[Scan]
initial_time=2016-01-18T21:14:08
final_time=2016-01-18T21:14:28
ip_count=19
run=1024
dataset=8
scan=574
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08726E-4
ql1_vset=
ql1_vmon=-8.178E-1
ql1_imon=1.38615E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.94777E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=6.49226E-10
ql4_vset=
ql4_vmon=-9.1428E0
ql4_imon=-1.52934E-10
mult1=-1.01614E-8
mult2=-2.73502E-9
rf_tmon=-4.04345E-3
rf_agc=3.40111E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.64255E-9
bslens_vset=-6.2E0
bslens_vmon=-6.7148E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19634E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=3.16434E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04688E1
cs_ea1_imon=1.10779E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36895E0
lens1_imon=2.59543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.35761E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=3.04505E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.2785E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.27652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.40737E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=9.34751E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91949E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.28276E-8
tplens_vset=1.4E-1
tplens_vmon=1.68409E0
tplens_imon=-2.05617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26449E1
iondef3_imon=1.51803E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.00602E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29716E0
ionrepsh_imon=8.51116E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46359E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00511E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.1683E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.37668E-1
os_ef2bup_imon=-5.07741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.41085E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.0882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73523E1
iondef1_imon=1.115E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.1108E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.90117E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.56964E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-9.11223E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56976E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.3356E-1
window_imon=-6.4453E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86458E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.48735E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.62937E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.13407E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.42204E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08008E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63908E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3182E1
cs_fil1_imon=7.80956E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.69564E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66489E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16999E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18737E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.03198E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22255E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.63807E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.17943E-1	-7.98821E-1	-9.13184E0	-9.14259E0	4.69685E-3	9.49383E-2	2.73104E1	-3.26638E1	-3.26337E1	2.67845E1	1.19819E-7	2.50914E-3	2.50914E-3	6.32978E-3	3.00676E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.17847E-1	-7.98678E-1	-9.13184E0	-9.14242E0	4.55379E-3	9.51052E-2	2.73149E1	-3.26774E1	-3.26297E1	2.69105E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.17776E-1	-7.98535E-1	-9.1316E0	-9.14266E0	4.64916E-3	9.50098E-2	2.73104E1	-3.26514E1	-3.26254E1	2.67862E1	1.20244E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00144E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.17943E-1	-7.9875E-1	-9.13186E0	-9.14233E0	4.3869E-3	9.47714E-2	2.73472E1	-3.2641E1	-3.26002E1	2.68316E1	1.198E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.17895E-1	-7.98559E-1	-9.13162E0	-9.14259E0	4.29153E-3	9.48429E-2	2.73096E1	-3.2678E1	-3.26288E1	2.68423E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.17728E-1	-7.98821E-1	-9.13179E0	-9.14266E0	4.55379E-3	9.49383E-2	2.73442E1	-3.26876E1	-3.26028E1	2.68447E1	1.20078E-7	2.51575E-3	2.51575E-3	6.3074E-3	3.01485E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.178E-1	-7.98583E-1	-9.13167E0	-9.14259E0	4.3869E-3	9.48906E-2	2.73099E1	-3.26518E1	-3.2623E1	2.67998E1	1.19805E-7	2.51829E-3	2.51829E-3	6.33161E-3	2.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.17776E-1	-7.9875E-1	-9.13165E0	-9.14266E0	4.52995E-3	9.4986E-2	2.73351E1	-3.2635E1	-3.26194E1	2.68436E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.17657E-1	-7.98631E-1	-9.132E0	-9.1424E0	4.60148E-3	9.49383E-2	2.73009E1	-3.26573E1	-3.26362E1	2.68815E1	1.19544E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.1811E-1	-7.98702E-1	-9.13167E0	-9.14264E0	4.55379E-3	9.50336E-2	2.73309E1	-3.26765E1	-3.2641E1	2.68377E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01609E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.1799E-1	-7.98559E-1	-9.13157E0	-9.14302E0	4.43459E-3	9.49383E-2	2.73087E1	-3.26482E1	-3.25942E1	2.68905E1	1.20174E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.18038E-1	-7.98607E-1	-9.13162E0	-9.14295E0	4.3869E-3	9.46999E-2	2.73039E1	-3.26378E1	-3.26242E1	2.69512E1	1.19861E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.17823E-1	-7.98988E-1	-9.13184E0	-9.14273E0	4.60148E-3	9.47237E-2	2.73279E1	-3.26993E1	-3.25954E1	2.67968E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.1768E-1	-7.98488E-1	-9.1321E0	-9.14302E0	4.36306E-3	9.49144E-2	2.73523E1	-3.26585E1	-3.26254E1	2.68328E1	1.20122E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.18038E-1	-7.9875E-1	-9.13191E0	-9.14259E0	4.62532E-3	9.50336E-2	2.73417E1	-3.26627E1	-3.26326E1	2.68304E1	1.19953E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.18014E-1	-7.98583E-1	-9.13198E0	-9.14261E0	4.52995E-3	9.51529E-2	2.72921E1	-3.26284E1	-3.26413E1	2.68151E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.18038E-1	-7.98798E-1	-9.13205E0	-9.14264E0	4.76837E-3	9.51529E-2	2.73051E1	-3.26566E1	-3.26413E1	2.68007E1	1.1974E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.01104E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.17657E-1	-7.98988E-1	-9.13196E0	-9.14302E0	4.60148E-3	9.5129E-2	2.73505E1	-3.26549E1	-3.26449E1	2.68348E1	1.20208E-7	2.51732E-3	2.51732E-3	6.30464E-3	3.00224E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.18086E-1	-7.98988E-1	-9.13186E0	-9.14273E0	4.52995E-3	9.49383E-2	2.73081E1	-3.26657E1	-3.26158E1	2.6849E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.178E-1	-7.98583E-1	-9.13169E0	-9.1428E0	4.72069E-3	9.50575E-2	2.73523E1	-3.26738E1	-3.26449E1	2.68478E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1