[Scan]
initial_time=2016-01-18T21:16:21
final_time=2016-01-18T21:16:41
ip_count=19
run=1024
dataset=8
scan=579
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=1.38091E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.9753E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=4.03833E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-1.2852E-10
mult1=-9.8445E-9
mult2=-2.79869E-9
rf_tmon=-4.54105E-3
rf_agc=3.40807E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.72397E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=3.17551E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04463E1
cs_ea1_imon=1.07122E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38908E0
lens1_imon=2.93613E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.3788E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.04865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.2815E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11826E1
os_restr1_imon=4.28734E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15093E1
os_ea1_imon=2.37833E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63263E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=9.4805E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93795E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=1.97287E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.30159E-8
tplens_vset=1.4E-1
tplens_vmon=1.69747E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26216E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26667E1
iondef2_imon=1.56391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.97939E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=4.06051E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=8.64874E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.18472E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54174E0
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70837E1
cs_ef2a_imon=3.16182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.30235E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13642E-1
os_ef2bup_imon=-5.12426E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.42094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.28937E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.08964E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68194E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.90917E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.58961E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17099E0
cs_ionaccel_imon=-8.57164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47468E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56874E1
einzel_imon=7.89687E-6
window_vset=0.0E0
window_vmon=2.35362E-1
window_imon=-6.76965E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-4.46312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.39225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.55341E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.25775E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58568E0
defgridb_imon=6.29503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33256E1
os_fil1_imon=9.42354E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08422E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6421E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31829E1
cs_fil1_imon=8.63247E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.77973E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66796E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26895E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.99994E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.64795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22412E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31761E-3
inlet_lpb_pmon=3.01121E-1
chamber_ion_pmon=1.20258E-7
chamber_cvt_pmon=2.5165E-3
foreline_cvt_pmon=2.5165E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28368E-1
res40_imon=-2.342E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.17323E-1	-7.98321E-1	-9.13157E0	-9.14259E0	4.76837E-3	9.4986E-2	2.73213E1	-3.26669E1	-3.2632E1	2.68453E1	1.19861E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00302E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.17251E-1	-7.98464E-1	-9.13143E0	-9.14218E0	4.673E-3	9.49144E-2	2.73057E1	-3.26621E1	-3.26458E1	2.68537E1	1.2026E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.17466E-1	-7.98774E-1	-9.13157E0	-9.14252E0	4.48227E-3	9.4986E-2	2.7347E1	-3.26762E1	-3.26183E1	2.68858E1	1.19819E-7	2.52362E-3	2.52362E-3	6.30182E-3	3.00676E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.17251E-1	-7.98631E-1	-9.1315E0	-9.14278E0	4.52995E-3	9.48668E-2	2.73187E1	-3.26502E1	-3.26266E1	2.6819E1	1.19891E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.17323E-1	-7.98726E-1	-9.13157E0	-9.14268E0	4.69685E-3	9.48906E-2	2.73106E1	-3.26646E1	-3.26083E1	2.68238E1	1.20017E-7	2.51116E-3	2.51116E-3	6.33486E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.17394E-1	-7.98416E-1	-9.13167E0	-9.14276E0	4.45843E-3	9.50336E-2	2.72961E1	-3.26464E1	-3.26272E1	2.68226E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.1749E-1	-7.98869E-1	-9.13148E0	-9.14254E0	4.69685E-3	9.51529E-2	2.73451E1	-3.26654E1	-3.26596E1	2.68528E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.17513E-1	-7.98869E-1	-9.1316E0	-9.1424E0	4.76837E-3	9.52959E-2	2.73303E1	-3.26518E1	-3.2623E1	2.68472E1	1.20042E-7	2.51182E-3	2.51182E-3	6.32858E-3	3.006E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17657E-1	-7.98893E-1	-9.13162E0	-9.14237E0	4.76837E-3	9.50336E-2	2.73183E1	-3.26543E1	-3.26224E1	2.68665E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.17513E-1	-7.98988E-1	-9.1316E0	-9.14285E0	4.17233E-3	9.48668E-2	2.72945E1	-3.26354E1	-3.26095E1	2.68196E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.17585E-1	-7.99084E-1	-9.13167E0	-9.14271E0	4.31538E-3	9.52482E-2	2.73273E1	-3.26543E1	-3.26356E1	2.68052E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.17657E-1	-7.98988E-1	-9.13167E0	-9.1428E0	4.26769E-3	9.52244E-2	2.73147E1	-3.26554E1	-3.26284E1	2.68496E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.1768E-1	-7.98941E-1	-9.13174E0	-9.14257E0	4.52995E-3	9.47952E-2	2.72937E1	-3.26669E1	-3.262E1	2.68296E1	1.20122E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.17418E-1	-7.9875E-1	-9.13148E0	-9.14221E0	4.55379E-3	9.4986E-2	2.7311E1	-3.26815E1	-3.25717E1	2.68226E1	1.19953E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.9892E-1
1.8E1	6.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17323E-1	-7.98583E-1	-9.1316E0	-9.14278E0	4.74453E-3	9.50575E-2	2.72959E1	-3.26597E1	-3.2634E1	2.68496E1	1.19646E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99175E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.17204E-1	-7.98559E-1	-9.13181E0	-9.14259E0	4.72069E-3	9.50336E-2	2.73243E1	-3.26098E1	-3.26242E1	2.68541E1	1.19713E-7	2.5225E-3	2.5225E-3	6.30182E-3	2.98026E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.17418E-1	-7.98702E-1	-9.13131E0	-9.1428E0	4.74453E-3	9.50098E-2	2.73267E1	-3.26458E1	-3.26098E1	2.67807E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.97963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17561E-1	-7.98607E-1	-9.13148E0	-9.14271E0	4.45843E-3	9.50336E-2	2.73476E1	-3.26762E1	-3.26201E1	2.68319E1	1.20278E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.17347E-1	-7.98678E-1	-9.13196E0	-9.14278E0	4.673E-3	9.49383E-2	2.73159E1	-3.26681E1	-3.26351E1	2.68267E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.17227E-1	-7.9844E-1	-9.13169E0	-9.14283E0	4.74453E-3	9.52482E-2	2.73375E1	-3.26667E1	-3.26216E1	2.68194E1	1.20258E-7	2.5165E-3	2.5165E-3	6.31761E-3	3.01121E-1