[Scan]
initial_time=2016-01-18T21:25:14
final_time=2016-01-18T21:25:38
ip_count=19
run=1024
dataset=8
scan=599
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.37634E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.97008E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=2.13397E-10
ql4_vset=
ql4_vmon=-9.14247E0
ql4_imon=-1.19841E-10
mult1=-1.06967E-8
mult2=-2.86065E-9
rf_tmon=-2.80766E-3
rf_agc=3.43044E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.73422E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66972E0
bslens_imon=2.53734E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19906E1
lens5a_imon=1.99451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04965E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54048E1
cs_ef1b_imon=3.16441E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02286E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04869E1
cs_ea1_imon=1.09455E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37131E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64658E1
os_ef1alow_imon=2.97878E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03484E1
cs_ea2_imon=1.34911E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84176E1
cs_ef1a_imon=3.03828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.27967E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11423E1
os_restr1_imon=4.27334E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15181E1
os_ea1_imon=2.41604E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64215E1
os_ef1bup_imon=3.09031E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2496E0
cs_ionrep_imon=9.42557E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91962E2
cs_nozzle_imon=1.93678E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01759E1
cs_anode1_imon=1.96454E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.28839E-8
tplens_vset=1.4E-1
tplens_vmon=1.75437E0
tplens_imon=-7.19566E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26562E1
iondef3_imon=1.49436E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26698E1
iondef2_imon=1.57261E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98293E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.03017E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30451E0
ionrepsh_imon=8.42228E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33851E1
lens5b_imon=2.18319E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74726E1
cs_ef2b_imon=3.13671E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51852E0
os_ea2_imon=-7.04626E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.009E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71202E1
cs_ef2a_imon=3.17302E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04894E0
os_ef2alow_imon=-2.51069E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01998E-1
os_ef2bup_imon=-5.06687E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11155E1
os_restr2_imon=3.42377E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.28655E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73444E1
iondef1_imon=1.11476E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67642E1
iondef4_imon=1.1131E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.91729E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.59163E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1501E0
cs_ionaccel_imon=-8.415E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55869E1
einzel_imon=7.8862E-6
window_vset=0.0E0
window_vmon=2.54399E-1
window_imon=-7.89104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39208E-4
mask2_vset=0.0E0
mask2_vmon=-1.86519E1
mask2_imon=-7.06768E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.82331E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.64033E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.26551E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4306E0
defgridb_imon=6.17612E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.45165E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07728E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63942E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31797E1
cs_fil1_imon=7.30524E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80029E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66543E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20174E-2
os_fil2_imon=-2.40052E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.95117E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30727E-1
cs_fil2_imon=-1.94517E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36701E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22153E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.19991E-7
chamber_cvt_pmon=2.52659E-3
foreline_cvt_pmon=2.52659E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.56068E-1
res40_imon=-2.51818E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.17108E-1	-7.98154E-1	-9.13184E0	-9.14288E0	4.31538E-3	9.5129E-2	2.73231E1	-3.26633E1	-3.2596E1	2.68863E1	1.19937E-7	2.52066E-3	2.52066E-3	6.3245E-3	3.01881E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16894E-1	-7.98702E-1	-9.13186E0	-9.1423E0	4.62532E-3	9.49383E-2	2.73514E1	-3.26633E1	-3.2647E1	2.6855E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16774E-1	-7.98655E-1	-9.13165E0	-9.14257E0	4.55379E-3	9.48906E-2	2.73277E1	-3.26515E1	-3.26028E1	2.67873E1	1.19819E-7	2.52139E-3	2.52139E-3	6.29624E-3	3.0041E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16679E-1	-7.98297E-1	-9.13181E0	-9.14254E0	4.3869E-3	9.49383E-2	2.72871E1	-3.27071E1	-3.25713E1	2.67776E1	1.20142E-7	2.51709E-3	2.51709E-3	6.29684E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16631E-1	-7.98345E-1	-9.13193E0	-9.14288E0	4.81606E-3	9.48429E-2	2.73063E1	-3.26609E1	-3.26392E1	2.68376E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16822E-1	-7.9813E-1	-9.13167E0	-9.14252E0	4.45843E-3	9.48191E-2	2.73195E1	-3.26729E1	-3.26206E1	2.6828E1	1.2026E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16798E-1	-7.98202E-1	-9.13172E0	-9.14245E0	4.52995E-3	9.45091E-2	2.72889E1	-3.26903E1	-3.25966E1	2.6828E1	1.19965E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.1687E-1	-7.97939E-1	-9.13155E0	-9.14264E0	4.673E-3	9.48906E-2	2.73363E1	-3.2629E1	-3.26326E1	2.68911E1	1.1966E-7	2.5225E-3	2.5225E-3	6.29067E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16703E-1	-7.97915E-1	-9.13167E0	-9.1428E0	4.57764E-3	9.47714E-2	2.72955E1	-3.26675E1	-3.2629E1	2.68508E1	1.20055E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16822E-1	-7.97987E-1	-9.13198E0	-9.14264E0	4.22001E-3	9.47237E-2	2.73201E1	-3.26759E1	-3.25701E1	2.681E1	1.19766E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.00144E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.17013E-1	-7.97915E-1	-9.13167E0	-9.14233E0	4.43459E-3	9.45568E-2	2.73189E1	-3.26741E1	-3.2584E1	2.68587E1	1.19939E-7	2.51443E-3	2.51443E-3	6.31563E-3	3.00432E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.17084E-1	-7.98178E-1	-9.13174E0	-9.14283E0	4.45843E-3	9.51529E-2	2.73222E1	-3.26968E1	-3.25835E1	2.68016E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17013E-1	-7.98225E-1	-9.13169E0	-9.14242E0	4.64916E-3	9.52244E-2	2.7355E1	-3.2653E1	-3.26428E1	2.68424E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.17037E-1	-7.98035E-1	-9.13184E0	-9.14261E0	4.17233E-3	9.4986E-2	2.72904E1	-3.26707E1	-3.26101E1	2.67686E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.17156E-1	-7.9813E-1	-9.13181E0	-9.14268E0	4.57764E-3	9.50336E-2	2.7344E1	-3.26738E1	-3.25942E1	2.6784E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09325E0	-8.16894E-1	-7.9813E-1	-9.1316E0	-9.14252E0	4.36306E-3	9.52005E-2	2.72951E1	-3.26555E1	-3.26242E1	2.68412E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.17084E-1	-7.98249E-1	-9.13153E0	-9.14254E0	4.41074E-3	9.48906E-2	2.73424E1	-3.26511E1	-3.26462E1	2.68375E1	1.19953E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09317E0	-8.16488E-1	-7.9813E-1	-9.13155E0	-9.14249E0	4.3869E-3	9.52721E-2	2.73451E1	-3.26695E1	-3.26283E1	2.68192E1	1.19713E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.99348E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09309E0	-8.16751E-1	-7.98321E-1	-9.13167E0	-9.14254E0	4.55379E-3	9.5129E-2	2.73393E1	-3.26585E1	-3.2593E1	2.68482E1	1.1959E-7	2.52131E-3	2.52131E-3	6.31269E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.16894E-1	-7.98464E-1	-9.132E0	-9.14247E0	4.673E-3	9.50336E-2	2.73444E1	-3.26698E1	-3.26562E1	2.67642E1	1.19991E-7	2.52659E-3	2.52659E-3	6.33388E-3	3.006E-1