[Scan]
initial_time=2016-01-18T21:20:48
final_time=2016-01-18T21:21:07
ip_count=19
run=1024
dataset=8
scan=589
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.17418E-1
ql1_imon=1.38051E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.9968E-9
ql3_vset=
ql3_vmon=-9.13208E0
ql3_imon=3.11029E-10
ql4_vset=
ql4_vmon=-9.14254E0
ql4_imon=-9.1958E-11
mult1=-1.00077E-8
mult2=-2.68994E-9
rf_tmon=-4.01396E-3
rf_agc=3.44004E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.7296E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=2.00182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=3.15749E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04513E1
cs_ea1_imon=1.08364E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39119E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.99856E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.35184E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8404E1
cs_ef1a_imon=3.07172E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.27864E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11003E1
os_restr1_imon=4.26103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1566E1
os_ea1_imon=2.40089E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6402E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=9.43763E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93607E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02073E1
cs_anode1_imon=1.97251E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.27395E-8
tplens_vset=1.4E-1
tplens_vmon=1.67929E0
tplens_imon=-2.63296E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.51299E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.56021E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98158E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.02493E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=8.47151E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49784E0
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00774E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.16506E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04074E0
os_ef2alow_imon=-2.33479E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.09543E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=3.40869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.1109E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73322E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.98551E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.57349E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.186E0
cs_ionaccel_imon=-8.21124E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47626E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56838E1
einzel_imon=7.81758E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-7.38233E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82681E2
mask1_imon=2.39315E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.38281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.46212E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33269E1
os_fil1_imon=9.43681E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07858E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63866E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31823E1
cs_fil1_imon=6.98065E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.47029E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66575E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.38925E-2
os_fil2_imon=-2.79811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.06034E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.04729E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22182E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.90837E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=186
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.17251E-1	-7.98655E-1	-9.13193E0	-9.14242E0	4.41074E-3	9.49621E-2	2.73305E1	-3.26661E1	-3.26142E1	2.68163E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98481E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.17251E-1	-7.98702E-1	-9.13179E0	-9.14276E0	4.55379E-3	9.48906E-2	2.73496E1	-3.26675E1	-3.2605E1	2.68268E1	1.19902E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16917E-1	-7.9875E-1	-9.13146E0	-9.14237E0	4.62532E-3	9.4986E-2	2.73508E1	-3.26705E1	-3.26068E1	2.68334E1	1.20122E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01085E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16917E-1	-7.98893E-1	-9.13167E0	-9.14266E0	4.673E-3	9.48191E-2	2.72939E1	-3.26762E1	-3.26331E1	2.68424E1	1.20004E-7	2.51417E-3	2.51417E-3	6.28592E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16798E-1	-7.98607E-1	-9.1315E0	-9.14242E0	4.48227E-3	9.50813E-2	2.73151E1	-3.2682E1	-3.26313E1	2.68328E1	1.19953E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.17084E-1	-7.98678E-1	-9.1315E0	-9.14273E0	4.41074E-3	9.49383E-2	2.73237E1	-3.26332E1	-3.26248E1	2.67794E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.1718E-1	-7.9875E-1	-9.13165E0	-9.14276E0	4.33922E-3	9.52005E-2	2.73299E1	-3.26496E1	-3.26231E1	2.69259E1	1.19809E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.1749E-1	-7.9875E-1	-9.13196E0	-9.14278E0	4.45843E-3	9.50813E-2	2.73289E1	-3.26463E1	-3.26052E1	2.68238E1	1.19965E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.17442E-1	-7.98464E-1	-9.1315E0	-9.14264E0	4.41074E-3	9.48429E-2	2.73099E1	-3.26789E1	-3.2611E1	2.67475E1	1.19891E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.00348E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.17847E-1	-7.98559E-1	-9.1315E0	-9.14276E0	4.57764E-3	9.50813E-2	2.73228E1	-3.26523E1	-3.26738E1	2.69073E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.17156E-1	-7.98345E-1	-9.13157E0	-9.14268E0	4.43459E-3	9.48429E-2	2.73228E1	-3.26673E1	-3.26366E1	2.6786E1	1.20031E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.0201E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17466E-1	-7.98488E-1	-9.13153E0	-9.14252E0	4.74453E-3	9.52959E-2	2.73261E1	-3.26639E1	-3.2632E1	2.69304E1	1.19953E-7	2.52276E-3	2.52276E-3	6.29128E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.17108E-1	-7.97892E-1	-9.13169E0	-9.14254E0	4.8399E-3	9.50336E-2	2.73351E1	-3.27111E1	-3.25954E1	2.67309E1	1.19749E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9892E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.17251E-1	-7.98249E-1	-9.13169E0	-9.14235E0	5.03063E-3	9.50575E-2	2.73236E1	-3.26544E1	-3.2593E1	2.68603E1	1.19819E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.01209E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.17776E-1	-7.98321E-1	-9.13191E0	-9.14223E0	4.91142E-3	9.48191E-2	2.73565E1	-3.2656E1	-3.26119E1	2.68304E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.17776E-1	-7.98464E-1	-9.13198E0	-9.14233E0	4.57764E-3	9.48906E-2	2.7324E1	-3.26803E1	-3.26089E1	2.68436E1	1.20226E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00563E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.17251E-1	-7.98726E-1	-9.13222E0	-9.14283E0	4.48227E-3	9.51052E-2	2.73135E1	-3.26699E1	-3.2635E1	2.67902E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.1737E-1	-7.98464E-1	-9.13212E0	-9.14252E0	4.41074E-3	9.48668E-2	2.73252E1	-3.26773E1	-3.26301E1	2.67989E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01995E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.17251E-1	-7.98512E-1	-9.13188E0	-9.14254E0	4.52995E-3	9.4986E-2	2.73145E1	-3.26508E1	-3.26408E1	2.69476E1	1.198E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.17418E-1	-7.98535E-1	-9.13208E0	-9.14254E0	4.48227E-3	9.49144E-2	2.73322E1	-3.26602E1	-3.26254E1	2.681E1	1.19953E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01223E-1