[Scan]
initial_time=2016-01-18T21:15:55
final_time=2016-01-18T21:16:14
ip_count=19
run=1024
dataset=8
scan=578
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08744E-4
ql1_vset=
ql1_vmon=-8.1768E-1
ql1_imon=1.38477E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.91606E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=5.39291E-10
ql4_vset=
ql4_vmon=-9.14285E0
ql4_imon=-1.30963E-10
mult1=-9.71215E-9
mult2=-2.72914E-9
rf_tmon=-3.46535E-3
rf_agc=3.48193E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.65395E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69738E0
bslens_imon=2.15563E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=2.02561E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53814E1
cs_ef1b_imon=3.17731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=1.12221E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38698E0
lens1_imon=2.77928E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.36807E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=3.04469E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.28573E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.27652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=2.39548E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20343E0
cs_ionrep_imon=9.44484E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91961E2
cs_nozzle_imon=1.93835E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=1.97719E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.29298E-8
tplens_vset=1.4E-1
tplens_vmon=1.68589E0
tplens_imon=-1.09497E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26195E1
iondef3_imon=1.5119E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.5685E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.06135E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=8.69501E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34054E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50144E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06047E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0894E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07635E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11238E1
os_restr2_imon=3.41446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.28594E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.09144E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73428E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.678E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.92197E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.60988E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.00493E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47594E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56051E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39365E-4
mask2_vset=0.0E0
mask2_vmon=-1.86626E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.55585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.7916E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.07999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=6.21841E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.42216E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07834E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64363E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=6.48811E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03744E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66748E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.37635E-2
os_fil2_imon=-2.36564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.79481E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.78493E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22331E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35601E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36177E-1
res40_imon=-2.30596E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.17394E-1	-7.98559E-1	-9.1315E0	-9.14233E0	4.62532E-3	9.47952E-2	2.73153E1	-3.26783E1	-3.26374E1	2.66839E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.17299E-1	-7.98702E-1	-9.13141E0	-9.14278E0	4.76837E-3	9.48906E-2	2.73219E1	-3.26783E1	-3.26026E1	2.69608E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.03449E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.17847E-1	-7.98965E-1	-9.13153E0	-9.14283E0	5.03063E-3	9.48429E-2	2.73187E1	-3.26526E1	-3.26219E1	2.68163E1	1.20297E-7	2.52139E-3	2.52139E-3	6.34099E-3	3.00144E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.17823E-1	-7.99108E-1	-9.13169E0	-9.14285E0	4.74453E-3	9.48429E-2	2.73228E1	-3.26609E1	-3.25972E1	2.66405E1	1.20042E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09317E0	-8.18014E-1	-7.99036E-1	-9.13169E0	-9.14302E0	5.126E-3	9.49144E-2	2.73187E1	-3.26526E1	-3.26343E1	2.67864E1	1.19978E-7	2.5225E-3	2.5225E-3	6.30182E-3	3.0041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-8.178E-1	-7.98893E-1	-9.13129E0	-9.14278E0	4.8399E-3	9.49144E-2	2.73302E1	-3.26358E1	-3.26401E1	2.68118E1	1.20069E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.17943E-1	-7.98678E-1	-9.13126E0	-9.14257E0	4.79221E-3	9.48191E-2	2.72797E1	-3.2688E1	-3.25906E1	2.69319E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.17561E-1	-7.98702E-1	-9.13155E0	-9.14233E0	4.88758E-3	9.49144E-2	2.72961E1	-3.26512E1	-3.2614E1	2.6798E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09302E0	-8.17633E-1	-7.98631E-1	-9.13167E0	-9.14283E0	4.64916E-3	9.4986E-2	2.73246E1	-3.26626E1	-3.26095E1	2.67956E1	1.19851E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.17418E-1	-7.98655E-1	-9.13143E0	-9.14268E0	4.98295E-3	9.45807E-2	2.73039E1	-3.25978E1	-3.26651E1	2.68334E1	1.2026E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.98665E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.1737E-1	-7.98631E-1	-9.1316E0	-9.14268E0	4.93526E-3	9.49621E-2	2.73204E1	-3.26691E1	-3.26236E1	2.68876E1	1.19861E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.17728E-1	-7.98845E-1	-9.13184E0	-9.14273E0	4.81606E-3	9.50813E-2	2.73303E1	-3.26488E1	-3.2611E1	2.68617E1	1.20209E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.17633E-1	-7.98488E-1	-9.132E0	-9.14302E0	4.50611E-3	9.5129E-2	2.73357E1	-3.26224E1	-3.26609E1	2.67788E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-8.17418E-1	-7.98774E-1	-9.13188E0	-9.14299E0	4.17233E-3	9.50336E-2	2.73183E1	-3.26681E1	-3.26356E1	2.69692E1	1.19809E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9952E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09286E0	-8.17323E-1	-7.98583E-1	-9.13184E0	-9.1428E0	4.52995E-3	9.47714E-2	2.73261E1	-3.26849E1	-3.2623E1	2.68112E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09263E0	-8.17513E-1	-7.98798E-1	-9.13162E0	-9.14285E0	4.31538E-3	9.50098E-2	2.73399E1	-3.26614E1	-3.26042E1	2.68106E1	1.19913E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.0924E0	-8.17347E-1	-7.98655E-1	-9.13146E0	-9.1429E0	4.26769E-3	9.45807E-2	2.73165E1	-3.2653E1	-3.26446E1	2.6831E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09333E0	-8.17561E-1	-7.98726E-1	-9.13186E0	-9.14304E0	4.3869E-3	9.4986E-2	2.72915E1	-3.26697E1	-3.26172E1	2.68007E1	1.20226E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01609E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.17752E-1	-7.98607E-1	-9.13181E0	-9.14271E0	4.26769E-3	9.46999E-2	2.73303E1	-3.26693E1	-3.2632E1	2.69001E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.1768E-1	-7.98678E-1	-9.13143E0	-9.14285E0	4.673E-3	9.49383E-2	2.73428E1	-3.2662E1	-3.26195E1	2.678E1	1.19953E-7	2.51954E-3	2.51954E-3	6.35601E-3	3.00197E-1