[Scan]
initial_time=2016-01-18T21:21:41
final_time=2016-01-18T21:22:00
ip_count=19
run=1024
dataset=8
scan=591
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09263E0
qbias_imon=-1.0886E-4
ql1_vset=
ql1_vmon=-8.17037E-1
ql1_imon=1.38047E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.98497E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=2.87783E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=-1.41394E-10
mult1=-1.02702E-8
mult2=-2.90425E-9
rf_tmon=-4.72872E-3
rf_agc=3.33877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.68271E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66535E0
bslens_imon=2.49616E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19008E1
lens5a_imon=1.97729E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05063E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=3.1588E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02364E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04607E1
cs_ea1_imon=1.10203E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39003E0
lens1_imon=2.48867E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64665E1
os_ef1alow_imon=2.98813E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03721E1
cs_ea2_imon=1.36296E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.04165E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.27692E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11398E1
os_restr1_imon=4.26997E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15325E1
os_ea1_imon=2.39133E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63511E1
os_ef1bup_imon=3.09031E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22215E0
cs_ionrep_imon=9.23465E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93678E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0179E1
cs_anode1_imon=1.95855E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.28827E-8
tplens_vset=1.4E-1
tplens_vmon=1.68261E0
tplens_imon=-1.05649E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26458E1
iondef3_imon=1.49137E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.57036E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98207E-4
ql6_vset=1.0E-1
ql6_vmon=9.48668E-2
ql6_imon=4.04342E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27082E0
ionrepsh_imon=8.40357E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33714E1
lens5b_imon=2.17682E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.13859E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50978E0
os_ea2_imon=-7.23344E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00705E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.17601E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06204E0
os_ef2alow_imon=-2.44707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15721E-1
os_ef2bup_imon=-5.14921E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11273E1
os_restr2_imon=3.4219E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.28019E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.08692E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.12487E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67824E1
iondef4_imon=1.1E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.89271E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.58672E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12016E0
cs_ionaccel_imon=-9.05124E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47533E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56505E1
einzel_imon=7.74024E-6
window_vset=0.0E0
window_vmon=2.55023E-1
window_imon=-7.74134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82662E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86369E1
mask2_imon=-5.87005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.7709E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.8013E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.38531E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42123E0
defgridb_imon=6.11997E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.42027E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08658E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64022E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=7.5485E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40732E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66723E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10799E-2
os_fil2_imon=-2.35062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09681E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.994E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5479E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22385E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19266E-1
res40_imon=-2.42835E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.17132E-1	-7.98559E-1	-9.13157E0	-9.14285E0	4.48227E-3	9.54151E-2	2.72915E1	-3.26803E1	-3.26225E1	2.69261E1	1.19872E-7	2.51136E-3	2.51136E-3	6.31858E-3	2.98819E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.17323E-1	-7.98559E-1	-9.13155E0	-9.14283E0	4.48227E-3	9.51052E-2	2.73334E1	-3.26567E1	-3.26526E1	2.67822E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.97901E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.17323E-1	-7.9844E-1	-9.13172E0	-9.14278E0	4.45843E-3	9.5129E-2	2.73216E1	-3.26378E1	-3.26042E1	2.68659E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00453E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.17299E-1	-7.98607E-1	-9.13177E0	-9.14257E0	4.43459E-3	9.52244E-2	2.73141E1	-3.2641E1	-3.26002E1	2.68695E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.17323E-1	-7.97987E-1	-9.13196E0	-9.14242E0	4.33922E-3	9.5439E-2	2.73021E1	-3.26603E1	-3.26212E1	2.66637E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17394E-1	-7.98392E-1	-9.13196E0	-9.14266E0	4.31538E-3	9.53197E-2	2.73015E1	-3.2638E1	-3.26518E1	2.6866E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.17251E-1	-7.98535E-1	-9.13181E0	-9.14257E0	4.55379E-3	9.53436E-2	2.73219E1	-3.26603E1	-3.2605E1	2.69674E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17156E-1	-7.98154E-1	-9.13179E0	-9.14228E0	4.95911E-3	9.52959E-2	2.73045E1	-3.26679E1	-3.26284E1	2.68893E1	1.19809E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.97963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.17227E-1	-7.98297E-1	-9.13179E0	-9.14235E0	4.673E-3	9.53674E-2	2.73003E1	-3.26434E1	-3.26446E1	2.6816E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.17466E-1	-7.9844E-1	-9.13172E0	-9.14257E0	4.52995E-3	9.50098E-2	2.73105E1	-3.26903E1	-3.26188E1	2.67181E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.17633E-1	-7.98488E-1	-9.1315E0	-9.1423E0	4.43459E-3	9.4986E-2	2.73228E1	-3.26791E1	-3.25947E1	2.69331E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17513E-1	-7.98202E-1	-9.13138E0	-9.14271E0	4.57764E-3	9.55105E-2	2.73399E1	-3.26344E1	-3.26645E1	2.66592E1	1.19809E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00563E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.17394E-1	-7.98202E-1	-9.1315E0	-9.14226E0	4.57764E-3	9.52721E-2	2.73303E1	-3.26536E1	-3.26362E1	2.68505E1	1.198E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.98665E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.17275E-1	-7.98321E-1	-9.13181E0	-9.14271E0	4.50611E-3	9.52721E-2	2.73175E1	-3.26844E1	-3.26172E1	2.68358E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9874E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.17466E-1	-7.98082E-1	-9.13169E0	-9.14285E0	4.43459E-3	9.52244E-2	2.73514E1	-3.26236E1	-3.2629E1	2.68821E1	1.2026E-7	2.52815E-3	2.52815E-3	6.32356E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.17299E-1	-7.98321E-1	-9.13181E0	-9.14261E0	4.48227E-3	9.52482E-2	2.7321E1	-3.26703E1	-3.26325E1	2.67908E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.16965E-1	-7.98535E-1	-9.13165E0	-9.14309E0	4.43459E-3	9.50813E-2	2.73315E1	-3.26573E1	-3.26308E1	2.67884E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.17084E-1	-7.98392E-1	-9.13162E0	-9.14252E0	4.57764E-3	9.49383E-2	2.73424E1	-3.26777E1	-3.26338E1	2.68702E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.16941E-1	-7.98321E-1	-9.13148E0	-9.14233E0	4.86374E-3	9.49621E-2	2.73228E1	-3.26402E1	-3.26337E1	2.68593E1	1.20069E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09263E0	-8.17037E-1	-7.98535E-1	-9.13153E0	-9.14226E0	4.3869E-3	9.48668E-2	2.73069E1	-3.26597E1	-3.26458E1	2.67824E1	1.20017E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00824E-1