[Scan]
initial_time=2016-01-18T21:34:58
final_time=2016-01-18T21:35:20
ip_count=19
run=1024
dataset=8
scan=615
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.37499E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.95564E-9
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=1.5707E-10
ql4_vset=
ql4_vmon=-9.14259E0
ql4_imon=-1.24645E-10
mult1=-9.4755E-9
mult2=-2.79247E-9
rf_tmon=-5.23942E-3
rf_agc=3.29611E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.72108E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.66006E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19512E1
lens5a_imon=2.02014E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05228E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=3.17083E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04693E1
cs_ea1_imon=1.08856E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39262E0
lens1_imon=2.80517E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.34234E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=3.03063E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.26884E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.26751E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=2.3939E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24266E0
cs_ionrep_imon=9.4982E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93678E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=1.9635E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.27863E-8
tplens_vset=1.4E-1
tplens_vmon=1.65795E0
tplens_imon=-1.71468E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25858E1
iondef3_imon=1.50728E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.56214E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98102E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.03755E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27746E0
ionrepsh_imon=8.53548E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.14452E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51814E0
os_ea2_imon=-6.49289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.40687E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11087E1
os_restr2_imon=3.41193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.29327E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66869E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.94496E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.52882E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-7.81481E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02115E2
cs_ionfocb_imon=1.47478E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56591E1
einzel_imon=7.87885E-6
window_vset=0.0E0
window_vmon=2.37164E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.38871E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.80825E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.33916E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50005E0
defgridb_imon=6.05081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33239E1
os_fil1_imon=9.43093E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08164E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63894E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31814E1
cs_fil1_imon=7.71946E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.55748E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66399E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.117E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9759E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22169E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.97394E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.21761E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09325E0	-8.1656E-1	-7.97844E-1	-9.13179E0	-9.14237E0	5.00679E-3	9.49383E-2	2.73293E1	-3.26667E1	-3.26472E1	2.68611E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9943E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.16751E-1	-7.98202E-1	-9.13174E0	-9.14235E0	4.33922E-3	9.48191E-2	2.73241E1	-3.26536E1	-3.26413E1	2.68424E1	1.19705E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09294E0	-8.16655E-1	-7.98297E-1	-9.13196E0	-9.14237E0	4.74453E-3	9.48429E-2	2.73434E1	-3.26573E1	-3.26242E1	2.6935E1	1.19819E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.98554E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09302E0	-8.16536E-1	-7.98106E-1	-9.13179E0	-9.1423E0	5.05447E-3	9.49144E-2	2.72991E1	-3.26735E1	-3.26134E1	2.68743E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29128E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09302E0	-8.1656E-1	-7.98249E-1	-9.13227E0	-9.14252E0	4.72069E-3	9.4986E-2	2.73228E1	-3.26478E1	-3.26266E1	2.66848E1	1.20017E-7	2.51443E-3	2.51443E-3	6.28006E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09325E0	-8.16751E-1	-7.98273E-1	-9.13174E0	-9.14249E0	4.72069E-3	9.48906E-2	2.73081E1	-3.26591E1	-3.26398E1	2.69602E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.16679E-1	-7.98225E-1	-9.13188E0	-9.14245E0	4.81606E-3	9.50336E-2	2.73303E1	-3.2653E1	-3.2611E1	2.69271E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.16631E-1	-7.98154E-1	-9.13184E0	-9.14233E0	4.72069E-3	9.53674E-2	2.7324E1	-3.26815E1	-3.26148E1	2.68348E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.16751E-1	-7.98345E-1	-9.13227E0	-9.14233E0	4.55379E-3	9.48429E-2	2.7311E1	-3.26526E1	-3.25989E1	2.67103E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16679E-1	-7.98368E-1	-9.13203E0	-9.14278E0	4.76837E-3	9.48906E-2	2.72953E1	-3.26529E1	-3.2637E1	2.69193E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9943E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16774E-1	-7.98488E-1	-9.13198E0	-9.14266E0	4.95911E-3	9.48429E-2	2.73187E1	-3.26537E1	-3.26508E1	2.67866E1	1.20174E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16607E-1	-7.98202E-1	-9.13186E0	-9.14266E0	4.79221E-3	9.48906E-2	2.73183E1	-3.26494E1	-3.26134E1	2.68328E1	1.20055E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16703E-1	-7.98512E-1	-9.13179E0	-9.14268E0	4.88758E-3	9.50336E-2	2.73322E1	-3.26602E1	-3.26213E1	2.68047E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.1656E-1	-7.98202E-1	-9.13219E0	-9.14271E0	4.86374E-3	9.49144E-2	2.73169E1	-3.26561E1	-3.26508E1	2.68869E1	1.19697E-7	2.51954E-3	2.51954E-3	6.28592E-3	2.9841E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16274E-1	-7.98035E-1	-9.13177E0	-9.14237E0	4.60148E-3	9.49383E-2	2.7321E1	-3.26826E1	-3.26036E1	2.68325E1	1.19861E-7	2.52538E-3	2.52538E-3	6.29098E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16894E-1	-7.98345E-1	-9.13205E0	-9.14268E0	4.43459E-3	9.4986E-2	2.74502E1	-3.26823E1	-3.2487E1	2.67502E1	1.19902E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00453E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.1656E-1	-7.98249E-1	-9.13129E0	-9.14249E0	4.05312E-3	9.46283E-2	2.73255E1	-3.26573E1	-3.26506E1	2.69049E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16703E-1	-7.98106E-1	-9.13165E0	-9.14259E0	4.1008E-3	9.5129E-2	2.73375E1	-3.26549E1	-3.26225E1	2.67931E1	1.20244E-7	2.52139E-3	2.52139E-3	6.29067E-3	3.03081E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16488E-1	-7.98106E-1	-9.13162E0	-9.14249E0	4.26769E-3	9.48906E-2	2.73105E1	-3.26392E1	-3.2632E1	2.69464E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16512E-1	-7.98249E-1	-9.13181E0	-9.14259E0	4.48227E-3	9.48191E-2	2.73303E1	-3.26783E1	-3.25858E1	2.66869E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.97394E-1