[Scan]
initial_time=2016-01-18T21:18:34
final_time=2016-01-18T21:18:54
ip_count=19
run=1024
dataset=8
scan=584
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.17275E-1
ql1_imon=1.38573E-8
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=2.02465E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=3.81041E-10
ql4_vset=
ql4_vmon=-9.14252E0
ql4_imon=-1.52195E-10
mult1=-9.921E-9
mult2=-2.98409E-9
rf_tmon=-5.2214E-3
rf_agc=3.30752E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.66072E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66728E0
bslens_imon=2.66794E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19994E1
lens5a_imon=2.01035E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05052E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.17227E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02444E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04253E1
cs_ea1_imon=1.09138E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38235E0
lens1_imon=2.83322E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65155E1
os_ef1alow_imon=2.95495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04137E1
cs_ea2_imon=1.37419E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84112E1
cs_ef1a_imon=3.05226E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.2831E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14945E1
os_ea1_imon=2.38316E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64134E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22149E0
cs_ionrep_imon=9.74208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93607E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01509E1
cs_anode1_imon=1.96927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.28713E-8
tplens_vset=1.4E-1
tplens_vmon=1.66714E0
tplens_imon=-3.40225E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.52185E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.56629E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98232E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.05859E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29066E0
ionrepsh_imon=8.62917E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.16205E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49574E0
os_ea2_imon=-3.51244E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.09903E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11051E1
os_restr2_imon=3.40833E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.26916E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.0936E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.12664E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6911E1
iondef4_imon=1.10575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.89161E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.58109E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15657E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02042E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56651E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.62392E-1
window_imon=-5.61639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86777E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.6338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.71555E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.171E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43113E0
defgridb_imon=6.02503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33248E1
os_fil1_imon=9.42462E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07389E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64201E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31848E1
cs_fil1_imon=7.67141E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.05366E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67008E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.27755E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19939E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.85641E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.01125E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2246E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.64408E-1
res40_imon=-2.21586E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.17227E-1	-7.98297E-1	-9.1321E0	-9.14245E0	4.26769E-3	9.48668E-2	2.73405E1	-3.26921E1	-3.26231E1	2.69645E1	1.19978E-7	2.52139E-3	2.52139E-3	6.29624E-3	2.99879E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.17323E-1	-7.98512E-1	-9.13198E0	-9.1424E0	4.43459E-3	9.49383E-2	2.73259E1	-3.26805E1	-3.25948E1	2.68786E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.17323E-1	-7.98464E-1	-9.13136E0	-9.14264E0	4.14848E-3	9.48429E-2	2.73148E1	-3.26283E1	-3.26271E1	2.68134E1	1.20457E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.99348E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.1718E-1	-7.98368E-1	-9.13184E0	-9.14221E0	4.07696E-3	9.48668E-2	2.73198E1	-3.26909E1	-3.25874E1	2.69632E1	1.20177E-7	2.51265E-3	2.51265E-3	6.3282E-3	3.01237E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.1749E-1	-7.98655E-1	-9.13179E0	-9.14228E0	4.41074E-3	9.49144E-2	2.73582E1	-3.26183E1	-3.26425E1	2.67651E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17657E-1	-7.98631E-1	-9.13165E0	-9.1423E0	4.45843E-3	9.48668E-2	2.73088E1	-3.26591E1	-3.26168E1	2.67745E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09309E0	-8.17513E-1	-7.98512E-1	-9.13143E0	-9.14218E0	4.31538E-3	9.50336E-2	2.7321E1	-3.26272E1	-3.26119E1	2.68797E1	1.20244E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.02277E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09348E0	-8.178E-1	-7.98678E-1	-9.1315E0	-9.14245E0	4.43459E-3	9.4986E-2	2.7301E1	-3.26785E1	-3.25918E1	2.67688E1	1.19953E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.03286E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09317E0	-8.1768E-1	-7.98607E-1	-9.13172E0	-9.14259E0	4.50611E-3	9.4986E-2	2.72859E1	-3.26458E1	-3.2632E1	2.69337E1	1.20106E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.02769E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09333E0	-8.17466E-1	-7.9813E-1	-9.13157E0	-9.14257E0	4.69685E-3	9.52244E-2	2.73249E1	-3.27318E1	-3.26182E1	2.67722E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.17299E-1	-7.98297E-1	-9.13181E0	-9.14242E0	4.52995E-3	9.50336E-2	2.73411E1	-3.26879E1	-3.2635E1	2.69421E1	1.20278E-7	2.52867E-3	2.52867E-3	6.31837E-3	2.9978E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.17394E-1	-7.98631E-1	-9.13181E0	-9.14266E0	4.62532E-3	9.47952E-2	2.73327E1	-3.26759E1	-3.26242E1	2.68262E1	1.20017E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.17418E-1	-7.98559E-1	-9.13191E0	-9.14261E0	4.55379E-3	9.48668E-2	2.73171E1	-3.26705E1	-3.26188E1	2.66863E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.99941E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.17466E-1	-7.98631E-1	-9.13167E0	-9.14252E0	4.3869E-3	9.52244E-2	2.73207E1	-3.26891E1	-3.25996E1	2.68773E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.17227E-1	-7.9844E-1	-9.13198E0	-9.14268E0	4.45843E-3	9.51767E-2	2.7334E1	-3.2639E1	-3.26372E1	2.66501E1	1.19872E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.97762E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.17442E-1	-7.98774E-1	-9.13179E0	-9.14233E0	4.43459E-3	9.52721E-2	2.73228E1	-3.26413E1	-3.26408E1	2.67866E1	1.20192E-7	2.51287E-3	2.51287E-3	6.31269E-3	2.99845E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.17299E-1	-7.98178E-1	-9.13186E0	-9.14302E0	4.45843E-3	9.51767E-2	2.73123E1	-3.26452E1	-3.2623E1	2.68508E1	1.20226E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.17442E-1	-7.98273E-1	-9.13169E0	-9.14223E0	4.3869E-3	9.50336E-2	2.73429E1	-3.26855E1	-3.262E1	2.69157E1	1.19601E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.17251E-1	-7.98535E-1	-9.13167E0	-9.14264E0	4.36306E-3	9.48906E-2	2.73393E1	-3.26602E1	-3.26042E1	2.67498E1	1.19653E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.17275E-1	-7.98368E-1	-9.13155E0	-9.14252E0	4.60148E-3	9.48906E-2	2.73369E1	-3.26543E1	-3.26549E1	2.6911E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1