[Scan]
initial_time=2016-01-18T21:31:27
final_time=2016-01-18T21:31:54
ip_count=19
run=1024
dataset=8
scan=609
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08875E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.37288E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.94367E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=1.80781E-10
ql4_vset=
ql4_vmon=-9.14268E0
ql4_imon=-1.45793E-10
mult1=-9.72397E-9
mult2=-2.74873E-9
rf_tmon=-5.97243E-3
rf_agc=3.26661E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.68086E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67788E0
bslens_imon=2.32957E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19469E1
lens5a_imon=2.00339E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53876E1
cs_ef1b_imon=3.16984E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0449E1
cs_ea1_imon=1.10236E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39631E0
lens1_imon=2.8649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6473E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03598E1
cs_ea2_imon=1.34534E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84458E1
cs_ef1a_imon=3.04264E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.27163E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11413E1
os_restr1_imon=4.28783E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15097E1
os_ea1_imon=2.3889E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63595E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21212E0
cs_ionrep_imon=9.56355E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.9366E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=1.95489E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.27914E-8
tplens_vset=1.4E-1
tplens_vmon=1.68373E0
tplens_imon=9.43664E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26166E1
iondef3_imon=1.48265E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26213E1
iondef2_imon=1.56191E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98109E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.01695E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26948E0
ionrepsh_imon=8.44421E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3386E1
lens5b_imon=2.17303E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.15072E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49543E0
os_ea2_imon=-7.12113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00473E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71136E1
cs_ef2a_imon=3.16706E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08062E0
os_ef2alow_imon=-2.40429E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32563E-1
os_ef2bup_imon=-5.15322E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.40754E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29615E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02053E1
cs_anode2_imon=2.08E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73193E1
iondef1_imon=1.10653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6843E1
iondef4_imon=1.11005E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.93512E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=7.55327E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14926E0
cs_ionaccel_imon=-9.37738E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47546E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56492E1
einzel_imon=7.76082E-6
window_vset=0.0E0
window_vmon=2.48384E-1
window_imon=-8.54332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39418E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.42916E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.35501E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.34573E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3137E0
defgridb_imon=6.26811E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.43167E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63902E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31847E1
cs_fil1_imon=7.62915E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.38415E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66379E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.22757E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01082E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.0747E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-2.49542E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22139E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.7137E-1
res40_imon=-2.26181E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16464E-1	-7.98464E-1	-9.13208E0	-9.14247E0	4.55379E-3	9.52482E-2	2.73145E1	-3.26862E1	-3.26396E1	2.67367E1	1.19891E-7	2.51603E-3	2.51603E-3	6.33919E-3	3.006E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16417E-1	-7.98249E-1	-9.13198E0	-9.14259E0	4.76837E-3	9.49383E-2	2.7332E1	-3.2664E1	-3.26291E1	2.684E1	1.20004E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16846E-1	-7.98464E-1	-9.1321E0	-9.14226E0	4.8399E-3	9.52005E-2	2.73057E1	-3.26573E1	-3.26254E1	2.68007E1	1.20297E-7	2.51136E-3	2.51136E-3	6.30182E-3	3.01209E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16727E-1	-7.98655E-1	-9.13229E0	-9.14218E0	4.41074E-3	9.50813E-2	2.73081E1	-3.26356E1	-3.25966E1	2.68502E1	1.20192E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16703E-1	-7.98225E-1	-9.13236E0	-9.14254E0	4.26769E-3	9.49144E-2	2.73243E1	-3.26639E1	-3.26038E1	2.69181E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16798E-1	-7.9844E-1	-9.13212E0	-9.14245E0	4.64916E-3	9.49621E-2	2.73281E1	-3.26567E1	-3.26107E1	2.68016E1	1.20174E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16894E-1	-7.98488E-1	-9.13217E0	-9.14237E0	4.52995E-3	9.47714E-2	2.73219E1	-3.26603E1	-3.26362E1	2.68316E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.1687E-1	-7.98631E-1	-9.13198E0	-9.14214E0	4.36306E-3	9.48191E-2	2.73357E1	-3.26627E1	-3.26297E1	2.68262E1	1.19653E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16679E-1	-7.98655E-1	-9.13198E0	-9.1423E0	4.57764E-3	9.4676E-2	2.73078E1	-3.2653E1	-3.26062E1	2.68222E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.97963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16774E-1	-7.98631E-1	-9.13179E0	-9.14266E0	4.22001E-3	9.47952E-2	2.73362E1	-3.26585E1	-3.25923E1	2.68004E1	1.20113E-7	2.51345E-3	2.51345E-3	6.31251E-3	2.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16822E-1	-7.98488E-1	-9.13203E0	-9.14247E0	4.07696E-3	9.48429E-2	2.73063E1	-3.26723E1	-3.26248E1	2.68911E1	1.19514E-7	2.51911E-3	2.51911E-3	6.3074E-3	2.99634E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16631E-1	-7.98106E-1	-9.13215E0	-9.1423E0	4.74453E-3	9.47714E-2	2.73222E1	-3.26499E1	-3.26272E1	2.67487E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16965E-1	-7.97915E-1	-9.13186E0	-9.14223E0	4.19617E-3	9.47952E-2	2.73635E1	-3.26779E1	-3.26337E1	2.6822E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16584E-1	-7.98059E-1	-9.13177E0	-9.1424E0	4.31538E-3	9.50098E-2	2.73314E1	-3.26756E1	-3.26297E1	2.69181E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16822E-1	-7.98202E-1	-9.13205E0	-9.14276E0	4.19617E-3	9.46999E-2	2.73423E1	-3.26947E1	-3.26017E1	2.67858E1	1.19757E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.98222E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16917E-1	-7.98368E-1	-9.13191E0	-9.14264E0	4.36306E-3	9.48906E-2	2.73292E1	-3.26743E1	-3.26479E1	2.68986E1	1.1996E-7	2.51432E-3	2.51432E-3	6.32953E-3	2.98981E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16774E-1	-7.98297E-1	-9.13198E0	-9.14271E0	4.3869E-3	9.47714E-2	2.73417E1	-3.26458E1	-3.26392E1	2.67854E1	1.19942E-7	2.51944E-3	2.51944E-3	6.29365E-3	2.99151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16655E-1	-7.98273E-1	-9.13177E0	-9.14249E0	4.3869E-3	9.48668E-2	2.73417E1	-3.26825E1	-3.265E1	2.68064E1	1.19809E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16727E-1	-7.98154E-1	-9.13169E0	-9.14259E0	4.24385E-3	9.49144E-2	2.73139E1	-3.26608E1	-3.26284E1	2.68372E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16679E-1	-7.98559E-1	-9.13179E0	-9.14268E0	4.55379E-3	9.50098E-2	2.73193E1	-3.26213E1	-3.26166E1	2.6843E1	1.20106E-7	2.52276E-3	2.52276E-3	6.34518E-3	3.00966E-1