[Scan]
initial_time=2016-01-18T21:25:48
final_time=2016-01-18T21:26:17
ip_count=19
run=1024
dataset=8
scan=600
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08741E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.37859E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=1.93156E-9
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=1.98865E-10
ql4_vset=
ql4_vmon=-9.14245E0
ql4_imon=-1.33729E-10
mult1=-9.77126E-9
mult2=-2.88788E-9
rf_tmon=-4.50358E-3
rf_agc=3.37338E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.64661E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69689E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19742E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05242E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53947E1
cs_ef1b_imon=3.17011E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=1.11015E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41444E0
lens1_imon=2.68483E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.35402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.0537E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.27729E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.28409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15311E1
os_ea1_imon=2.39708E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64038E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26331E0
cs_ionrep_imon=9.49112E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=1.95881E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.29537E-8
tplens_vset=1.4E-1
tplens_vmon=1.69039E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2685E1
iondef2_imon=1.55577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02987E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.04229E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=8.54963E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.18437E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7491E1
cs_ef2b_imon=3.14128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52522E0
os_ea2_imon=-7.83786E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06053E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70855E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17846E-1
os_ef2bup_imon=-5.12066E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11238E1
os_restr2_imon=3.41806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.28902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.07306E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73234E1
iondef1_imon=1.1098E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69235E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.91409E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.56753E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-8.96807E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47576E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56591E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-7.52649E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.97625E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.8224E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.4241E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53253E0
defgridb_imon=6.3906E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.42108E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08152E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64089E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=7.9357E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.83979E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66533E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.32359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75696E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.15541E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22221E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19544E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.65899E-1
res40_imon=-2.32758E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.17013E-1	-7.98774E-1	-9.13208E0	-9.14259E0	4.74453E-3	9.51052E-2	2.73204E1	-3.26372E1	-3.26101E1	2.66652E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
2.0E0	2.0E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16703E-1	-7.98416E-1	-9.13174E0	-9.14261E0	4.8399E-3	9.49621E-2	2.73153E1	-3.26206E1	-3.26476E1	2.66833E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16774E-1	-7.98631E-1	-9.13181E0	-9.14247E0	4.64916E-3	9.48668E-2	2.7308E1	-3.26614E1	-3.25859E1	2.66756E1	1.19705E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01347E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16679E-1	-7.98488E-1	-9.13208E0	-9.14228E0	4.673E-3	9.4986E-2	2.73027E1	-3.26874E1	-3.26036E1	2.69452E1	1.20004E-7	2.52599E-3	2.52599E-3	6.30202E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.1687E-1	-7.98488E-1	-9.13222E0	-9.14226E0	4.60148E-3	9.50098E-2	2.73111E1	-3.26603E1	-3.25906E1	2.68679E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02769E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16798E-1	-7.98535E-1	-9.13205E0	-9.14235E0	4.57764E-3	9.48906E-2	2.73364E1	-3.26997E1	-3.26284E1	2.67529E1	1.20017E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16822E-1	-7.98488E-1	-9.13193E0	-9.14235E0	4.88758E-3	9.50098E-2	2.73171E1	-3.26951E1	-3.26098E1	2.68635E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.9892E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.16846E-1	-7.9813E-1	-9.13205E0	-9.1428E0	4.41074E-3	9.51529E-2	2.73526E1	-3.26753E1	-3.26248E1	2.69758E1	1.20226E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.16774E-1	-7.98297E-1	-9.13239E0	-9.14273E0	4.55379E-3	9.49144E-2	2.73345E1	-3.26506E1	-3.2629E1	2.68611E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16631E-1	-7.98106E-1	-9.13236E0	-9.14247E0	4.74453E-3	9.51052E-2	2.73205E1	-3.26812E1	-3.26488E1	2.67109E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.02253E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16917E-1	-7.98059E-1	-9.13231E0	-9.14247E0	4.74453E-3	9.49621E-2	2.73261E1	-3.26343E1	-3.26216E1	2.69152E1	1.1988E-7	2.51472E-3	2.51472E-3	6.3074E-3	3.00247E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16894E-1	-7.98035E-1	-9.13205E0	-9.14211E0	4.52995E-3	9.48191E-2	2.73092E1	-3.26596E1	-3.26301E1	2.67648E1	1.20337E-7	2.5199E-3	2.5199E-3	6.27845E-3	3.01193E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.1687E-1	-7.98225E-1	-9.13186E0	-9.14237E0	4.76837E-3	9.50098E-2	2.73171E1	-3.26518E1	-3.2635E1	2.69343E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16965E-1	-7.98011E-1	-9.13188E0	-9.14266E0	4.50611E-3	9.51529E-2	2.73237E1	-3.26506E1	-3.26218E1	2.68412E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.17323E-1	-7.98035E-1	-9.13184E0	-9.14259E0	4.41074E-3	9.49621E-2	2.72805E1	-3.26374E1	-3.2608E1	2.68917E1	1.20017E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16751E-1	-7.98106E-1	-9.13172E0	-9.14245E0	4.50611E-3	9.47714E-2	2.73246E1	-3.26708E1	-3.26797E1	2.67205E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
2.0E1	7.0E0	1.0E0	8.08E2	5.58E2	-2.09433E0	-8.16751E-1	-7.98106E-1	-9.13184E0	-9.1424E0	4.76837E-3	9.47952E-2	2.73429E1	-3.26699E1	-3.2635E1	2.68881E1	1.19653E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16703E-1	-7.98607E-1	-9.13186E0	-9.14245E0	4.88758E-3	9.47475E-2	2.73327E1	-3.26512E1	-3.26152E1	2.68941E1	1.20278E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16727E-1	-7.9875E-1	-9.13181E0	-9.14276E0	4.8399E-3	9.49383E-2	2.73334E1	-3.26703E1	-3.2639E1	2.67399E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16822E-1	-7.98345E-1	-9.13177E0	-9.14245E0	4.673E-3	9.47952E-2	2.73234E1	-3.2685E1	-3.2616E1	2.69235E1	1.19544E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.99941E-1