[Scan]
initial_time=2016-01-18T21:27:43
final_time=2016-01-18T21:28:11
ip_count=19
run=1024
dataset=8
scan=603
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=1.37573E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=2.00412E-9
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=2.06482E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-1.42217E-10
mult1=-9.33101E-9
mult2=-2.91622E-9
rf_tmon=-2.72196E-3
rf_agc=3.54605E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.62654E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63369E0
bslens_imon=2.35029E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1946E1
lens5a_imon=1.991E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53947E1
cs_ef1b_imon=3.14668E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=1.09842E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42123E0
lens1_imon=2.92348E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.35257E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.04325E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.27672E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.27869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.40269E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63906E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20463E0
cs_ionrep_imon=9.47368E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=1.97179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.27522E-8
tplens_vset=1.4E-1
tplens_vmon=1.67929E0
tplens_imon=-1.58753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26597E1
iondef3_imon=1.51443E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.56129E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98119E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.05047E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27433E0
ionrepsh_imon=8.51116E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47801E0
os_ea2_imon=-6.23792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-2.4357E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11153E1
os_restr2_imon=3.42238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.08603E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73435E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67752E1
iondef4_imon=1.10539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.88857E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.54854E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-8.3554E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.4759E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56748E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.68999E-1
window_imon=-7.45441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39315E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.10883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.47076E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=6.98266E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47375E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.43027E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07684E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63957E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31872E1
cs_fil1_imon=6.53015E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.44336E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6648E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20869E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.97398E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.16742E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22297E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.1964E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09147E-1
res40_imon=-2.28433E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=245
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.17108E-1	-7.98368E-1	-9.13177E0	-9.14299E0	4.57764E-3	9.50813E-2	2.73116E1	-3.26472E1	-3.26478E1	2.67387E1	1.19913E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.16917E-1	-7.98607E-1	-9.13188E0	-9.1423E0	4.36306E-3	9.50098E-2	2.73475E1	-3.26759E1	-3.26048E1	2.67945E1	1.2026E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.17132E-1	-7.98869E-1	-9.13212E0	-9.14226E0	4.17233E-3	9.49621E-2	2.73509E1	-3.26741E1	-3.26231E1	2.68823E1	1.20208E-7	2.51611E-3	2.51611E-3	6.29603E-3	3.00251E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16846E-1	-7.98631E-1	-9.13205E0	-9.14233E0	4.26769E-3	9.51529E-2	2.73027E1	-3.26614E1	-3.26054E1	2.67812E1	1.1974E-7	2.51077E-3	2.51077E-3	6.3074E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.1687E-1	-7.98607E-1	-9.13186E0	-9.1424E0	4.45843E-3	9.52482E-2	2.73081E1	-3.26314E1	-3.26362E1	2.69584E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16751E-1	-7.98559E-1	-9.13177E0	-9.14261E0	4.05312E-3	9.48191E-2	2.73219E1	-3.26723E1	-3.26098E1	2.67722E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16894E-1	-7.98488E-1	-9.13184E0	-9.14237E0	4.14848E-3	9.47475E-2	2.73004E1	-3.26708E1	-3.26449E1	2.68352E1	1.20106E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16679E-1	-7.98464E-1	-9.13184E0	-9.1423E0	4.26769E-3	9.48191E-2	2.73069E1	-3.26675E1	-3.25791E1	2.68401E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16917E-1	-7.98416E-1	-9.13181E0	-9.1424E0	4.07696E-3	9.48429E-2	2.73165E1	-3.26482E1	-3.26296E1	2.68593E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16894E-1	-7.98583E-1	-9.13191E0	-9.14228E0	4.52995E-3	9.48668E-2	2.72474E1	-3.26074E1	-3.26669E1	2.68322E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.1718E-1	-7.98583E-1	-9.1321E0	-9.14233E0	4.29153E-3	9.48906E-2	2.73505E1	-3.26526E1	-3.2636E1	2.67619E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16917E-1	-7.98488E-1	-9.1321E0	-9.14268E0	4.31538E-3	9.52244E-2	2.72973E1	-3.26338E1	-3.26284E1	2.68442E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.17132E-1	-7.98512E-1	-9.13193E0	-9.14247E0	4.29153E-3	9.50575E-2	2.73345E1	-3.26735E1	-3.26302E1	2.68406E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.17299E-1	-7.98535E-1	-9.13191E0	-9.14207E0	4.31538E-3	9.46999E-2	2.73163E1	-3.26555E1	-3.26431E1	2.68124E1	1.19851E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9943E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.17204E-1	-7.98345E-1	-9.13186E0	-9.14271E0	4.24385E-3	9.5129E-2	2.73161E1	-3.26627E1	-3.26566E1	2.68322E1	1.19705E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16941E-1	-7.98273E-1	-9.13165E0	-9.14237E0	4.07696E-3	9.49383E-2	2.7346E1	-3.26657E1	-3.26278E1	2.68671E1	1.19757E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9952E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17132E-1	-7.98154E-1	-9.13174E0	-9.14249E0	4.31538E-3	9.53913E-2	2.73387E1	-3.26921E1	-3.26332E1	2.6816E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.1706E-1	-7.98035E-1	-9.1315E0	-9.14199E0	4.1008E-3	9.52959E-2	2.73234E1	-3.26585E1	-3.26301E1	2.6819E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.1687E-1	-7.98178E-1	-9.13177E0	-9.14199E0	4.17233E-3	9.4986E-2	2.73287E1	-3.26585E1	-3.26319E1	2.68852E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16965E-1	-7.97939E-1	-9.13198E0	-9.14218E0	4.33922E-3	9.51052E-2	2.73435E1	-3.26663E1	-3.26597E1	2.67752E1	1.1964E-7	2.52131E-3	2.52131E-3	6.31798E-3	3.006E-1