[Scan]
initial_time=2016-01-18T21:12:48
final_time=2016-01-18T21:13:08
ip_count=19
run=1024
dataset=8
scan=571
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08741E-4
ql1_vset=
ql1_vmon=-8.183E-1
ql1_imon=1.39514E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=1.95867E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=8.67772E-10
ql4_vset=
ql4_vmon=-9.14271E0
ql4_imon=-1.5136E-10
mult1=-1.00195E-8
mult2=-2.76441E-9
rf_tmon=-3.70721E-3
rf_agc=3.49667E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.66106E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67635E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19622E1
lens5a_imon=1.99785E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05241E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=3.16326E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04591E1
cs_ea1_imon=1.10454E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37797E0
lens1_imon=2.7901E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03324E1
cs_ea2_imon=1.3659E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.05406E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.28927E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.28373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.39223E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63882E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21605E0
cs_ionrep_imon=9.51334E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.28741E-8
tplens_vset=1.4E-1
tplens_vmon=1.68229E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2672E1
iondef2_imon=1.55697E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.04243E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=8.35254E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33429E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.14452E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48342E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00749E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70957E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25054E-1
os_ef2bup_imon=-5.1639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11316E1
os_restr2_imon=3.41518E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.27729E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.08243E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73134E1
iondef1_imon=1.10274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68441E1
iondef4_imon=1.10864E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.91061E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.59051E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-8.64372E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55384E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.62993E-1
window_imon=-7.27421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.54864E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.82044E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=6.97905E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.41531E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08194E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64147E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=6.9386E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.04525E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66786E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20869E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.88117E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.63476E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22421E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.81516E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.17943E-1	-7.99036E-1	-9.13165E0	-9.14247E0	4.98295E-3	9.49621E-2	2.73568E1	-3.26518E1	-3.26188E1	2.68472E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.18014E-1	-7.98917E-1	-9.13129E0	-9.14271E0	4.81606E-3	9.51529E-2	2.73253E1	-3.26725E1	-3.25905E1	2.68178E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.18276E-1	-7.98917E-1	-9.13143E0	-9.14261E0	4.74453E-3	9.52482E-2	2.73423E1	-3.26585E1	-3.2636E1	2.6837E1	1.19939E-7	2.51716E-3	2.51716E-3	6.32112E-3	3.01216E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.18276E-1	-7.98917E-1	-9.13153E0	-9.14257E0	4.60148E-3	9.46283E-2	2.73381E1	-3.26627E1	-3.26206E1	2.68382E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.18372E-1	-7.98798E-1	-9.13177E0	-9.14209E0	4.3869E-3	9.49144E-2	2.73189E1	-3.26597E1	-3.26434E1	2.6786E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.18229E-1	-7.98631E-1	-9.13165E0	-9.14226E0	4.76837E-3	9.50098E-2	2.73388E1	-3.26493E1	-3.26027E1	2.68424E1	1.19913E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.18515E-1	-7.98965E-1	-9.13162E0	-9.14261E0	4.673E-3	9.49621E-2	2.73327E1	-3.26464E1	-3.26188E1	2.6852E1	1.19809E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.18276E-1	-7.99012E-1	-9.13167E0	-9.14252E0	4.62532E-3	9.48668E-2	2.73045E1	-3.26706E1	-3.26318E1	2.68186E1	1.19965E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.18348E-1	-7.98821E-1	-9.1316E0	-9.14288E0	4.45843E-3	9.4986E-2	2.73281E1	-3.26703E1	-3.26154E1	2.68094E1	1.20363E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.183E-1	-7.98702E-1	-9.13148E0	-9.14273E0	4.673E-3	9.50098E-2	2.73516E1	-3.26915E1	-3.26217E1	2.67848E1	1.20055E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.99686E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.18372E-1	-7.99084E-1	-9.13172E0	-9.14266E0	4.3869E-3	9.49144E-2	2.7362E1	-3.27029E1	-3.26106E1	2.68458E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.18324E-1	-7.99036E-1	-9.13155E0	-9.14273E0	4.55379E-3	9.49383E-2	2.73223E1	-3.26572E1	-3.26349E1	2.68469E1	1.19831E-7	2.51575E-3	2.51575E-3	6.3074E-3	3.00741E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.18396E-1	-7.99131E-1	-9.13191E0	-9.14271E0	4.41074E-3	9.50336E-2	2.73143E1	-3.26621E1	-3.26309E1	2.68556E1	1.19895E-7	2.52222E-3	2.52222E-3	6.35399E-3	3.02581E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.18491E-1	-7.98798E-1	-9.13162E0	-9.14266E0	4.48227E-3	9.50098E-2	2.73267E1	-3.26494E1	-3.26326E1	2.68273E1	1.20191E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.00144E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.18467E-1	-7.98798E-1	-9.13181E0	-9.14288E0	4.50611E-3	9.50336E-2	2.73141E1	-3.26657E1	-3.26308E1	2.68194E1	1.20363E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.18396E-1	-7.98774E-1	-9.13169E0	-9.14283E0	4.41074E-3	9.46522E-2	2.73098E1	-3.26644E1	-3.26502E1	2.6843E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98481E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.18396E-1	-7.99465E-1	-9.13184E0	-9.14264E0	4.50611E-3	9.47475E-2	2.73237E1	-3.26777E1	-3.26092E1	2.68226E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.18467E-1	-7.99108E-1	-9.13174E0	-9.14288E0	4.50611E-3	9.46045E-2	2.73323E1	-3.26567E1	-3.26486E1	2.68128E1	1.19809E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.18467E-1	-7.99346E-1	-9.13155E0	-9.14319E0	4.76837E-3	9.4676E-2	2.73246E1	-3.26679E1	-3.26054E1	2.6837E1	1.20092E-7	2.51498E-3	2.51498E-3	6.34982E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.183E-1	-7.98821E-1	-9.13153E0	-9.14271E0	4.3869E-3	9.49621E-2	2.73134E1	-3.2672E1	-3.26354E1	2.68441E1	1.20311E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9943E-1