[Scan]
initial_time=2016-01-18T21:17:14
final_time=2016-01-18T21:17:34
ip_count=19
run=1024
dataset=8
scan=581
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.1768E-1
ql1_imon=1.375E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.965E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.67928E-10
ql4_vset=
ql4_vmon=-9.14278E0
ql4_imon=-1.25694E-10
mult1=-9.40325E-9
mult2=-2.7226E-9
rf_tmon=-6.15268E-3
rf_agc=3.17053E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.70041E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.59904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19616E1
lens5a_imon=2.01371E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=3.16146E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=1.10815E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39239E0
lens1_imon=2.66753E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03534E1
cs_ea2_imon=1.33562E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.04397E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.28049E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.28049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=2.40413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=9.51334E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.30108E-8
tplens_vset=1.4E-1
tplens_vmon=1.66607E0
tplens_imon=-3.78655E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.50289E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.5494E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98104E-4
ql6_vset=1.0E-1
ql6_vmon=9.46045E-2
ql6_imon=4.04621E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29295E0
ionrepsh_imon=8.64815E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50565E0
os_ea2_imon=-9.26608E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00799E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.17695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04315E0
os_ef2alow_imon=-2.42849E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.4231E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.09829E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73231E1
iondef1_imon=1.10563E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68406E1
iondef4_imon=1.11513E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.92461E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.58339E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-9.61679E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47489E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55774E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-7.31025E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82668E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.5919E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.06557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44367E0
defgridb_imon=6.00932E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33231E1
os_fil1_imon=9.40924E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07251E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64187E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=8.10989E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.23313E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.29897E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75356E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2236E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=2.99845E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82718E-1
res40_imon=-2.30956E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.17299E-1	-7.98488E-1	-9.1316E0	-9.14261E0	4.69685E-3	9.47714E-2	2.73358E1	-3.26596E1	-3.26178E1	2.68214E1	1.20174E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01609E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.17442E-1	-7.98368E-1	-9.13143E0	-9.1423E0	4.43459E-3	9.49621E-2	2.73228E1	-3.26542E1	-3.2634E1	2.6825E1	1.198E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.17323E-1	-7.98416E-1	-9.13153E0	-9.14216E0	4.74453E-3	9.46999E-2	2.72974E1	-3.26307E1	-3.25841E1	2.67992E1	1.20137E-7	2.52362E-3	2.52362E-3	6.32978E-3	3.0201E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.17537E-1	-7.9844E-1	-9.13203E0	-9.14254E0	4.60148E-3	9.4676E-2	2.7308E1	-3.26712E1	-3.26446E1	2.68473E1	1.20311E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.17275E-1	-7.98464E-1	-9.13188E0	-9.14235E0	4.48227E-3	9.47475E-2	2.73076E1	-3.26479E1	-3.26067E1	2.6875E1	1.19941E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.02368E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.17323E-1	-7.98631E-1	-9.13141E0	-9.14218E0	4.41074E-3	9.47952E-2	2.73287E1	-3.26596E1	-3.26384E1	2.68366E1	1.19991E-7	2.51384E-3	2.51384E-3	6.3245E-3	3.00794E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.17418E-1	-7.98678E-1	-9.1316E0	-9.14299E0	4.3869E-3	9.47237E-2	2.72949E1	-3.26639E1	-3.26188E1	2.67932E1	1.19697E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.17561E-1	-7.98941E-1	-9.1315E0	-9.1423E0	4.45843E-3	9.46999E-2	2.72951E1	-3.26608E1	-3.26455E1	2.68783E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17394E-1	-7.98464E-1	-9.13174E0	-9.14285E0	4.05312E-3	9.4676E-2	2.73236E1	-3.26517E1	-3.26126E1	2.68986E1	1.20311E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.17633E-1	-7.98321E-1	-9.13193E0	-9.14226E0	4.43459E-3	9.49383E-2	2.73159E1	-3.25984E1	-3.26296E1	2.68117E1	1.20064E-7	2.51752E-3	2.51752E-3	6.29721E-3	3.00149E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.17513E-1	-7.98535E-1	-9.13169E0	-9.14249E0	4.45843E-3	9.48191E-2	2.73526E1	-3.26302E1	-3.26104E1	2.68001E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.1737E-1	-7.98368E-1	-9.13179E0	-9.14271E0	4.3869E-3	9.43899E-2	2.73517E1	-3.26915E1	-3.2613E1	2.68372E1	1.19861E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.17657E-1	-7.98297E-1	-9.13165E0	-9.14259E0	4.26769E-3	9.43184E-2	2.73351E1	-3.26783E1	-3.26074E1	2.68532E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.17323E-1	-7.98607E-1	-9.13174E0	-9.14259E0	4.33922E-3	9.48906E-2	2.73128E1	-3.26579E1	-3.26189E1	2.684E1	1.19861E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.01085E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.17251E-1	-7.98488E-1	-9.13184E0	-9.14221E0	4.64916E-3	9.49383E-2	2.73192E1	-3.26487E1	-3.26266E1	2.68394E1	1.19941E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.01104E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.17394E-1	-7.98702E-1	-9.13162E0	-9.1424E0	4.81606E-3	9.48191E-2	2.7308E1	-3.26626E1	-3.26242E1	2.68653E1	1.20031E-7	2.51136E-3	2.51136E-3	6.32418E-3	3.0041E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.17561E-1	-7.98559E-1	-9.13136E0	-9.14271E0	4.81606E-3	9.50098E-2	2.73363E1	-3.26494E1	-3.2632E1	2.68076E1	1.20106E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17394E-1	-7.98535E-1	-9.13153E0	-9.14261E0	4.79221E-3	9.46999E-2	2.73145E1	-3.26974E1	-3.26089E1	2.6807E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.17704E-1	-7.9844E-1	-9.13146E0	-9.14288E0	4.72069E-3	9.48429E-2	2.73671E1	-3.26532E1	-3.26527E1	2.68435E1	1.198E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.1768E-1	-7.98464E-1	-9.1315E0	-9.14278E0	4.86374E-3	9.46045E-2	2.73231E1	-3.26609E1	-3.25996E1	2.68406E1	1.19891E-7	2.51814E-3	2.51814E-3	6.32858E-3	2.99845E-1