[Scan]
initial_time=2016-01-18T21:16:48
final_time=2016-01-18T21:17:07
ip_count=19
run=1024
dataset=8
scan=580
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-8.17728E-1
ql1_imon=1.38478E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.94225E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=4.80163E-10
ql4_vset=
ql4_vmon=-9.14268E0
ql4_imon=-1.35827E-10
mult1=-9.22746E-9
mult2=-2.73306E-9
rf_tmon=-4.80443E-3
rf_agc=3.28372E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.66128E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70098E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19466E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.16362E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04748E1
cs_ea1_imon=1.08219E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38217E0
lens1_imon=2.62788E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.35797E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84652E1
cs_ef1a_imon=3.04973E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.28151E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.27544E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15047E1
os_ea1_imon=2.38971E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22326E0
cs_ionrep_imon=9.59265E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93672E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=1.96999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.28793E-8
tplens_vset=1.4E-1
tplens_vmon=1.6919E0
tplens_imon=-2.63296E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26307E1
iondef3_imon=1.48559E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26868E1
iondef2_imon=1.55408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98295E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.03388E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24489E0
ionrepsh_imon=8.51116E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33544E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48882E0
os_ea2_imon=-5.33668E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12303E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.03776E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.41482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22995E2
cs_ionfoca_imon=6.28991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72986E1
iondef1_imon=1.12762E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68528E1
iondef4_imon=1.11981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.94634E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.58093E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-6.37322E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55438E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.52782E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.70005E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.43471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.36839E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50984E0
defgridb_imon=6.29772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.45622E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0847E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63915E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31816E1
cs_fil1_imon=5.73127E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40732E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66674E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.35056E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.97655E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.01725E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.01628E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22311E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.12751E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.17299E-1	-7.98488E-1	-9.13172E0	-9.14295E0	4.673E-3	9.55582E-2	2.72939E1	-3.26832E1	-3.26496E1	2.6813E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.98222E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.17394E-1	-7.98798E-1	-9.13157E0	-9.14278E0	4.3869E-3	9.52721E-2	2.73002E1	-3.26676E1	-3.26217E1	2.6831E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.17418E-1	-7.98535E-1	-9.13167E0	-9.1423E0	4.52995E-3	9.52482E-2	2.73334E1	-3.2662E1	-3.26225E1	2.68635E1	1.20084E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.97762E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17394E-1	-7.98774E-1	-9.13179E0	-9.14264E0	4.45843E-3	9.52482E-2	2.73476E1	-3.26868E1	-3.26054E1	2.68111E1	1.19953E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.17561E-1	-7.98965E-1	-9.13191E0	-9.14237E0	4.45843E-3	9.51529E-2	2.73252E1	-3.26614E1	-3.26354E1	2.68376E1	1.20209E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.17251E-1	-7.98893E-1	-9.13181E0	-9.14292E0	4.45843E-3	9.49383E-2	2.731E1	-3.26462E1	-3.26468E1	2.68316E1	1.20209E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.17204E-1	-7.98821E-1	-9.13184E0	-9.14278E0	4.52995E-3	9.48191E-2	2.73015E1	-3.26428E1	-3.26068E1	2.68545E1	1.20191E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.17561E-1	-7.9844E-1	-9.13174E0	-9.14307E0	4.48227E-3	9.49144E-2	2.73316E1	-3.26614E1	-3.25971E1	2.68382E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.17418E-1	-7.98488E-1	-9.13126E0	-9.14297E0	4.52995E-3	9.50336E-2	2.73339E1	-3.26566E1	-3.26168E1	2.68821E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.17204E-1	-7.98464E-1	-9.1315E0	-9.14261E0	4.57764E-3	9.51529E-2	2.73832E1	-3.26861E1	-3.2641E1	2.68599E1	1.20084E-7	2.51248E-3	2.51248E-3	6.31858E-3	2.99613E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.17513E-1	-7.98774E-1	-9.13143E0	-9.1429E0	4.52995E-3	9.50098E-2	2.73311E1	-3.26714E1	-3.26349E1	2.67649E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.17132E-1	-7.98774E-1	-9.13143E0	-9.14259E0	4.45843E-3	9.49383E-2	2.73177E1	-3.26464E1	-3.26056E1	2.69085E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.17275E-1	-7.9906E-1	-9.13134E0	-9.14302E0	4.31538E-3	9.51052E-2	2.73327E1	-3.26837E1	-3.26104E1	2.68214E1	1.20017E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.17513E-1	-7.98774E-1	-9.13155E0	-9.14266E0	4.31538E-3	9.49621E-2	2.73399E1	-3.26862E1	-3.25871E1	2.68099E1	1.19819E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.99879E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.17466E-1	-7.98845E-1	-9.13148E0	-9.14266E0	4.17233E-3	9.47714E-2	2.73265E1	-3.26523E1	-3.26229E1	2.68569E1	1.19941E-7	2.52131E-3	2.52131E-3	6.33388E-3	2.99845E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.1768E-1	-7.98917E-1	-9.13141E0	-9.14264E0	4.29153E-3	9.49383E-2	2.72811E1	-3.265E1	-3.26422E1	2.68296E1	1.19978E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.01475E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17537E-1	-7.98631E-1	-9.13129E0	-9.14292E0	4.45843E-3	9.47952E-2	2.7347E1	-3.26685E1	-3.26236E1	2.67704E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17466E-1	-7.98869E-1	-9.1315E0	-9.14283E0	4.33922E-3	9.4986E-2	2.7324E1	-3.26325E1	-3.25936E1	2.69349E1	1.20062E-7	2.51647E-3	2.51647E-3	6.30197E-3	3.00507E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17776E-1	-7.98774E-1	-9.13134E0	-9.14237E0	4.43459E-3	9.47475E-2	2.73285E1	-3.26837E1	-3.26122E1	2.68358E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.17728E-1	-7.98607E-1	-9.13129E0	-9.14268E0	4.52995E-3	9.49144E-2	2.72986E1	-3.26868E1	-3.26307E1	2.68528E1	1.20055E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.01223E-1