148E0	-9.14276E0	4.33922E-3	9.48668E-2	2.73157E1	-3.26378E1	-3.26301E1	2.6818E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.99941E-1