[Scan]
initial_time=2016-01-18T21:18:08
final_time=2016-01-18T21:18:27
ip_count=19
run=1024
dataset=8
scan=583
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08716E-4
ql1_vset=
ql1_vmon=-8.17418E-1
ql1_imon=1.37825E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.97468E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=3.79467E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-1.46961E-10
mult1=-1.04508E-8
mult2=-2.75454E-9
rf_tmon=-3.77341E-3
rf_agc=3.38743E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.63723E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68273E0
bslens_imon=2.82995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19494E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=3.16002E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02401E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=1.06591E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36312E0
lens1_imon=2.9149E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03478E1
cs_ea2_imon=1.3434E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.04865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.28463E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=4.26499E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15134E1
os_ea1_imon=2.40983E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.09911E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20137E0
cs_ionrep_imon=9.40263E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91975E2
cs_nozzle_imon=1.933E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02121E1
cs_anode1_imon=1.94584E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.28872E-8
tplens_vset=1.4E-1
tplens_vmon=1.66739E0
tplens_imon=-1.82087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.48852E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.59682E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98272E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=4.01583E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.35002E0
ionrepsh_imon=8.18154E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33575E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.15497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53053E0
os_ea2_imon=-7.90865E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00786E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26856E-1
os_ef2bup_imon=-5.10624E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.42274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22987E2
cs_ionfoca_imon=6.28265E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69127E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.9082E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.60164E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-8.3554E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02032E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55486E1
einzel_imon=7.88966E-6
window_vset=0.0E0
window_vmon=2.696E-1
window_imon=-7.09401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39315E-4
mask2_vset=0.0E0
mask2_vmon=-1.86879E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.35331E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.77639E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.96044E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58273E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33234E1
os_fil1_imon=9.42048E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0778E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64358E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=6.50012E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.14903E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66632E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.33227E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.64812E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-1.98722E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38249E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22229E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.81226E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.1749E-1	-7.9844E-1	-9.13148E0	-9.14202E0	4.24385E-3	9.51052E-2	2.73316E1	-3.26933E1	-3.25983E1	2.68661E1	1.20106E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.03027E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.17466E-1	-7.98392E-1	-9.13157E0	-9.14218E0	4.45843E-3	9.46999E-2	2.73486E1	-3.26432E1	-3.26303E1	2.67966E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.17466E-1	-7.98678E-1	-9.13177E0	-9.14257E0	4.45843E-3	9.5129E-2	2.73375E1	-3.2659E1	-3.26249E1	2.68064E1	1.19978E-7	2.52362E-3	2.52362E-3	6.3074E-3	3.00942E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.17323E-1	-7.98607E-1	-9.1316E0	-9.14249E0	4.14848E-3	9.52244E-2	2.73321E1	-3.26681E1	-3.25821E1	2.68322E1	1.19891E-7	2.51603E-3	2.51603E-3	6.29684E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.17442E-1	-7.98535E-1	-9.13167E0	-9.14285E0	4.36306E-3	9.52005E-2	2.73381E1	-3.26699E1	-3.26218E1	2.6825E1	1.20174E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.17394E-1	-7.98726E-1	-9.13184E0	-9.14295E0	4.673E-3	9.49383E-2	2.73105E1	-3.26663E1	-3.26176E1	2.68538E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17204E-1	-7.98917E-1	-9.13177E0	-9.14252E0	4.48227E-3	9.48429E-2	2.73117E1	-3.26663E1	-3.25629E1	2.68346E1	1.19965E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.17299E-1	-7.98512E-1	-9.13169E0	-9.14237E0	4.29153E-3	9.50575E-2	2.72703E1	-3.2675E1	-3.26284E1	2.6843E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.96671E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.1706E-1	-7.98559E-1	-9.13172E0	-9.14257E0	4.07696E-3	9.49144E-2	2.73231E1	-3.26795E1	-3.25906E1	2.68208E1	1.20004E-7	2.52599E-3	2.52599E-3	6.31278E-3	2.9892E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.1718E-1	-7.98702E-1	-9.13169E0	-9.14242E0	4.33922E-3	9.49144E-2	2.73231E1	-3.26326E1	-3.26212E1	2.6834E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.97187E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.16965E-1	-7.98631E-1	-9.13172E0	-9.14261E0	4.64916E-3	9.47952E-2	2.73589E1	-3.26442E1	-3.26545E1	2.67929E1	1.20122E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00041E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.17394E-1	-7.98583E-1	-9.13172E0	-9.14266E0	4.3869E-3	9.50813E-2	2.72613E1	-3.27098E1	-3.26139E1	2.67817E1	1.2003E-7	2.52154E-3	2.52154E-3	6.29098E-3	2.9965E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.17537E-1	-7.9844E-1	-9.13177E0	-9.14242E0	4.33922E-3	9.53436E-2	2.73472E1	-3.26626E1	-3.26239E1	2.69034E1	1.19927E-7	2.52572E-3	2.52572E-3	6.3074E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-8.1737E-1	-7.98655E-1	-9.13184E0	-9.14223E0	4.3869E-3	9.51052E-2	2.73231E1	-3.26771E1	-3.26104E1	2.68024E1	1.20126E-7	2.51404E-3	2.51404E-3	6.33264E-3	2.99061E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.17847E-1	-7.98464E-1	-9.13188E0	-9.14226E0	4.3869E-3	9.5439E-2	2.73327E1	-3.26801E1	-3.26518E1	2.6828E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.17585E-1	-7.98535E-1	-9.13193E0	-9.14218E0	4.50611E-3	9.50336E-2	2.72955E1	-3.26374E1	-3.25978E1	2.67644E1	1.20017E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.9952E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.178E-1	-7.98249E-1	-9.13191E0	-9.14233E0	4.48227E-3	9.5129E-2	2.73273E1	-3.26693E1	-3.26128E1	2.68286E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3514E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.17132E-1	-7.98392E-1	-9.13165E0	-9.14278E0	4.60148E-3	9.50575E-2	2.73213E1	-3.26637E1	-3.26411E1	2.6774E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.99E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.1737E-1	-7.98082E-1	-9.13162E0	-9.14226E0	4.8399E-3	9.49383E-2	2.73311E1	-3.2649E1	-3.26496E1	2.6814E1	1.20142E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.17418E-1	-7.98249E-1	-9.1316E0	-9.14218E0	4.64916E-3	9.48429E-2	2.73105E1	-3.26675E1	-3.26152E1	2.69127E1	1.19902E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00453E-1