[Scan]
initial_time=2016-01-18T21:11:29
final_time=2016-01-18T21:11:48
ip_count=19
run=1024
dataset=8
scan=568
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.18825E-1
ql1_imon=1.40045E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.93852E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=1.12784E-9
ql4_vset=
ql4_vmon=-9.14304E0
ql4_imon=-1.55103E-10
mult1=-9.72835E-9
mult2=-3.02202E-9
rf_tmon=-3.50304E-3
rf_agc=3.28469E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.70643E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19749E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=3.17227E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=1.09914E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36415E0
lens1_imon=2.64951E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.36843E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.04181E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.28614E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1155E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15408E1
os_ea1_imon=2.40125E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22686E0
cs_ionrep_imon=9.54578E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.93672E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=1.97467E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.29794E-8
tplens_vset=1.4E-1
tplens_vmon=1.64203E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25846E1
iondef3_imon=1.52128E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.5494E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=4.08552E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29716E0
ionrepsh_imon=8.42104E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33532E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53028E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0888E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29259E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11069E1
os_restr2_imon=3.42238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.09432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73628E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.11044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.91698E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.58454E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-7.41837E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47511E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.49178E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39311E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.48014E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.22922E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.52701E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2181E0
defgridb_imon=6.02735E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.41633E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08116E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64102E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=6.98665E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0068E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66665E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.32476E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21741E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91082E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.02326E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22277E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.70995E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.18515E-1	-7.99036E-1	-9.13177E0	-9.14261E0	4.45843E-3	9.47475E-2	2.73187E1	-3.2682E1	-3.26148E1	2.68673E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.02253E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.18753E-1	-7.98965E-1	-9.13141E0	-9.14276E0	4.48227E-3	9.48191E-2	2.73296E1	-3.26413E1	-3.26376E1	2.68045E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.98156E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.18491E-1	-7.98965E-1	-9.13143E0	-9.14216E0	4.45843E-3	9.48429E-2	2.73346E1	-3.26926E1	-3.2622E1	2.68314E1	1.19835E-7	2.51716E-3	2.51716E-3	6.32661E-3	2.9926E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.18777E-1	-7.9906E-1	-9.13153E0	-9.14235E0	4.50611E-3	9.50098E-2	2.73183E1	-3.26567E1	-3.2635E1	2.68352E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18586E-1	-7.9906E-1	-9.13155E0	-9.14249E0	4.31538E-3	9.49383E-2	2.73363E1	-3.26572E1	-3.25562E1	2.6807E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.97445E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.18658E-1	-7.98821E-1	-9.1316E0	-9.1424E0	4.60148E-3	9.48906E-2	2.73093E1	-3.26482E1	-3.2605E1	2.68346E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.18896E-1	-7.98821E-1	-9.13165E0	-9.14252E0	4.55379E-3	9.47952E-2	2.73208E1	-3.26601E1	-3.26109E1	2.68311E1	1.20069E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.1892E-1	-7.98607E-1	-9.13174E0	-9.14254E0	4.33922E-3	9.46045E-2	2.73284E1	-3.26774E1	-3.26003E1	2.68718E1	1.20113E-7	2.52058E-3	2.52058E-3	6.32784E-3	3.01365E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.1892E-1	-7.98655E-1	-9.13153E0	-9.14226E0	4.45843E-3	9.51767E-2	2.73133E1	-3.26407E1	-3.26139E1	2.68394E1	1.19978E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.0041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.19254E-1	-7.98845E-1	-9.13155E0	-9.14278E0	4.95911E-3	9.45807E-2	2.73544E1	-3.27071E1	-3.25972E1	2.6825E1	1.20001E-7	2.51596E-3	2.51596E-3	6.3153E-3	2.99634E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.19373E-1	-7.98535E-1	-9.13124E0	-9.1429E0	4.81606E-3	9.4986E-2	2.73502E1	-3.26561E1	-3.2623E1	2.68262E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.19039E-1	-7.98512E-1	-9.13146E0	-9.14264E0	4.81606E-3	9.48429E-2	2.73305E1	-3.26549E1	-3.26248E1	2.68647E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.18729E-1	-7.9875E-1	-9.13112E0	-9.14283E0	4.79221E-3	9.48191E-2	2.73516E1	-3.26425E1	-3.26193E1	2.68292E1	1.20017E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.00041E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.18896E-1	-7.98869E-1	-9.13122E0	-9.14283E0	4.41074E-3	9.48668E-2	2.73183E1	-3.26729E1	-3.26579E1	2.68448E1	1.20122E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.18944E-1	-7.99084E-1	-9.13134E0	-9.14271E0	4.3869E-3	9.5129E-2	2.73345E1	-3.26567E1	-3.2623E1	2.68334E1	1.20435E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.19182E-1	-7.98893E-1	-9.13138E0	-9.14273E0	4.52995E-3	9.48429E-2	2.73015E1	-3.26536E1	-3.26218E1	2.68046E1	1.19809E-7	2.52538E-3	2.52538E-3	6.29098E-3	3.01085E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09279E0	-8.18706E-1	-7.98917E-1	-9.13146E0	-9.14254E0	4.50611E-3	9.49144E-2	2.73199E1	-3.26505E1	-3.26437E1	2.68661E1	1.20226E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09309E0	-8.18729E-1	-7.99084E-1	-9.13162E0	-9.14247E0	4.3869E-3	9.4986E-2	2.73432E1	-3.26497E1	-3.26229E1	2.68331E1	1.20078E-7	2.51472E-3	2.51472E-3	6.3074E-3	3.02479E-1
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-8.18753E-1	-7.98583E-1	-9.13129E0	-9.14252E0	4.19617E-3	9.48191E-2	2.73086E1	-3.26815E1	-3.26608E1	2.67931E1	1.19775E-7	2.51498E-3	2.51498E-3	6.3245E-3	3.01337E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.18825E-1	-7.98655E-1	-9.13131E0	-9.14304E0	4.55379E-3	9.54628E-2	2.73628E1	-3.26741E1	-3.25846E1	2.68166E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00197E-1