[Scan]
initial_time=2016-01-18T21:35:28
final_time=2016-01-18T21:35:51
ip_count=19
run=1024
dataset=8
scan=616
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.37118E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=1.96484E-9
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=1.83487E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-1.52588E-10
mult1=-9.55847E-9
mult2=-2.73698E-9
rf_tmon=-4.02576E-3
rf_agc=3.42117E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.68419E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68332E0
bslens_imon=2.59281E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.195E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53916E1
cs_ef1b_imon=3.16497E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=1.10874E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36607E0
lens1_imon=2.73439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64805E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.36853E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=3.04507E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.27069E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.27288E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.40204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.09581E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22024E0
cs_ionrep_imon=9.50881E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.9359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01879E1
cs_anode1_imon=1.97365E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.26688E-8
tplens_vset=1.4E-1
tplens_vmon=1.66857E0
tplens_imon=-1.85626E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25871E1
iondef3_imon=1.52214E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26467E1
iondef2_imon=1.56497E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=4.01982E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28985E0
ionrepsh_imon=8.49654E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33528E1
lens5b_imon=2.1695E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74449E1
cs_ef2b_imon=3.13508E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49514E0
os_ea2_imon=-5.785E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00665E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71153E1
cs_ef2a_imon=3.16636E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08178E0
os_ef2alow_imon=-2.37997E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96072E-1
os_ef2bup_imon=-5.12194E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11315E1
os_restr2_imon=3.41102E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.28265E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01931E1
cs_anode2_imon=2.08938E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73493E1
iondef1_imon=1.10414E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69019E1
iondef4_imon=1.10171E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.92951E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.54077E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-8.82134E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47476E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56457E1
einzel_imon=7.90331E-6
window_vset=0.0E0
window_vmon=2.54176E-1
window_imon=-7.5355E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86576E1
mask2_imon=-5.5546E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.86653E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.79055E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.56214E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4026E0
defgridb_imon=6.05081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.43208E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07885E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63959E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31801E1
cs_fil1_imon=6.88197E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.73168E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66226E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9316E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29277E-1
cs_fil2_imon=-2.08418E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19993E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22255E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18865E-1
res40_imon=-2.35217E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.16441E-1	-7.98059E-1	-9.13169E0	-9.14266E0	4.88758E-3	9.52721E-2	2.73576E1	-3.26549E1	-3.26325E1	2.67674E1	1.20004E-7	2.51203E-3	2.51203E-3	6.29128E-3	3.00197E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16536E-1	-7.9813E-1	-9.13188E0	-9.14252E0	4.64916E-3	9.52005E-2	2.73369E1	-3.26597E1	-3.26248E1	2.69325E1	1.19902E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.1656E-1	-7.98297E-1	-9.13208E0	-9.14254E0	4.55379E-3	9.48429E-2	2.73092E1	-3.26461E1	-3.26496E1	2.67914E1	1.20069E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.01871E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16679E-1	-7.98154E-1	-9.13203E0	-9.14288E0	4.45843E-3	9.50813E-2	2.73081E1	-3.26332E1	-3.26248E1	2.68941E1	1.198E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16774E-1	-7.98488E-1	-9.13198E0	-9.14249E0	4.33922E-3	9.48906E-2	2.72991E1	-3.26705E1	-3.26218E1	2.67734E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.1687E-1	-7.98416E-1	-9.1321E0	-9.14247E0	4.86374E-3	9.4986E-2	2.73287E1	-3.26478E1	-3.26231E1	2.69373E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.16917E-1	-7.98297E-1	-9.13174E0	-9.14261E0	4.88758E-3	9.46999E-2	2.73219E1	-3.26675E1	-3.26236E1	2.68292E1	1.20017E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.17013E-1	-7.98106E-1	-9.13181E0	-9.14259E0	4.86374E-3	9.48429E-2	2.73093E1	-3.26332E1	-3.26368E1	2.68328E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.1706E-1	-7.98607E-1	-9.13181E0	-9.14266E0	4.60148E-3	9.49621E-2	2.72973E1	-3.26561E1	-3.26224E1	2.68256E1	1.20122E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16965E-1	-7.98321E-1	-9.132E0	-9.14261E0	4.62532E-3	9.48906E-2	2.73529E1	-3.26254E1	-3.2593E1	2.68974E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16774E-1	-7.98178E-1	-9.13212E0	-9.14257E0	4.74453E-3	9.49621E-2	2.73165E1	-3.26494E1	-3.26416E1	2.67674E1	1.20106E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16989E-1	-7.97677E-1	-9.13165E0	-9.14223E0	4.60148E-3	9.50098E-2	2.73303E1	-3.26933E1	-3.26242E1	2.6968E1	1.19809E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16774E-1	-7.97987E-1	-9.13157E0	-9.1424E0	4.52995E-3	9.50098E-2	2.73075E1	-3.2652E1	-3.26349E1	2.6801E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16417E-1	-7.98011E-1	-9.13167E0	-9.14245E0	4.74453E-3	9.50336E-2	2.73279E1	-3.26579E1	-3.26344E1	2.6843E1	1.19861E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16488E-1	-7.97725E-1	-9.13186E0	-9.14228E0	4.43459E-3	9.48429E-2	2.73285E1	-3.26675E1	-3.26344E1	2.69548E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.97963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16464E-1	-7.97868E-1	-9.13174E0	-9.14252E0	4.50611E-3	9.50575E-2	2.72847E1	-3.26801E1	-3.26807E1	2.68088E1	1.2026E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.96634E-1
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16727E-1	-7.98082E-1	-9.13167E0	-9.14268E0	4.8399E-3	9.53674E-2	2.73165E1	-3.26554E1	-3.26194E1	2.68064E1	1.19766E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.98554E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16655E-1	-7.98225E-1	-9.13143E0	-9.14249E0	4.79221E-3	9.5129E-2	2.73243E1	-3.26392E1	-3.262E1	2.68412E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.1656E-1	-7.98225E-1	-9.1315E0	-9.14266E0	4.69685E-3	9.48429E-2	2.73075E1	-3.26537E1	-3.26254E1	2.69153E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33166E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.1656E-1	-7.97987E-1	-9.13181E0	-9.14218E0	4.43459E-3	9.48429E-2	2.73493E1	-3.26467E1	-3.25871E1	2.69019E1