[Scan]
initial_time=2016-01-18T21:13:15
final_time=2016-01-18T21:13:34
ip_count=19
run=1024
dataset=8
scan=572
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-8.17871E-1
ql1_imon=1.40162E-8
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=1.94541E-9
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=7.19452E-10
ql4_vset=
ql4_vmon=-9.14288E0
ql4_imon=-1.72758E-10
mult1=-8.86143E-9
mult2=-2.78249E-9
rf_tmon=-5.16132E-3
rf_agc=3.24744E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.68879E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68037E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=1.99925E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05249E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53977E1
cs_ef1b_imon=3.15929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=1.096E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39026E0
lens1_imon=2.72023E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03779E1
cs_ea2_imon=1.35402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=3.05586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=1.28385E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=2.39461E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23853E0
cs_ionrep_imon=9.4805E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=1.95773E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.29551E-8
tplens_vset=1.4E-1
tplens_vmon=1.65028E0
tplens_imon=-1.99784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.56426E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98112E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.02375E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=8.58857E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.17162E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52758E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.17047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.33479E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.10624E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11105E1
os_restr2_imon=3.4177E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.30176E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.08675E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.11369E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.109E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.87788E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.60011E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-9.47263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47597E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57174E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-6.91381E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86662E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.80636E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.36039E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26086E0
defgridb_imon=6.21362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.43075E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07858E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64172E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31857E1
cs_fil1_imon=7.62335E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0068E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66668E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26895E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.71013E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22331E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.60493E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=227
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18229E-1	-7.98488E-1	-9.1316E0	-9.14273E0	4.43459E-3	9.46045E-2	2.73014E1	-3.26615E1	-3.2604E1	2.68322E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.99686E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.18276E-1	-7.98535E-1	-9.13146E0	-9.14285E0	4.72069E-3	9.47237E-2	2.73183E1	-3.2653E1	-3.26374E1	2.68623E1	1.19925E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.99083E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.18181E-1	-7.98631E-1	-9.13138E0	-9.14273E0	4.62532E-3	9.46522E-2	2.73092E1	-3.2659E1	-3.26384E1	2.68647E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.18133E-1	-7.98845E-1	-9.13157E0	-9.14304E0	4.41074E-3	9.46999E-2	2.73328E1	-3.26767E1	-3.2629E1	2.68233E1	1.20142E-7	2.51077E-3	2.51077E-3	6.29684E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18419E-1	-7.98798E-1	-9.13134E0	-9.14283E0	4.3869E-3	9.47714E-2	2.73225E1	-3.26302E1	-3.2632E1	2.6837E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.18419E-1	-7.98583E-1	-9.1316E0	-9.14299E0	4.45843E-3	9.49144E-2	2.7346E1	-3.2638E1	-3.26008E1	2.68496E1	1.20106E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.18396E-1	-7.98869E-1	-9.13146E0	-9.14276E0	4.55379E-3	9.47475E-2	2.73135E1	-3.26332E1	-3.26188E1	2.68238E1	1.20244E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.99083E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18682E-1	-7.98726E-1	-9.13169E0	-9.14259E0	4.26769E-3	9.50575E-2	2.73135E1	-3.26621E1	-3.2626E1	2.67818E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.18396E-1	-7.98798E-1	-9.13196E0	-9.14288E0	4.12464E-3	9.46999E-2	2.73225E1	-3.26675E1	-3.26026E1	2.68935E1	1.19697E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.18467E-1	-7.98893E-1	-9.13186E0	-9.14235E0	4.62532E-3	9.47475E-2	2.73039E1	-3.262E1	-3.26092E1	2.68719E1	1.20031E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00942E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.18467E-1	-7.98941E-1	-9.1316E0	-9.1424E0	4.50611E-3	9.50336E-2	2.72829E1	-3.26597E1	-3.26098E1	2.68364E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09294E0	-8.18396E-1	-7.98893E-1	-9.13184E0	-9.1424E0	4.43459E-3	9.49144E-2	2.73216E1	-3.26425E1	-3.26001E1	2.6843E1	1.20069E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.18324E-1	-7.98798E-1	-9.13146E0	-9.1424E0	4.36306E-3	9.50813E-2	2.73176E1	-3.26602E1	-3.26249E1	2.68591E1	1.2026E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.183E-1	-7.98798E-1	-9.13165E0	-9.14216E0	4.3869E-3	9.48429E-2	2.73349E1	-3.26572E1	-3.26461E1	2.68251E1	1.1988E-7	2.5199E-3	2.5199E-3	6.323E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-8.17943E-1	-7.98798E-1	-9.1316E0	-9.14202E0	4.45843E-3	9.48906E-2	2.73311E1	-3.26773E1	-3.26201E1	2.68232E1	1.1984E-7	2.5199E-3	2.5199E-3	6.31321E-3	3.00087E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09309E0	-8.17919E-1	-7.9875E-1	-9.13153E0	-9.14218E0	4.62532E-3	9.49621E-2	2.72868E1	-3.26461E1	-3.26467E1	2.68256E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0934E0	-8.18157E-1	-7.98678E-1	-9.1316E0	-9.14233E0	4.24385E-3	9.45807E-2	2.73345E1	-3.26476E1	-3.2632E1	2.68659E1	1.19697E-7	2.52276E-3	2.52276E-3	6.28592E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.17943E-1	-7.98941E-1	-9.13186E0	-9.14228E0	4.24385E-3	9.45568E-2	2.73159E1	-3.26735E1	-3.26002E1	2.68442E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.17943E-1	-7.98893E-1	-9.13196E0	-9.14235E0	4.31538E-3	9.48429E-2	2.73299E1	-3.26667E1	-3.26201E1	2.68262E1	1.20017E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.98222E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.17871E-1	-7.98893E-1	-9.13172E0	-9.14288E0	4.36306E-3	9.50098E-2	2.73315E1	-3.26567E1	-3.26056E1	2.68076E1	1.19953E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.9943E-1