[Scan]
initial_time=2016-01-18T21:19:54
final_time=2016-01-18T21:20:14
ip_count=19
run=1024
dataset=8
scan=587
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.17347E-1
ql1_imon=1.37689E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=1.97092E-9
ql3_vset=
ql3_vmon=-9.13188E0
ql3_imon=2.9043E-10
ql4_vset=
ql4_vmon=-9.14259E0
ql4_imon=-1.51384E-10
mult1=-1.02914E-8
mult2=-2.74873E-9
rf_tmon=-4.74544E-3
rf_agc=3.35038E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.66903E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66643E0
bslens_imon=2.62241E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19443E1
lens5a_imon=1.99277E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04993E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54033E1
cs_ef1b_imon=3.16354E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02252E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=1.0926E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39046E0
lens1_imon=2.82379E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64815E1
os_ef1alow_imon=2.97631E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03606E1
cs_ea2_imon=1.36245E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84355E1
cs_ef1a_imon=3.04007E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.27584E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11392E1
os_restr1_imon=4.28191E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.39519E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63568E1
os_ef1bup_imon=3.081E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2342E0
cs_ionrep_imon=9.52975E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93511E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01882E1
cs_anode1_imon=1.96499E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.28794E-8
tplens_vset=1.4E-1
tplens_vmon=1.68954E0
tplens_imon=-3.51307E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25965E1
iondef3_imon=1.51449E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2688E1
iondef2_imon=1.58934E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.04338E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27224E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33433E1
lens5b_imon=2.16696E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74557E1
cs_ef2b_imon=3.14106E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50103E0
os_ea2_imon=-6.19814E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00676E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71207E1
cs_ef2a_imon=3.1716E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0842E0
os_ef2alow_imon=-2.45223E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07117E-1
os_ef2bup_imon=-5.14663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11314E1
os_restr2_imon=3.41084E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.29324E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01854E1
cs_anode2_imon=2.08914E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73169E1
iondef1_imon=1.09595E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68773E1
iondef4_imon=1.09829E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.89687E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.55574E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13573E0
cs_ionaccel_imon=-8.38274E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56925E1
einzel_imon=7.7583E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-6.57082E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-6.26883E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.57636E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.48219E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.18031E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59031E0
defgridb_imon=6.23718E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33234E1
os_fil1_imon=9.41525E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07743E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63966E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3182E1
cs_fil1_imon=6.94668E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.25632E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6655E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26917E-2
os_fil2_imon=-2.54915E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07014E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.94286E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28687E-1
cs_fil2_imon=-2.52678E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24806E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22252E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.48501E-1
res40_imon=-2.37841E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.17561E-1	-7.98106E-1	-9.13203E0	-9.14285E0	4.26769E-3	9.48429E-2	2.73145E1	-3.26578E1	-3.26235E1	2.68974E1	1.20078E-7	2.51679E-3	2.51679E-3	6.3074E-3	2.99506E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.17394E-1	-7.98154E-1	-9.13186E0	-9.14268E0	4.45843E-3	9.48668E-2	2.73333E1	-3.26897E1	-3.26346E1	2.68225E1	1.19766E-7	2.52027E-3	2.52027E-3	6.35223E-3	3.0201E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.17394E-1	-7.97915E-1	-9.13141E0	-9.14271E0	4.52995E-3	9.44614E-2	2.73488E1	-3.26856E1	-3.26219E1	2.69142E1	1.19991E-7	2.51952E-3	2.51952E-3	6.31879E-3	3.03246E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.17394E-1	-7.98154E-1	-9.13167E0	-9.14283E0	4.41074E-3	9.46283E-2	2.73346E1	-3.26567E1	-3.26388E1	2.66559E1	1.19991E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.03383E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.17609E-1	-7.98249E-1	-9.13174E0	-9.14257E0	4.07696E-3	9.48668E-2	2.73309E1	-3.26723E1	-3.26134E1	2.66556E1	1.19851E-7	2.52276E-3	2.52276E-3	6.29128E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.1749E-1	-7.98464E-1	-9.13172E0	-9.14276E0	4.07696E-3	9.51052E-2	2.73213E1	-3.26621E1	-3.26368E1	2.66622E1	1.20069E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.04505E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.17752E-1	-7.98416E-1	-9.13153E0	-9.14297E0	4.43459E-3	9.5129E-2	2.73219E1	-3.26536E1	-3.26176E1	2.6655E1	1.20226E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.03185E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.17728E-1	-7.98678E-1	-9.13188E0	-9.14247E0	4.45843E-3	9.49383E-2	2.72909E1	-3.26325E1	-3.26319E1	2.69265E1	1.2026E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.1749E-1	-7.98535E-1	-9.13169E0	-9.14285E0	4.62532E-3	9.48429E-2	2.73205E1	-3.2634E1	-3.26388E1	2.67857E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.17466E-1	-7.9844E-1	-9.13212E0	-9.14264E0	4.43459E-3	9.46283E-2	2.72829E1	-3.26314E1	-3.26008E1	2.6807E1	1.19878E-7	2.51545E-3	2.51545E-3	6.3074E-3	2.97529E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.1706E-1	-7.98655E-1	-9.132E0	-9.14233E0	4.72069E-3	9.48191E-2	2.73141E1	-3.26446E1	-3.26176E1	2.6831E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.17037E-1	-7.98631E-1	-9.13212E0	-9.14221E0	4.91142E-3	9.51052E-2	2.7334E1	-3.26809E1	-3.26195E1	2.66682E1	1.19549E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.17156E-1	-7.98726E-1	-9.1321E0	-9.1423E0	4.57764E-3	9.5129E-2	2.73173E1	-3.26682E1	-3.26162E1	2.67379E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.17275E-1	-7.9875E-1	-9.13184E0	-9.14221E0	4.86374E-3	9.48906E-2	2.73429E1	-3.26512E1	-3.2611E1	2.67637E1	1.20137E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.03081E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.17299E-1	-7.98678E-1	-9.13198E0	-9.14264E0	4.673E-3	9.47237E-2	2.73039E1	-3.26669E1	-3.26356E1	2.66737E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.17227E-1	-7.98416E-1	-9.13179E0	-9.14264E0	4.55379E-3	9.4986E-2	2.73198E1	-3.26685E1	-3.26136E1	2.66604E1	1.20209E-7	2.52707E-3	2.52707E-3	6.31278E-3	2.99175E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.1737E-1	-7.9844E-1	-9.13177E0	-9.14261E0	4.48227E-3	9.51529E-2	2.73345E1	-3.2675E1	-3.26138E1	2.69127E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.17537E-1	-7.98655E-1	-9.13212E0	-9.14266E0	4.60148E-3	9.5129E-2	2.73283E1	-3.26301E1	-3.2622E1	2.67097E1	1.19861E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.17347E-1	-7.98559E-1	-9.13205E0	-9.14257E0	4.81606E-3	9.49144E-2	2.73231E1	-3.26879E1	-3.26242E1	2.66328E1	1.20092E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.99343E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.17347E-1	-7.98345E-1	-9.13188E0	-9.14259E0	4.74453E-3	9.51052E-2	2.73169E1	-3.2688E1	-3.25965E1	2.68773E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9978E-1