[Scan]
initial_time=2016-01-18T21:29:35
final_time=2016-01-18T21:30:02
ip_count=19
run=1024
dataset=8
scan=606
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09294E0
qbias_imon=-1.0873E-4
ql1_vset=
ql1_vmon=-8.16917E-1
ql1_imon=1.38232E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=1.99872E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=2.09403E-10
ql4_vset=
ql4_vmon=-9.14254E0
ql4_imon=-1.50526E-10
mult1=-9.82467E-9
mult2=-2.72061E-9
rf_tmon=-4.77078E-3
rf_agc=3.29551E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.66107E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67395E0
bslens_imon=2.52333E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19484E1
lens5a_imon=1.9928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5391E1
cs_ef1b_imon=3.17366E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04688E1
cs_ea1_imon=1.08832E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36054E0
lens1_imon=2.76486E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.97279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.34355E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=3.04716E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.27643E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11332E1
os_restr1_imon=4.27497E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.38611E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63722E1
os_ef1bup_imon=3.07322E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=9.70079E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93651E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=1.97087E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.287E-8
tplens_vset=1.4E-1
tplens_vmon=1.62581E0
tplens_imon=-3.6784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2602E1
iondef3_imon=1.51479E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98321E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=4.01776E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30978E0
ionrepsh_imon=8.64815E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74617E1
cs_ef2b_imon=3.14203E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46779E0
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.18235E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07889E0
os_ef2alow_imon=-2.63019E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52053E-1
os_ef2bup_imon=-5.09762E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.41449E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.29171E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0156E1
cs_anode2_imon=2.09147E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72943E1
iondef1_imon=1.11644E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69151E1
iondef4_imon=1.11249E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.88855E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.56358E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13362E0
cs_ionaccel_imon=-9.16887E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47549E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56388E1
einzel_imon=7.8338E-6
window_vset=0.0E0
window_vmon=2.34483E-1
window_imon=-6.63193E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39195E-4
mask2_vset=0.0E0
mask2_vmon=-1.86715E1
mask2_imon=-6.77094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.15209E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.58972E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.39723E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=5.96246E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.42165E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07126E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64038E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31809E1
cs_fil1_imon=7.30479E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02472E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66625E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1313E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08612E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.88633E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-1.9973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.57641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.55731E-1
res40_imon=-2.34522E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09309E0	-8.16727E-1	-7.98249E-1	-9.13186E0	-9.14292E0	4.26769E-3	9.5129E-2	2.73558E1	-3.26502E1	-3.26213E1	2.68208E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9978E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.0934E0	-8.16798E-1	-7.98345E-1	-9.13181E0	-9.14259E0	4.33922E-3	9.52005E-2	2.73309E1	-3.26482E1	-3.26389E1	2.68322E1	1.198E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.16655E-1	-7.98488E-1	-9.13172E0	-9.14273E0	4.31538E-3	9.49621E-2	2.72594E1	-3.2682E1	-3.25537E1	2.68644E1	1.19937E-7	2.51889E-3	2.51889E-3	6.29224E-3	2.995E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16751E-1	-7.98512E-1	-9.13167E0	-9.14271E0	4.3869E-3	9.48191E-2	2.73118E1	-3.26601E1	-3.26489E1	2.67579E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16679E-1	-7.98583E-1	-9.13186E0	-9.14266E0	4.29153E-3	9.47952E-2	2.73766E1	-3.26825E1	-3.26116E1	2.68974E1	1.20113E-7	2.5216E-3	2.5216E-3	6.31761E-3	2.98454E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16512E-1	-7.98535E-1	-9.13246E0	-9.14268E0	4.00543E-3	9.50098E-2	2.73238E1	-3.26563E1	-3.26649E1	2.67349E1	1.20031E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.99083E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16894E-1	-7.98535E-1	-9.13198E0	-9.1424E0	4.76837E-3	9.45807E-2	2.73246E1	-3.26815E1	-3.26272E1	2.68748E1	1.19961E-7	2.52075E-3	2.52075E-3	6.30097E-3	2.97636E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-8.16655E-1	-7.98535E-1	-9.13208E0	-9.14242E0	4.3869E-3	9.47952E-2	2.73186E1	-3.26291E1	-3.25832E1	2.68119E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.16584E-1	-7.98535E-1	-9.13219E0	-9.14259E0	4.55379E-3	9.50098E-2	2.7298E1	-3.26343E1	-3.26201E1	2.68435E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.01475E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.16679E-1	-7.9813E-1	-9.13217E0	-9.14273E0	4.57764E-3	9.49144E-2	2.74012E1	-3.26699E1	-3.26098E1	2.68046E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01738E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16846E-1	-7.98273E-1	-9.13234E0	-9.1428E0	4.07696E-3	9.49383E-2	2.72793E1	-3.27155E1	-3.2605E1	2.68352E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16703E-1	-7.98655E-1	-9.13234E0	-9.14254E0	4.45843E-3	9.5129E-2	2.73243E1	-3.26609E1	-3.2623E1	2.68689E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16679E-1	-7.98702E-1	-9.13186E0	-9.14254E0	4.72069E-3	9.50813E-2	2.73075E1	-3.26567E1	-3.26134E1	2.6834E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16655E-1	-7.98416E-1	-9.13203E0	-9.14235E0	4.31538E-3	9.50575E-2	2.73311E1	-3.26708E1	-3.26331E1	2.68088E1	1.20122E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16798E-1	-7.98321E-1	-9.13181E0	-9.14221E0	4.52995E-3	9.48668E-2	2.73658E1	-3.26585E1	-3.2629E1	2.68298E1	1.20004E-7	2.50882E-3	2.50882E-3	6.28592E-3	2.98156E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.16679E-1	-7.9844E-1	-9.13181E0	-9.14247E0	4.41074E-3	9.4986E-2	2.72642E1	-3.26176E1	-3.2587E1	2.68701E1	1.19861E-7	2.52318E-3	2.52318E-3	6.28006E-3	2.98222E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09294E0	-8.1656E-1	-7.98011E-1	-9.132E0	-9.14226E0	4.26769E-3	9.47952E-2	2.73216E1	-3.26526E1	-3.26036E1	2.67986E1	1.20435E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09333E0	-8.16846E-1	-7.98202E-1	-9.13203E0	-9.14259E0	4.57764E-3	9.48429E-2	2.73201E1	-3.265E1	-3.265E1	2.68821E1	1.19991E-7	2.52045E-3	2.52045E-3	6.31014E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-8.16679E-1	-7.98106E-1	-9.13184E0	-9.14261E0	4.60148E-3	9.49144E-2	2.72992E1	-3.26767E1	-3.25865E1	2.67734E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09294E0	-8.16917E-1	-7.98297E-1	-9.1316E0	-9.14254E0	4.62532E-3	9.48429E-2	2.72943E1	-3.26699E1	-3.2602E1	2.69151E1	1.19697E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.99941E-1