[Scan]
initial_time=2016-01-18T21:14:35
final_time=2016-01-18T21:14:54
ip_count=19
run=1024
dataset=8
scan=575
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.17895E-1
ql1_imon=1.38945E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=1.94973E-9
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=5.47659E-10
ql4_vset=
ql4_vmon=-9.14271E0
ql4_imon=-1.31726E-10
mult1=-8.78918E-9
mult2=-2.68667E-9
rf_tmon=-5.40765E-3
rf_agc=3.38202E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.68662E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69789E0
bslens_imon=2.33737E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19823E1
lens5a_imon=2.01696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=3.15857E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04566E1
cs_ea1_imon=1.07815E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37317E0
lens1_imon=2.51735E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.3606E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.27699E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.27977E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14877E1
os_ea1_imon=2.40116E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25638E0
cs_ionrep_imon=9.70902E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=1.97395E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.28954E-8
tplens_vset=1.4E-1
tplens_vmon=1.70632E0
tplens_imon=-1.63922E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.50018E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.54682E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98206E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.0749E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2625E0
ionrepsh_imon=8.46756E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33841E1
lens5b_imon=2.18849E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48717E0
os_ea2_imon=-5.71622E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.35281E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25054E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.4213E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.27431E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73424E1
iondef1_imon=1.10386E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69692E1
iondef4_imon=1.10828E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.90478E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.56376E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-7.81481E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.34161E-1
window_imon=-7.34629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-4.96767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.4024E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.46946E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.24813E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36065E0
defgridb_imon=6.28214E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.42246E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07569E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64004E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31798E1
cs_fil1_imon=6.47609E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.34725E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66498E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26441E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91288E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22233E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=3.03545E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.7611E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.17823E-1	-7.98798E-1	-9.13177E0	-9.14245E0	4.43459E-3	9.54628E-2	2.73255E1	-3.26657E1	-3.2611E1	2.6849E1	1.20208E-7	2.51838E-3	2.51838E-3	6.28468E-3	3.00251E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.17609E-1	-7.98941E-1	-9.1316E0	-9.14314E0	4.72069E-3	9.52482E-2	2.73123E1	-3.26549E1	-3.26176E1	2.68827E1	1.19749E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.17752E-1	-7.98774E-1	-9.13174E0	-9.14276E0	4.29153E-3	9.48191E-2	2.73753E1	-3.26921E1	-3.26119E1	2.68016E1	1.19925E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.02277E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.17513E-1	-7.98869E-1	-9.13191E0	-9.14273E0	4.29153E-3	9.47714E-2	2.73153E1	-3.26416E1	-3.26314E1	2.68256E1	1.20055E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.1768E-1	-7.98559E-1	-9.13172E0	-9.14233E0	4.43459E-3	9.47475E-2	2.73181E1	-3.26467E1	-3.26225E1	2.6828E1	1.198E-7	2.52276E-3	2.52276E-3	6.34518E-3	2.97647E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.17609E-1	-7.98512E-1	-9.13165E0	-9.14266E0	4.57764E-3	9.51767E-2	2.73285E1	-3.26494E1	-3.26326E1	2.68298E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.17919E-1	-7.98726E-1	-9.13174E0	-9.14268E0	4.48227E-3	9.50098E-2	2.73261E1	-3.26801E1	-3.26044E1	2.68442E1	1.198E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.17919E-1	-7.98678E-1	-9.13162E0	-9.14254E0	4.26769E-3	9.4986E-2	2.73003E1	-3.26591E1	-3.25809E1	2.68382E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.03449E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.18038E-1	-7.98821E-1	-9.13169E0	-9.14235E0	4.36306E-3	9.48191E-2	2.72903E1	-3.26455E1	-3.26384E1	2.68358E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.18086E-1	-7.98774E-1	-9.13169E0	-9.14264E0	4.57764E-3	9.50575E-2	2.73104E1	-3.26396E1	-3.26042E1	2.68458E1	1.19749E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00966E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.18038E-1	-7.99084E-1	-9.13174E0	-9.14242E0	4.673E-3	9.46283E-2	2.73105E1	-3.26681E1	-3.262E1	2.68088E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.18181E-1	-7.98965E-1	-9.13184E0	-9.14233E0	4.91142E-3	9.47952E-2	2.73592E1	-3.26597E1	-3.26146E1	2.6816E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.17966E-1	-7.98512E-1	-9.13203E0	-9.14261E0	4.79221E-3	9.48906E-2	2.73281E1	-3.26531E1	-3.26284E1	2.68214E1	1.20209E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.18014E-1	-7.98512E-1	-9.1316E0	-9.14233E0	4.673E-3	9.46045E-2	2.73027E1	-3.26597E1	-3.26315E1	2.68689E1	1.19653E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.18157E-1	-7.9844E-1	-9.13172E0	-9.14278E0	4.48227E-3	9.48668E-2	2.73261E1	-3.26705E1	-3.26152E1	2.68689E1	1.20278E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.18038E-1	-7.98774E-1	-9.13172E0	-9.14259E0	4.45843E-3	9.49621E-2	2.73452E1	-3.26384E1	-3.26042E1	2.68142E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00824E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.1811E-1	-7.98917E-1	-9.13165E0	-9.14233E0	4.48227E-3	9.47475E-2	2.73291E1	-3.26747E1	-3.2605E1	2.68227E1	1.2033E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.18014E-1	-7.98798E-1	-9.13153E0	-9.14278E0	4.36306E-3	9.47237E-2	2.73051E1	-3.26543E1	-3.257E1	2.68094E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.1799E-1	-7.98774E-1	-9.13169E0	-9.14276E0	4.64916E-3	9.47237E-2	2.73249E1	-3.26699E1	-3.26332E1	2.67944E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.17895E-1	-7.98845E-1	-9.13177E0	-9.14271E0	4.69685E-3	9.47952E-2	2.73424E1	-3.26651E1	-3.26278E1	2.69692E1	1.19902E-7	2.5131E-3	2.5131E-3	6.34518E-3	3.03545E-1