[Scan]
initial_time=2016-01-18T21:30:12
final_time=2016-01-18T21:30:39
ip_count=19
run=1024
dataset=8
scan=607
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08741E-4
ql1_vset=
ql1_vmon=-8.16941E-1
ql1_imon=1.37624E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.99168E-9
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=1.86491E-10
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=-1.47367E-10
mult1=-1.02678E-8
mult2=-2.7311E-9
rf_tmon=-3.90188E-3
rf_agc=3.40878E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.68017E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65292E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.99028E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53928E1
cs_ef1b_imon=3.16254E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02384E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=1.09445E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4008E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64655E1
os_ef1alow_imon=2.978E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.37744E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=3.05828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.27577E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.28087E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14741E1
os_ea1_imon=2.41242E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63838E1
os_ef1bup_imon=3.09095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26171E0
cs_ionrep_imon=9.36914E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0207E1
cs_anode1_imon=1.96358E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.28063E-8
tplens_vset=1.4E-1
tplens_vmon=1.68049E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98285E-4
ql6_vset=1.0E-1
ql6_vmon=9.4676E-2
ql6_imon=4.0285E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=8.70222E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33453E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12535E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50565E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00843E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.18096E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.40777E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18662E-1
os_ef2bup_imon=-5.1706E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11228E1
os_restr2_imon=3.41206E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.08764E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73346E1
iondef1_imon=1.10779E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69229E1
iondef4_imon=1.11422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.8808E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.56276E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-9.37738E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47452E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56793E1
einzel_imon=7.81642E-6
window_vset=0.0E0
window_vmon=2.57651E-1
window_imon=-7.95253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.42342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.77575E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.49456E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.42866E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08325E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64017E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31827E1
cs_fil1_imon=7.26425E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.55791E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66373E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.32476E-2
os_fil2_imon=-2.5881E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16142E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.10158E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28403E-1
cs_fil2_imon=-1.96834E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37948E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22165E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=3.00942E-1
chamber_ion_pmon=1.19607E-7
chamber_cvt_pmon=2.51136E-3
foreline_cvt_pmon=2.51136E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.46087E-1
res40_imon=-2.40777E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.16655E-1	-7.98345E-1	-9.13169E0	-9.14276E0	4.48227E-3	9.4986E-2	2.73464E1	-3.26254E1	-3.26195E1	2.68394E1	1.20226E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.01347E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09325E0	-8.16631E-1	-7.98368E-1	-9.13169E0	-9.14285E0	4.41074E-3	9.48429E-2	2.73353E1	-3.26554E1	-3.26092E1	2.68172E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09302E0	-8.16822E-1	-7.9844E-1	-9.13181E0	-9.14304E0	4.55379E-3	9.52005E-2	2.73254E1	-3.26648E1	-3.26063E1	2.67839E1	1.19586E-7	2.51828E-3	2.51828E-3	6.31437E-3	3.02693E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-8.16894E-1	-7.98297E-1	-9.13193E0	-9.14266E0	4.69685E-3	9.48668E-2	2.7347E1	-3.26868E1	-3.26071E1	2.69001E1	1.19841E-7	2.51919E-3	2.51919E-3	6.33388E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.16798E-1	-7.98631E-1	-9.13188E0	-9.14276E0	4.95911E-3	9.51529E-2	2.73189E1	-3.26549E1	-3.26404E1	2.67223E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.16703E-1	-7.98225E-1	-9.13203E0	-9.14292E0	4.81606E-3	9.51767E-2	2.7308E1	-3.26248E1	-3.26354E1	2.69304E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.98156E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.16798E-1	-7.98392E-1	-9.13196E0	-9.14276E0	4.8399E-3	9.50575E-2	2.73241E1	-3.26456E1	-3.26083E1	2.68768E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09348E0	-8.16774E-1	-7.98869E-1	-9.13172E0	-9.14266E0	4.88758E-3	9.49144E-2	2.73165E1	-3.26458E1	-3.26308E1	2.66634E1	1.1966E-7	2.52362E-3	2.52362E-3	6.32418E-3	2.99348E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16631E-1	-7.98297E-1	-9.13184E0	-9.14271E0	4.8399E-3	9.48191E-2	2.73291E1	-3.26266E1	-3.26645E1	2.66634E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.1706E-1	-7.98273E-1	-9.13191E0	-9.14257E0	4.86374E-3	9.49144E-2	2.73051E1	-3.26378E1	-3.26378E1	2.68935E1	1.20069E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00824E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16917E-1	-7.98345E-1	-9.13188E0	-9.14249E0	4.64916E-3	9.50336E-2	2.73424E1	-3.26744E1	-3.26327E1	2.67271E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16727E-1	-7.98225E-1	-9.13177E0	-9.14228E0	4.64916E-3	9.50098E-2	2.7309E1	-3.26413E1	-3.26132E1	2.69365E1	1.20069E-7	2.52099E-3	2.52099E-3	6.35692E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16774E-1	-7.98631E-1	-9.13157E0	-9.14266E0	4.62532E-3	9.50813E-2	2.73281E1	-3.26595E1	-3.25891E1	2.68922E1	1.19889E-7	2.51734E-3	2.51734E-3	6.33003E-3	3.01231E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16679E-1	-7.98178E-1	-9.13184E0	-9.14221E0	4.74453E-3	9.49383E-2	2.73233E1	-3.2634E1	-3.26203E1	2.66344E1	1.19841E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.006E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16727E-1	-7.98416E-1	-9.13181E0	-9.14245E0	4.79221E-3	9.47237E-2	2.73116E1	-3.26825E1	-3.26617E1	2.67628E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16751E-1	-7.98512E-1	-9.13169E0	-9.14261E0	4.64916E-3	9.49621E-2	2.73615E1	-3.26704E1	-3.2568E1	2.69465E1	1.19895E-7	2.51874E-3	2.51874E-3	6.33648E-3	2.9926E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16846E-1	-7.98416E-1	-9.13188E0	-9.14233E0	4.673E-3	9.48191E-2	2.73478E1	-3.26585E1	-3.26188E1	2.68605E1	1.20028E-7	2.52197E-3	2.52197E-3	6.3074E-3	2.99383E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17013E-1	-7.98464E-1	-9.13179E0	-9.14247E0	4.48227E-3	9.49383E-2	2.729E1	-3.26376E1	-3.26017E1	2.67538E1	1.19965E-7	2.52428E-3	2.52428E-3	6.35692E-3	2.9978E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.17013E-1	-7.98321E-1	-9.13153E0	-9.14295E0	4.64916E-3	9.48429E-2	2.73039E1	-3.26609E1	-3.26474E1	2.70046E1	1.19891E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.98842E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16941E-1	-7.9844E-1	-9.13172E0	-9.14264E0	4.50611E-3	9.4676E-2	2.73346E1	-3.26561E1	-3.26296E1	2.69229E1	1.19607E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.00942E-1