[Scan]
initial_time=2016-01-18T21:11:55
final_time=2016-01-18T21:12:15
ip_count=19
run=1024
dataset=8
scan=569
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.18825E-1
ql1_imon=1.39701E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=1.98128E-9
ql3_vset=
ql3_vmon=-9.13188E0
ql3_imon=1.01377E-9
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=-1.48129E-10
mult1=-9.80059E-9
mult2=-2.90225E-9
rf_tmon=-3.00435E-3
rf_agc=3.55146E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.68184E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69498E0
bslens_imon=2.2818E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=3.15641E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.0246E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.10058E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38818E0
lens1_imon=2.87301E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04039E1
cs_ea2_imon=1.34355E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.04144E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.28552E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.28517E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15197E1
os_ea1_imon=2.39548E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23948E0
cs_ionrep_imon=9.46647E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93647E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=1.96278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.29212E-8
tplens_vset=1.4E-1
tplens_vmon=1.67268E0
tplens_imon=-7.34474E-9
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98011E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.00829E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29896E0
ionrepsh_imon=8.65175E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4702E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00774E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10802E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=3.42238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.28739E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.07991E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.10094E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.10756E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.93158E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.59318E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-9.22035E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57156E1
einzel_imon=7.91489E-6
window_vset=0.0E0
window_vmon=2.68399E-1
window_imon=-6.15698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-4.71539E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.32153E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.36118E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.576E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.42853E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08284E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64273E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31811E1
cs_fil1_imon=7.46718E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.42534E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66795E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.40215E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.82961E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.61074E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22373E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8512E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.18396E-1	-7.98893E-1	-9.13155E0	-9.14257E0	4.3869E-3	9.47952E-2	2.73279E1	-3.26482E1	-3.26248E1	2.68502E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.1811E-1	-7.98726E-1	-9.13174E0	-9.1429E0	4.3869E-3	9.46045E-2	2.72904E1	-3.26615E1	-3.26523E1	2.68442E1	1.20122E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.18372E-1	-7.98702E-1	-9.13155E0	-9.14283E0	4.60148E-3	9.49621E-2	2.73445E1	-3.26486E1	-3.25999E1	2.67995E1	1.19872E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.9829E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.18443E-1	-7.99036E-1	-9.13136E0	-9.14278E0	4.3869E-3	9.53197E-2	2.73201E1	-3.265E1	-3.26266E1	2.68172E1	1.19991E-7	2.52236E-3	2.52236E-3	6.29157E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.18229E-1	-7.98917E-1	-9.13146E0	-9.1428E0	4.62532E-3	9.47237E-2	2.73284E1	-3.26652E1	-3.26297E1	2.68656E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.18157E-1	-7.99012E-1	-9.13141E0	-9.14309E0	4.52995E-3	9.50575E-2	2.73051E1	-3.2626E1	-3.26326E1	2.67782E1	1.19978E-7	2.50914E-3	2.50914E-3	6.32978E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.18467E-1	-7.99084E-1	-9.13165E0	-9.14221E0	4.33922E-3	9.50813E-2	2.72799E1	-3.26434E1	-3.26266E1	2.68142E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.18443E-1	-7.98726E-1	-9.13126E0	-9.14271E0	4.74453E-3	9.52005E-2	2.73157E1	-3.26543E1	-3.26119E1	2.67787E1	1.19705E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09356E0	-8.18896E-1	-7.98678E-1	-9.13126E0	-9.14266E0	4.76837E-3	9.46999E-2	2.73051E1	-3.26376E1	-3.26438E1	2.68375E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9841E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.18801E-1	-7.98965E-1	-9.1315E0	-9.14245E0	4.86374E-3	9.46999E-2	2.7364E1	-3.27041E1	-3.25689E1	2.68771E1	1.19872E-7	2.51693E-3	2.51693E-3	6.33538E-3	2.99613E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.18706E-1	-7.98774E-1	-9.13167E0	-9.14249E0	4.48227E-3	9.47714E-2	2.73334E1	-3.26791E1	-3.26018E1	2.6846E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99175E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.18634E-1	-7.98941E-1	-9.13143E0	-9.1423E0	4.64916E-3	9.46283E-2	2.73285E1	-3.26747E1	-3.26404E1	2.68172E1	1.19913E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00302E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.18539E-1	-7.98607E-1	-9.13157E0	-9.14299E0	4.45843E-3	9.46045E-2	2.72919E1	-3.26428E1	-3.26242E1	2.68424E1	1.19601E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.18634E-1	-7.98535E-1	-9.13124E0	-9.14273E0	4.55379E-3	9.50813E-2	2.72968E1	-3.26596E1	-3.26183E1	2.68412E1	1.19861E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9952E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.1892E-1	-7.98655E-1	-9.13148E0	-9.14266E0	4.76837E-3	9.48906E-2	2.72949E1	-3.26218E1	-3.26488E1	2.6807E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.1861E-1	-7.98678E-1	-9.13181E0	-9.14242E0	4.52995E-3	9.5129E-2	2.73514E1	-3.26801E1	-3.2644E1	2.68502E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.99E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.18944E-1	-7.98941E-1	-9.13169E0	-9.14245E0	4.81606E-3	9.49144E-2	2.73159E1	-3.26458E1	-3.25996E1	2.68556E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.18825E-1	-7.99012E-1	-9.13155E0	-9.14271E0	4.74453E-3	9.50098E-2	2.73411E1	-3.26762E1	-3.26024E1	2.68603E1	1.2014E-7	2.51809E-3	2.51809E-3	6.31555E-3	3.00378E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.18515E-1	-7.98988E-1	-9.13169E0	-9.14259E0	4.48227E-3	9.48906E-2	2.73334E1	-3.26254E1	-3.26384E1	2.67926E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.18825E-1	-7.98988E-1	-9.13188E0	-9.14264E0	4.29153E-3	9.49383E-2	2.73147E1	-3.26819E1	-3.26116E1	2.67986E1	1.19851E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0071E-1