[Scan]
initial_time=2016-01-18T21:19:01
final_time=2016-01-18T21:19:20
ip_count=19
run=1024
dataset=8
scan=585
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08733E-4
ql1_vset=
ql1_vmon=-8.17609E-1
ql1_imon=1.37587E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=1.9617E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=3.54052E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-1.17266E-10
mult1=-9.72397E-9
mult2=-2.8918E-9
rf_tmon=-3.1586E-3
rf_agc=3.42235E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.71754E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=2.01263E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54253E1
cs_ef1b_imon=3.16542E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02381E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04796E1
cs_ea1_imon=1.12581E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39479E0
lens1_imon=2.72521E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.36302E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.04325E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.28105E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.2686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14831E1
os_ea1_imon=2.38502E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63359E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=9.75487E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=1.95161E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.29106E-8
tplens_vset=1.4E-1
tplens_vmon=1.65285E0
tplens_imon=-1.33518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.5548E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98231E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.03568E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=8.57244E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48522E0
os_ea2_imon=-7.2473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00875E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70891E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.29154E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.40725E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.30505E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.09072E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.10851E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.11296E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.94065E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.58174E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-7.45441E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57054E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.67197E-1
window_imon=-8.28332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-4.1748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.73249E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.58972E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.15209E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29931E0
defgridb_imon=6.11387E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33238E1
os_fil1_imon=9.42192E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07533E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64055E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31822E1
cs_fil1_imon=8.85471E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.29319E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6673E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.28607E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75743E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22243E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.16355E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.17204E-1	-7.98321E-1	-9.1315E0	-9.14218E0	4.52995E-3	9.51529E-2	2.7326E1	-3.26266E1	-3.26098E1	2.67995E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00824E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.1737E-1	-7.98559E-1	-9.13177E0	-9.1423E0	4.62532E-3	9.51529E-2	2.73094E1	-3.26701E1	-3.26278E1	2.68022E1	1.19953E-7	2.51847E-3	2.51847E-3	6.2752E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.1749E-1	-7.98345E-1	-9.13169E0	-9.14223E0	4.52995E-3	9.5129E-2	2.73109E1	-3.26469E1	-3.26538E1	2.69031E1	1.20069E-7	2.52209E-3	2.52209E-3	6.29098E-3	2.97704E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.1749E-1	-7.98368E-1	-9.13188E0	-9.1424E0	4.93526E-3	9.50336E-2	2.7309E1	-3.26394E1	-3.2579E1	2.68457E1	1.19736E-7	2.51537E-3	2.51537E-3	6.33365E-3	2.99425E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.1749E-1	-7.98392E-1	-9.13174E0	-9.14211E0	4.36306E-3	9.49621E-2	2.73148E1	-3.26818E1	-3.26228E1	2.6814E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17347E-1	-7.9875E-1	-9.13153E0	-9.14204E0	4.72069E-3	9.53197E-2	2.73351E1	-3.26903E1	-3.26218E1	2.68644E1	1.20076E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.17394E-1	-7.98726E-1	-9.13177E0	-9.14254E0	4.81606E-3	9.52005E-2	2.73279E1	-3.26717E1	-3.26302E1	2.67337E1	1.19953E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.17108E-1	-7.99131E-1	-9.13174E0	-9.14266E0	4.88758E-3	9.51767E-2	2.73195E1	-3.26404E1	-3.26158E1	2.69415E1	1.20137E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.17442E-1	-7.98893E-1	-9.13136E0	-9.14254E0	4.57764E-3	9.50813E-2	2.73404E1	-3.26294E1	-3.26106E1	2.68267E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09225E0	-8.17466E-1	-7.98631E-1	-9.13157E0	-9.14295E0	4.36306E-3	9.51529E-2	2.73399E1	-3.26603E1	-3.25713E1	2.67511E1	1.20042E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.99343E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09286E0	-8.17633E-1	-7.98678E-1	-9.13146E0	-9.14276E0	4.45843E-3	9.5129E-2	2.73375E1	-3.26685E1	-3.26024E1	2.69055E1	1.20278E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-8.17537E-1	-7.98869E-1	-9.13188E0	-9.14283E0	4.52995E-3	9.48668E-2	2.7321E1	-3.26701E1	-3.26113E1	2.67896E1	1.19851E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01995E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.17442E-1	-7.98774E-1	-9.13177E0	-9.14249E0	4.57764E-3	9.52959E-2	2.73033E1	-3.26425E1	-3.2626E1	2.68382E1	1.20297E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.0041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09294E0	-8.17394E-1	-7.98702E-1	-9.13172E0	-9.14254E0	4.48227E-3	9.51052E-2	2.73131E1	-3.26823E1	-3.26297E1	2.68821E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00966E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09317E0	-8.1768E-1	-7.98702E-1	-9.13177E0	-9.14226E0	4.43459E-3	9.51767E-2	2.73261E1	-3.26344E1	-3.26224E1	2.67914E1	1.19653E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.02133E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.17585E-1	-7.98821E-1	-9.13165E0	-9.14226E0	4.57764E-3	9.52959E-2	2.73279E1	-3.27173E1	-3.26374E1	2.68106E1	1.20244E-7	2.52139E-3	2.52139E-3	6.29067E-3	3.00144E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09333E0	-8.17704E-1	-7.98559E-1	-9.13157E0	-9.14245E0	4.52995E-3	9.52721E-2	2.7324E1	-3.26596E1	-3.26095E1	2.68917E1	1.19705E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.18229E-1	-7.98869E-1	-9.13162E0	-9.14257E0	4.673E-3	9.55105E-2	2.73321E1	-3.26494E1	-3.26458E1	2.67868E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.17847E-1	-7.98678E-1	-9.13167E0	-9.14271E0	4.8399E-3	9.54628E-2	2.72973E1	-3.26543E1	-3.26392E1	2.69686E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-8.17609E-1	-7.98988E-1	-9.13165E0	-9.14283E0	4.91142E-3	9.51052E-2	2.7321E1	-3.26655E1	-3.26248E1	2.68046E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01995E-1