[Scan]
initial_time=2016-01-18T21:33:55
final_time=2016-01-18T21:34:19
ip_count=19
run=1024
dataset=8
scan=613
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.37611E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=1.96272E-9
ql3_vset=
ql3_vmon=-9.13188E0
ql3_imon=1.67036E-10
ql4_vset=
ql4_vmon=-9.14273E0
ql4_imon=-1.3752E-10
mult1=-9.3575E-9
mult2=-2.65858E-9
rf_tmon=-4.60386E-3
rf_agc=3.2908E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.66224E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62588E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=2.01335E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=3.15353E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02366E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04483E1
cs_ea1_imon=1.10418E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39599E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65017E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0357E1
cs_ea2_imon=1.3522E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.05118E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.27043E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.27761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14873E1
os_ea1_imon=2.39295E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=9.44124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=1.96026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.26975E-8
tplens_vset=1.4E-1
tplens_vmon=1.65585E0
tplens_imon=-1.15493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26095E1
iondef3_imon=1.52272E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27039E1
iondef2_imon=1.57283E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98025E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.02776E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26351E0
ionrepsh_imon=8.59407E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49423E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31662E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.40905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.08748E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73151E1
iondef1_imon=1.1013E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69764E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.95132E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.535E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-8.67976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-6.73362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92682E3
multa_neg_imon=7.3756E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.49599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46172E0
defgridb_imon=6.22201E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.41916E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07984E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63784E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31831E1
cs_fil1_imon=7.89365E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.30521E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6659E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.33766E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.07709E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22342E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.97444E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16822E-1	-7.98178E-1	-9.13212E0	-9.14261E0	4.62532E-3	9.48906E-2	2.73317E1	-3.26729E1	-3.26075E1	2.68354E1	1.20004E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.98156E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16536E-1	-7.97939E-1	-9.132E0	-9.14257E0	4.45843E-3	9.49144E-2	2.73207E1	-3.26747E1	-3.26182E1	2.67968E1	1.1974E-7	2.52025E-3	2.52025E-3	6.30212E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16727E-1	-7.98059E-1	-9.13203E0	-9.14252E0	4.52995E-3	9.47714E-2	2.7341E1	-3.26428E1	-3.26625E1	2.68671E1	1.20191E-7	2.52473E-3	2.52473E-3	6.33538E-3	2.9829E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.16703E-1	-7.98035E-1	-9.13215E0	-9.14297E0	4.74453E-3	9.47237E-2	2.73225E1	-3.26729E1	-3.26248E1	2.6785E1	1.20092E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16846E-1	-7.98154E-1	-9.13198E0	-9.14252E0	4.48227E-3	9.48191E-2	2.7311E1	-3.2649E1	-3.26189E1	2.68514E1	1.20311E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16631E-1	-7.98297E-1	-9.13193E0	-9.14252E0	4.55379E-3	9.48429E-2	2.73153E1	-3.26693E1	-3.26242E1	2.68214E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.17013E-1	-7.98345E-1	-9.13212E0	-9.14249E0	4.673E-3	9.45807E-2	2.73291E1	-3.26573E1	-3.26398E1	2.68142E1	1.19953E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.16798E-1	-7.98225E-1	-9.13157E0	-9.14264E0	4.55379E-3	9.46999E-2	2.73333E1	-3.26633E1	-3.26116E1	2.68202E1	1.19925E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.9829E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-8.16703E-1	-7.98273E-1	-9.13157E0	-9.14259E0	4.8399E-3	9.46283E-2	2.72979E1	-3.26344E1	-3.26488E1	2.68358E1	1.20106E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.9892E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.1687E-1	-7.98011E-1	-9.13212E0	-9.14273E0	4.72069E-3	9.47714E-2	2.7321E1	-3.26284E1	-3.26119E1	2.67532E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.16607E-1	-7.98035E-1	-9.13196E0	-9.14268E0	4.72069E-3	9.48191E-2	2.7355E1	-3.26579E1	-3.26206E1	2.69469E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16822E-1	-7.97892E-1	-9.13196E0	-9.14268E0	4.673E-3	9.48191E-2	2.73308E1	-3.26401E1	-3.26138E1	2.6933E1	1.198E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16941E-1	-7.97987E-1	-9.13174E0	-9.14257E0	4.45843E-3	9.48191E-2	2.73434E1	-3.26714E1	-3.26467E1	2.68296E1	1.19819E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00942E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16751E-1	-7.98059E-1	-9.13193E0	-9.14266E0	4.43459E-3	9.49144E-2	2.73467E1	-3.26719E1	-3.26223E1	2.66747E1	1.20017E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.9978E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16965E-1	-7.98273E-1	-9.13179E0	-9.14273E0	4.3869E-3	9.49621E-2	2.7311E1	-3.26708E1	-3.26018E1	2.68731E1	1.20069E-7	2.52538E-3	2.52538E-3	6.31837E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.1687E-1	-7.98225E-1	-9.13177E0	-9.14257E0	4.60148E-3	9.49383E-2	2.74205E1	-3.27306E1	-3.25143E1	2.68389E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.97445E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16846E-1	-7.98082E-1	-9.13205E0	-9.14264E0	4.72069E-3	9.48906E-2	2.73399E1	-3.2675E1	-3.26166E1	2.69199E1	1.19697E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9892E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.17084E-1	-7.98297E-1	-9.13196E0	-9.14257E0	4.48227E-3	9.51529E-2	2.7359E1	-3.26976E1	-3.26383E1	2.66911E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.17156E-1	-7.98321E-1	-9.13172E0	-9.14259E0	4.72069E-3	9.51529E-2	2.73541E1	-3.26809E1	-3.26319E1	2.68605E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16894E-1	-7.98202E-1	-9.13188E0	-9.14273E0	4.57764E-3	9.50575E-2	2.73151E1	-3.27039E1	-3.26095E1	2.69764E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9943E-1