[Scan]
initial_time=2016-01-18T21:28:21
final_time=2016-01-18T21:28:48
ip_count=19
run=1024
dataset=8
scan=604
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.17204E-1
ql1_imon=1.37892E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=1.96162E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=2.01559E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-1.03426E-10
mult1=-9.12632E-9
mult2=-2.69266E-9
rf_tmon=-5.0772E-3
rf_agc=3.33877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.76615E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6641E0
bslens_imon=2.294E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19738E1
lens5a_imon=2.01735E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53599E1
cs_ef1b_imon=3.16853E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02248E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04476E1
cs_ea1_imon=1.11177E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35821E0
lens1_imon=2.63093E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65026E1
os_ef1alow_imon=2.98065E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0409E1
cs_ea2_imon=1.34799E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84263E1
cs_ef1a_imon=3.04802E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.27732E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11354E1
os_restr1_imon=4.27072E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15006E1
os_ea1_imon=2.40481E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62955E1
os_ef1bup_imon=3.09255E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22964E0
cs_ionrep_imon=9.40685E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93705E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01634E1
cs_anode1_imon=1.95219E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.28131E-8
tplens_vset=1.4E-1
tplens_vmon=1.65641E0
tplens_imon=-3.9765E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.52881E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26332E1
iondef2_imon=1.56138E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98013E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.02874E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25272E0
ionrepsh_imon=8.5608E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33851E1
lens5b_imon=2.16185E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74782E1
cs_ef2b_imon=3.13821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51977E0
os_ea2_imon=-4.01394E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00694E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71158E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07015E0
os_ef2alow_imon=-2.54812E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03869E-1
os_ef2bup_imon=-5.22032E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11485E1
os_restr2_imon=3.42265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.27195E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.09291E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.11663E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.09439E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.02288E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.54836E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16757E0
cs_ionaccel_imon=-8.60213E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56193E1
einzel_imon=7.69532E-6
window_vset=0.0E0
window_vmon=2.68122E-1
window_imon=-5.00926E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86419E1
mask2_imon=-6.39401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.24305E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.86494E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.1532E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30567E0
defgridb_imon=6.07504E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33283E1
os_fil1_imon=9.43212E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07354E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6395E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31804E1
cs_fil1_imon=7.69821E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.69425E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66538E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09459E-2
os_fil2_imon=-2.3631E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.90164E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30727E-1
cs_fil2_imon=-2.1323E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22235E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.36929E-1
res40_imon=-2.27491E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16727E-1	-7.98225E-1	-9.13193E0	-9.14216E0	4.57764E-3	9.50336E-2	2.7308E1	-3.26758E1	-3.26295E1	2.68296E1	1.19819E-7	2.51804E-3	2.51804E-3	6.29067E-3	2.99348E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16679E-1	-7.98702E-1	-9.13217E0	-9.14214E0	4.41074E-3	9.50098E-2	2.73219E1	-3.26672E1	-3.26104E1	2.68381E1	1.20055E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.16774E-1	-7.98345E-1	-9.13193E0	-9.14261E0	4.3869E-3	9.51052E-2	2.72912E1	-3.26718E1	-3.26249E1	2.688E1	1.19872E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.01209E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.17013E-1	-7.98559E-1	-9.13219E0	-9.14235E0	4.55379E-3	9.50336E-2	2.73021E1	-3.26703E1	-3.26189E1	2.67468E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16655E-1	-7.98416E-1	-9.13222E0	-9.14195E0	4.33922E-3	9.4986E-2	2.73201E1	-3.2647E1	-3.26188E1	2.68352E1	1.19991E-7	2.51182E-3	2.51182E-3	6.32328E-3	3.01356E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16703E-1	-7.98798E-1	-9.1321E0	-9.14259E0	4.36306E-3	9.46045E-2	2.73122E1	-3.26685E1	-3.26101E1	2.67956E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16679E-1	-7.98631E-1	-9.13215E0	-9.14235E0	4.3869E-3	9.48668E-2	2.73303E1	-3.26609E1	-3.26627E1	2.68412E1	1.19749E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16488E-1	-7.98464E-1	-9.13205E0	-9.14223E0	4.31538E-3	9.5129E-2	2.72961E1	-3.26651E1	-3.25797E1	2.68983E1	1.20383E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16703E-1	-7.98559E-1	-9.13169E0	-9.14226E0	4.55379E-3	9.49383E-2	2.73279E1	-3.26524E1	-3.26164E1	2.68094E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16727E-1	-7.98535E-1	-9.13205E0	-9.1424E0	4.52995E-3	9.52005E-2	2.7275E1	-3.26307E1	-3.26679E1	2.68124E1	1.20122E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.16607E-1	-7.9844E-1	-9.13188E0	-9.14221E0	4.62532E-3	9.48191E-2	2.73321E1	-3.26597E1	-3.26404E1	2.67687E1	1.19809E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.16727E-1	-7.98106E-1	-9.13212E0	-9.14268E0	4.43459E-3	9.50575E-2	2.73183E1	-3.26945E1	-3.26308E1	2.68855E1	1.19851E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.9841E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.16822E-1	-7.98345E-1	-9.13157E0	-9.14273E0	4.22001E-3	9.47475E-2	2.73183E1	-3.26356E1	-3.25834E1	2.68064E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.97963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16631E-1	-7.98416E-1	-9.13208E0	-9.14278E0	4.31538E-3	9.4986E-2	2.73051E1	-3.26708E1	-3.26083E1	2.68154E1	1.19653E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9952E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16941E-1	-7.9844E-1	-9.13205E0	-9.14271E0	4.36306E-3	9.48906E-2	2.73387E1	-3.26849E1	-3.26164E1	2.68538E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.1706E-1	-7.98345E-1	-9.1316E0	-9.14259E0	4.52995E-3	9.50575E-2	2.73219E1	-3.26735E1	-3.26194E1	2.68058E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00824E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16989E-1	-7.98273E-1	-9.13174E0	-9.14283E0	4.41074E-3	9.48906E-2	2.72805E1	-3.2635E1	-3.26488E1	2.68136E1	1.198E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.1687E-1	-7.98249E-1	-9.13191E0	-9.14247E0	4.52995E-3	9.48429E-2	2.73311E1	-3.26508E1	-3.26207E1	2.68256E1	1.19653E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16941E-1	-7.98655E-1	-9.13169E0	-9.14245E0	4.48227E-3	9.50813E-2	2.72847E1	-3.26567E1	-3.26158E1	2.68244E1	1.19757E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.17204E-1	-7.98631E-1	-9.1315E0	-9.14211E0	4.45843E-3	9.49144E-2	2.73075E1	-3.26332E1	-3.26236E1	2.68166E1	1.20106E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.0071E-1