[Scan]
initial_time=2016-01-18T21:35:59
final_time=2016-01-18T21:36:21
ip_count=19
run=1024
dataset=8
scan=617
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=1.37847E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=1.96264E-9
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=1.85442E-10
ql4_vset=
ql4_vmon=-9.14235E0
ql4_imon=-1.09565E-10
mult1=-9.81263E-9
mult2=-2.6208E-9
rf_tmon=-5.53984E-3
rf_agc=3.22521E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.7222E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68686E0
bslens_imon=2.37337E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=2.01093E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05192E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=3.16326E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=1.10308E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39321E0
lens1_imon=2.7981E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.34553E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.03892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.27408E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11574E1
os_restr1_imon=4.28265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14928E1
os_ea1_imon=2.3939E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2055E0
cs_ionrep_imon=9.45572E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=1.95989E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.27343E-8
tplens_vset=1.4E-1
tplens_vmon=1.67152E0
tplens_imon=-1.6085E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2596E1
iondef3_imon=1.52108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.57169E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98109E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.04152E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23086E0
ionrepsh_imon=8.64166E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51047E0
os_ea2_imon=-7.97944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.40687E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=3.41662E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.28052E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.08279E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.09741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68502E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.95077E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.55869E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.89687E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86314E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92719E3
multa_neg_imon=7.77096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.69145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.31084E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.42654E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08116E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64064E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=7.9357E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.56349E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66553E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20564E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91262E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22288E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.90837E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16655E-1	-7.98488E-1	-9.1315E0	-9.1428E0	4.64916E-3	9.52244E-2	2.72939E1	-3.26124E1	-3.26425E1	2.67821E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99941E-1
2.0E0	2.1E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.1656E-1	-7.98416E-1	-9.13169E0	-9.14266E0	4.29153E-3	9.4986E-2	2.72979E1	-3.26789E1	-3.26182E1	2.69155E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16512E-1	-7.98345E-1	-9.13184E0	-9.14228E0	4.55379E-3	9.49621E-2	2.72877E1	-3.26482E1	-3.26068E1	2.70434E1	1.20031E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.0201E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16679E-1	-7.98512E-1	-9.13186E0	-9.14233E0	4.62532E-3	9.50336E-2	2.73169E1	-3.26555E1	-3.26195E1	2.69878E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16965E-1	-7.98225E-1	-9.13193E0	-9.14235E0	4.81606E-3	9.51052E-2	2.7349E1	-3.26284E1	-3.2641E1	2.70389E1	1.198E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.1687E-1	-7.98321E-1	-9.13188E0	-9.14264E0	4.673E-3	9.48906E-2	2.73466E1	-3.26488E1	-3.26194E1	2.67938E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.1656E-1	-7.98535E-1	-9.132E0	-9.14273E0	4.8399E-3	9.4676E-2	2.73243E1	-3.2644E1	-3.26086E1	2.6646E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16751E-1	-7.98249E-1	-9.13212E0	-9.14271E0	4.43459E-3	9.50098E-2	2.73237E1	-3.26464E1	-3.26506E1	2.69031E1	1.19861E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16894E-1	-7.98321E-1	-9.13196E0	-9.14276E0	4.33922E-3	9.49383E-2	2.73081E1	-3.26585E1	-3.25912E1	2.67716E1	1.19861E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16822E-1	-7.98178E-1	-9.13222E0	-9.14268E0	4.62532E-3	9.49383E-2	2.73231E1	-3.26741E1	-3.26254E1	2.67619E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16488E-1	-7.98106E-1	-9.13203E0	-9.14288E0	4.62532E-3	9.51052E-2	2.73228E1	-3.2662E1	-3.26372E1	2.68749E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16369E-1	-7.97915E-1	-9.13196E0	-9.14276E0	4.60148E-3	9.50575E-2	2.73225E1	-3.26579E1	-3.262E1	2.68036E1	1.20226E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16727E-1	-7.98154E-1	-9.13174E0	-9.14292E0	4.43459E-3	9.49383E-2	2.73231E1	-3.26729E1	-3.26056E1	2.68881E1	1.19749E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16798E-1	-7.98106E-1	-9.1316E0	-9.14292E0	4.55379E-3	9.48906E-2	2.73652E1	-3.26813E1	-3.26218E1	2.6855E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16584E-1	-7.98655E-1	-9.13198E0	-9.14276E0	4.64916E-3	9.47475E-2	2.73039E1	-3.26729E1	-3.26224E1	2.69379E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09325E0	-8.16751E-1	-7.98392E-1	-9.13222E0	-9.14276E0	4.45843E-3	9.4986E-2	2.73417E1	-3.2641E1	-3.26224E1	2.6664E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01609E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0934E0	-8.16607E-1	-7.98535E-1	-9.13203E0	-9.14268E0	4.52995E-3	9.49144E-2	2.73257E1	-3.2636E1	-3.26413E1	2.69181E1	1.19809E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09294E0	-8.16536E-1	-7.98345E-1	-9.13217E0	-9.14226E0	4.64916E-3	9.5129E-2	2.73135E1	-3.26627E1	-3.26482E1	2.69421E1	1.20278E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.01871E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09333E0	-8.16107E-1	-7.98464E-1	-9.13212E0	-9.14257E0	4.88758E-3	9.48191E-2	2.73417E1	-3.26797E1	-3.26579E1	2.67144E1	1.19851E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16202E-1	-7.98416E-1	-9.13205E0	-9.14235E0	5.17368E-3	9.50098E-2	2.73105E1	-3.26603E1	-3.2596E1	2.68502E1	1.2026E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.0148E-1