[Scan]
initial_time=2016-01-18T21:13:42
final_time=2016-01-18T21:14:01
ip_count=19
run=1024
dataset=8
scan=573
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08708E-4
ql1_vset=
ql1_vmon=-8.1799E-1
ql1_imon=1.39307E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=1.97984E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=7.14695E-10
ql4_vset=
ql4_vmon=-9.14271E0
ql4_imon=-1.387E-10
mult1=-9.58386E-9
mult2=-2.62679E-9
rf_tmon=-4.0558E-3
rf_agc=3.34297E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.63773E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66789E0
bslens_imon=2.49531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=2.00411E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54036E1
cs_ef1b_imon=3.16329E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04535E1
cs_ea1_imon=1.08807E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40256E0
lens1_imon=2.701E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64652E1
os_ef1alow_imon=2.98664E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03372E1
cs_ea2_imon=1.36134E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84444E1
cs_ef1a_imon=3.054E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.28568E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.27296E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15024E1
os_ea1_imon=2.39308E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.08619E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22027E0
cs_ionrep_imon=9.35642E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93673E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01734E1
cs_anode1_imon=1.96379E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.28934E-8
tplens_vset=1.4E-1
tplens_vmon=1.70204E0
tplens_imon=-1.08828E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26458E1
iondef3_imon=1.50605E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.56666E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98203E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.02797E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28638E0
ionrepsh_imon=8.45287E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34013E1
lens5b_imon=2.17123E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74726E1
cs_ef2b_imon=3.13409E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51227E0
os_ea2_imon=-6.37735E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00564E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.16441E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07701E0
os_ef2alow_imon=-2.42087E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17592E-1
os_ef2bup_imon=-5.31388E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11142E1
os_restr2_imon=3.41891E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.28128E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0179E1
cs_anode2_imon=2.08056E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.09799E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67674E1
iondef4_imon=1.09327E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.91287E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.60679E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14324E0
cs_ionaccel_imon=-8.30273E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47372E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5648E1
einzel_imon=7.80386E-6
window_vset=0.0E0
window_vmon=2.55646E-1
window_imon=-8.67698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.392E-4
mask2_vset=0.0E0
mask2_vmon=-1.86413E1
mask2_imon=-5.34609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=7.81377E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=6.59067E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.15264E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38823E0
defgridb_imon=6.4511E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.42065E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07884E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64426E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31835E1
cs_fil1_imon=7.87286E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.61316E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6691E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.40896E-2
os_fil2_imon=-2.413E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.64366E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30862E-1
cs_fil2_imon=-2.08864E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32335E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22362E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9182E-1
res40_imon=-2.42835E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.17966E-1	-7.98965E-1	-9.13157E0	-9.14242E0	4.64916E-3	9.50336E-2	2.73257E1	-3.2675E1	-3.25953E1	2.68221E1	1.19937E-7	2.52293E-3	2.52293E-3	6.3131E-3	3.00522E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.1749E-1	-7.98845E-1	-9.1315E0	-9.14268E0	4.55379E-3	9.47237E-2	2.73033E1	-3.26705E1	-3.2626E1	2.68388E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.04322E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.17847E-1	-7.98941E-1	-9.13172E0	-9.14278E0	4.64916E-3	9.48191E-2	2.73063E1	-3.26683E1	-3.26133E1	2.68319E1	1.20278E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.01609E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.17966E-1	-7.9906E-1	-9.13169E0	-9.14257E0	4.41074E-3	9.50336E-2	2.73231E1	-3.26633E1	-3.26308E1	2.68058E1	1.20192E-7	2.52131E-3	2.52131E-3	6.29157E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17966E-1	-7.9906E-1	-9.13172E0	-9.14228E0	4.41074E-3	9.50336E-2	2.73195E1	-3.26663E1	-3.26422E1	2.68797E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.18038E-1	-7.98845E-1	-9.13196E0	-9.14257E0	4.57764E-3	9.4676E-2	2.73033E1	-3.26633E1	-3.26296E1	2.68178E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.18038E-1	-7.98821E-1	-9.13198E0	-9.14271E0	4.31538E-3	9.50098E-2	2.73351E1	-3.26356E1	-3.26266E1	2.6813E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.17966E-1	-7.99227E-1	-9.1316E0	-9.14273E0	4.62532E-3	9.50098E-2	2.72868E1	-3.26419E1	-3.26219E1	2.69205E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.17919E-1	-7.99012E-1	-9.13191E0	-9.14226E0	4.72069E-3	9.49144E-2	2.7334E1	-3.26343E1	-3.26178E1	2.68117E1	1.19809E-7	2.51334E-3	2.51334E-3	6.36244E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.18372E-1	-7.98726E-1	-9.13196E0	-9.1429E0	4.48227E-3	9.48668E-2	2.73271E1	-3.26548E1	-3.25734E1	2.68269E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17943E-1	-7.98631E-1	-9.13196E0	-9.1428E0	4.72069E-3	9.51767E-2	2.72949E1	-3.26494E1	-3.25906E1	2.68389E1	1.1966E-7	2.50914E-3	2.50914E-3	6.30182E-3	3.02277E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.18086E-1	-7.99084E-1	-9.13191E0	-9.14292E0	4.88758E-3	9.4986E-2	2.73135E1	-3.2641E1	-3.26494E1	2.68449E1	1.20158E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.17943E-1	-7.98821E-1	-9.13181E0	-9.14257E0	4.76837E-3	9.52005E-2	2.73299E1	-3.26767E1	-3.26077E1	2.6818E1	1.19861E-7	2.51826E-3	2.51826E-3	6.29645E-3	3.01216E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.1811E-1	-7.98893E-1	-9.13155E0	-9.14266E0	4.74453E-3	9.48191E-2	2.73093E1	-3.26464E1	-3.2608E1	2.68563E1					
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.17895E-1	-7.98607E-1	-9.13172E0	-9.14242E0	4.50611E-3	9.48191E-2	2.73423E1	-3.26673E1	-3.26815E1	2.68186E1	1.20017E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.17871E-1	-7.98202E-1	-9.13193E0	-9.1424E0	4.41074E-3	9.5129E-2	2.73234E1	-3.26502E1	-3.26443E1	2.67637E1	1.1979E-7	2.51077E-3	2.51077E-3	6.31798E-3	3.00097E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.18062E-1	-7.98774E-1	-9.13179E0	-9.14207E0	4.55379E-3	9.50575E-2	2.73405E1	-3.26561E1	-3.26476E1	2.68929E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.18014E-1	-7.98702E-1	-9.1316E0	-9.14261E0	4.76837E-3	9.50813E-2	2.73393E1	-3.26729E1	-3.26416E1	2.68526E1	1.2054E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.17943E-1	-7.98464E-1	-9.1316E0	-9.1428E0	4.45843E-3	9.4986E-2	2.73306E1	-3.26515E1	-3.26254E1	2.68337E1	1.19953E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.1799E-1	-7.98392E-1	-9.1316E0	-9.14271E0	4.52995E-3	9.50575E-2	2.73153E1	-3.26428E1	-3.26458E1	2.67674E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1