[Scan]
initial_time=2016-01-18T21:24:21
final_time=2016-01-18T21:24:40
ip_count=19
run=1024
dataset=8
scan=597
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.37685E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.96273E-9
ql3_vset=
ql3_vmon=-9.13188E0
ql3_imon=1.79696E-10
ql4_vset=
ql4_vmon=-9.1424E0
ql4_imon=-1.31047E-10
mult1=-1.05278E-8
mult2=-2.80557E-9
rf_tmon=-4.3561E-3
rf_agc=3.40996E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.7218E-9
bslens_vset=-6.2E0
bslens_vmon=-6.7142E0
bslens_imon=2.56299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19376E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53749E1
cs_ef1b_imon=3.17564E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04916E1
cs_ea1_imon=1.1049E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37917E0
lens1_imon=2.55578E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.98589E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0342E1
cs_ea2_imon=1.35004E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84637E1
cs_ef1a_imon=3.05251E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.27698E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.28606E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.40701E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63897E1
os_ef1bup_imon=3.06186E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21124E0
cs_ionrep_imon=9.47729E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02052E1
cs_anode1_imon=1.96229E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.29362E-8
tplens_vset=1.4E-1
tplens_vmon=1.71834E0
tplens_imon=-1.29913E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2659E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.57932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98295E-4
ql6_vset=1.0E-1
ql6_vmon=9.46999E-2
ql6_imon=4.06352E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30377E0
ionrepsh_imon=8.39941E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33489E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74601E1
cs_ef2b_imon=3.13671E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53028E0
os_ea2_imon=-5.22853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71451E1
cs_ef2a_imon=3.18125E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0608E0
os_ef2alow_imon=-2.38719E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07612E-1
os_ef2bup_imon=-5.1305E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11098E1
os_restr2_imon=3.4103E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01566E1
cs_anode2_imon=2.0843E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73782E1
iondef1_imon=1.09589E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6962E1
iondef4_imon=1.103E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.89192E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.58561E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13451E0
cs_ionaccel_imon=-9.94946E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47526E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56368E1
einzel_imon=7.8338E-6
window_vset=0.0E0
window_vmon=2.30696E-1
window_imon=-8.34015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.3932E-4
mask2_vset=0.0E0
mask2_vmon=-1.86481E1
mask2_imon=-5.98233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.69644E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.19175E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.573E0
defgridb_imon=6.26527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.42545E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07797E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64023E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31855E1
cs_fil1_imon=6.25108E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00248E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66578E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.37635E-2
os_fil2_imon=-2.52527E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.90566E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29517E-1
cs_fil2_imon=-2.27577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.92216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22331E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.52523E-1
res40_imon=-2.33853E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.17204E-1	-7.98464E-1	-9.13191E0	-9.14252E0	4.60148E-3	9.48668E-2	2.73123E1	-3.2644E1	-3.26392E1	2.67995E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01871E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.16965E-1	-7.98416E-1	-9.13188E0	-9.1423E0	4.48227E-3	9.50336E-2	2.73308E1	-3.26493E1	-3.26223E1	2.6918E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.17251E-1	-7.98464E-1	-9.13215E0	-9.14271E0	4.43459E-3	9.47714E-2	2.72732E1	-3.26585E1	-3.26069E1	2.6701E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.17299E-1	-7.98392E-1	-9.13215E0	-9.14297E0	4.33922E-3	9.50813E-2	2.73311E1	-3.26726E1	-3.25936E1	2.69408E1	1.19953E-7	2.52061E-3	2.52061E-3	6.28592E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.1718E-1	-7.98202E-1	-9.132E0	-9.14249E0	4.45843E-3	9.49621E-2	2.73123E1	-3.2653E1	-3.2629E1	2.68202E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.1706E-1	-7.98392E-1	-9.13162E0	-9.14226E0	4.26769E-3	9.50813E-2	2.73411E1	-3.26747E1	-3.26386E1	2.6786E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09325E0	-8.16894E-1	-7.98249E-1	-9.13186E0	-9.14273E0	4.55379E-3	9.52959E-2	2.72874E1	-3.26862E1	-3.2603E1	2.68737E1	1.20004E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.17204E-1	-7.98297E-1	-9.13198E0	-9.14261E0	4.17233E-3	9.48429E-2	2.73409E1	-3.26629E1	-3.26355E1	2.68541E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16822E-1	-7.98512E-1	-9.13165E0	-9.14271E0	4.3869E-3	9.52244E-2	2.73012E1	-3.26656E1	-3.26143E1	2.69107E1	1.20113E-7	2.52772E-3	2.52772E-3	6.33297E-3	2.99663E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16655E-1	-7.98416E-1	-9.13146E0	-9.14285E0	4.22001E-3	9.48429E-2	2.7352E1	-3.26458E1	-3.25912E1	2.68148E1	1.20019E-7	2.51911E-3	2.51911E-3	6.3074E-3	2.99916E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16751E-1	-7.98416E-1	-9.13181E0	-9.14268E0	4.36306E-3	9.48668E-2	2.73104E1	-3.26402E1	-3.26006E1	2.68106E1	1.20414E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.17084E-1	-7.98202E-1	-9.13193E0	-9.14247E0	4.05312E-3	9.48429E-2	2.73237E1	-3.26849E1	-3.25996E1	2.692E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16894E-1	-7.98345E-1	-9.1321E0	-9.14276E0	4.02927E-3	9.48429E-2	2.73434E1	-3.26472E1	-3.259E1	2.66863E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16917E-1	-7.98297E-1	-9.13234E0	-9.14273E0	4.26769E-3	9.49383E-2	2.73659E1	-3.26703E1	-3.26343E1	2.68707E1	1.19753E-7	2.51863E-3	2.51863E-3	6.32916E-3	3.00766E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.16941E-1	-7.98488E-1	-9.13222E0	-9.14264E0	4.55379E-3	9.47237E-2	2.7349E1	-3.26272E1	-3.26296E1	2.68575E1					
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.17132E-1	-7.98583E-1	-9.13205E0	-9.14261E0	4.43459E-3	9.48191E-2	2.73183E1	-3.26873E1	-3.26464E1	2.6837E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.1718E-1	-7.98416E-1	-9.13196E0	-9.14268E0	4.12464E-3	9.49144E-2	2.73135E1	-3.265E1	-3.2611E1	2.68442E1	1.20017E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09309E0	-8.17347E-1	-7.98488E-1	-9.13193E0	-9.14266E0	4.02927E-3	9.47714E-2	2.72809E1	-3.26779E1	-3.26178E1	2.67955E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.03185E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.17013E-1	-7.98368E-1	-9.132E0	-9.14254E0	4.43459E-3	9.49383E-2	2.73183E1	-3.26506E1	-3.26116E1	2.6813E1	1.19902E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.16989E-1	-7.98249E-1	-9.13188E0	-9.1424E0	4.3869E-3	9.46999E-2	2.73782E1	-3.2659E1	-3.2659E1	2.6962E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1