[Scan]
initial_time=2016-01-18T21:30:49
final_time=2016-01-18T21:31:17
ip_count=19
run=1024
dataset=8
scan=608
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.37583E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=1.97774E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=2.25389E-10
ql4_vset=
ql4_vmon=-9.1424E0
ql4_imon=-1.43874E-10
mult1=-9.16835E-9
mult2=-2.85652E-9
rf_tmon=-4.50358E-3
rf_agc=3.37338E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.62519E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67157E0
bslens_imon=2.66794E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19394E1
lens5a_imon=2.00742E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04957E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=3.1474E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02422E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04388E1
cs_ea1_imon=1.10423E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41908E0
lens1_imon=2.63121E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65029E1
os_ef1alow_imon=2.99207E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.038E1
cs_ea2_imon=1.36354E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.0364E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.28049E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.27652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1503E1
os_ea1_imon=2.37765E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24108E0
cs_ionrep_imon=9.45559E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93765E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=1.9444E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.28213E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-2.92476E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25989E1
iondef3_imon=1.4965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26785E1
iondef2_imon=1.58613E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98239E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=4.04578E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29985E0
ionrepsh_imon=8.54102E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.17894E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48778E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03894E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92619E-1
os_ef2bup_imon=-5.10984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.42779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.307E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02085E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73358E1
iondef1_imon=1.12113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69482E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.89446E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.57011E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-8.06708E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.4759E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.74405E-1
window_imon=-6.15698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.39505E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.68984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.61176E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.70385E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.4275E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07401E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64134E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=7.05873E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.99887E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66457E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.22499E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.84328E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.71285E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22233E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.69503E-1
res40_imon=-2.30596E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16417E-1	-7.98082E-1	-9.13181E0	-9.14254E0	4.43459E-3	9.47952E-2	2.73057E1	-3.2681E1	-3.26191E1	2.68215E1	1.19713E-7	2.50914E-3	2.50914E-3	6.34661E-3	3.0041E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.16607E-1	-7.98249E-1	-9.13193E0	-9.1424E0	4.86374E-3	9.50098E-2	2.73424E1	-3.26725E1	-3.26236E1	2.67103E1	1.19891E-7	2.51182E-3	2.51182E-3	6.33388E-3	2.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16822E-1	-7.98297E-1	-9.13188E0	-9.14233E0	4.3869E-3	9.50336E-2	2.73375E1	-3.26331E1	-3.26408E1	2.68991E1	1.19819E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.99348E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.16631E-1	-7.98059E-1	-9.13179E0	-9.14233E0	4.48227E-3	9.4986E-2	2.73316E1	-3.26626E1	-3.26349E1	2.66742E1	1.198E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16727E-1	-7.9813E-1	-9.13172E0	-9.14228E0	4.3869E-3	9.47475E-2	2.73016E1	-3.26915E1	-3.26012E1	2.70161E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16727E-1	-7.98345E-1	-9.13174E0	-9.14257E0	4.57764E-3	9.49621E-2	2.73594E1	-3.2652E1	-3.26231E1	2.68755E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.1687E-1	-7.98559E-1	-9.13155E0	-9.14223E0	4.52995E-3	9.51529E-2	2.73321E1	-3.26771E1	-3.26386E1	2.66508E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16727E-1	-7.98297E-1	-9.13186E0	-9.14254E0	4.55379E-3	9.51529E-2	2.73187E1	-3.26384E1	-3.26083E1	2.66756E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16679E-1	-7.98249E-1	-9.1316E0	-9.14247E0	4.52995E-3	9.5129E-2	2.72892E1	-3.26396E1	-3.26343E1	2.69025E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16536E-1	-7.9844E-1	-9.13177E0	-9.14249E0	4.33922E-3	9.52482E-2	2.7373E1	-3.26995E1	-3.26536E1	2.68238E1	1.20055E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.16536E-1	-7.98249E-1	-9.13157E0	-9.14259E0	4.36306E-3	9.51052E-2	2.73393E1	-3.26675E1	-3.26272E1	2.67879E1	1.19607E-7	2.52139E-3	2.52139E-3	6.29624E-3	3.01209E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16584E-1	-7.97796E-1	-9.13184E0	-9.14271E0	4.17233E-3	9.52244E-2	2.72833E1	-3.26602E1	-3.2682E1	2.68256E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16774E-1	-7.98345E-1	-9.13188E0	-9.14271E0	4.41074E-3	9.51052E-2	2.73496E1	-3.26705E1	-3.26002E1	2.68593E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16846E-1	-7.98273E-1	-9.13208E0	-9.14245E0	4.57764E-3	9.4986E-2	2.73393E1	-3.26639E1	-3.26338E1	2.67722E1	1.19913E-7	2.51225E-3	2.51225E-3	6.29098E-3	2.9874E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16512E-1	-7.98488E-1	-9.13167E0	-9.14235E0	4.41074E-3	9.53436E-2	2.73358E1	-3.26679E1	-3.2603E1	2.68184E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16989E-1	-7.98297E-1	-9.13222E0	-9.14207E0	4.60148E-3	9.55343E-2	2.73257E1	-3.26773E1	-3.26301E1	2.68123E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.02769E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16727E-1	-7.98512E-1	-9.1321E0	-9.14235E0	4.41074E-3	9.52244E-2	2.73416E1	-3.26863E1	-3.25843E1	2.68777E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.16655E-1	-7.98321E-1	-9.13191E0	-9.14247E0	4.52995E-3	9.51052E-2	2.73556E1	-3.26753E1	-3.25886E1	2.68363E1	1.19941E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.01356E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16369E-1	-7.98249E-1	-9.13188E0	-9.14264E0	4.45843E-3	9.4986E-2	2.73281E1	-3.26661E1	-3.26101E1	2.68018E1	1.19991E-7	2.52179E-3	2.52179E-3	6.34164E-3	3.01337E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16441E-1	-7.98416E-1	-9.13169E0	-9.1424E0	4.41074E-3	9.51767E-2	2.73358E1	-3.26785E1	-3.25989E1	2.69482E1	1.19902E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.99941E-1