[Scan]
initial_time=2016-01-18T21:36:29
final_time=2016-01-18T21:36:51
ip_count=19
run=1024
dataset=8
scan=618
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=1.37443E-8
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=1.94851E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=1.35469E-10
ql4_vset=
ql4_vmon=-9.14254E0
ql4_imon=-1.52338E-10
mult1=-1.09771E-8
mult2=-2.77029E-9
rf_tmon=-2.73387E-3
rf_agc=3.51319E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.69437E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66674E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.205E1
lens5a_imon=1.99425E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=3.15617E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04435E1
cs_ea1_imon=1.09769E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39299E0
lens1_imon=2.59904E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64859E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.36626E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=3.03869E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.27515E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.28104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14777E1
os_ea1_imon=2.40882E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.08398E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21124E0
cs_ionrep_imon=9.38356E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.93568E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01998E1
cs_anode1_imon=1.96548E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.28284E-8
tplens_vset=1.4E-1
tplens_vmon=1.6931E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26537E1
iondef3_imon=1.51551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.54615E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.03982E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27493E0
ionrepsh_imon=8.64815E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33477E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74649E1
cs_ef2b_imon=3.14237E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52968E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00475E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71205E1
cs_ef2a_imon=3.16997E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07962E0
os_ef2alow_imon=-2.41794E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17082E-1
os_ef2bup_imon=-5.13193E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11188E1
os_restr2_imon=3.41023E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.09039E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72927E1
iondef1_imon=1.11392E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67043E1
iondef4_imon=1.11378E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.9227E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.55719E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12306E0
cs_ionaccel_imon=-9.56568E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47541E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56234E1
einzel_imon=7.79399E-6
window_vset=0.0E0
window_vmon=2.83863E-1
window_imon=-7.79646E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39254E-4
mask2_vset=0.0E0
mask2_vmon=-1.86409E1
mask2_imon=-5.07186E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.83703E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.22562E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.14128E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55796E0
defgridb_imon=6.27609E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.41966E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08078E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63981E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31794E1
cs_fil1_imon=7.91233E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.05642E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66701E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.54376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18595E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.89148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31368E-1
cs_fil2_imon=-2.32556E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24827E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22251E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.02594E-1
res40_imon=-2.33656E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09294E0	-8.16488E-1	-7.98655E-1	-9.13198E0	-9.14242E0	4.60148E-3	9.50336E-2	2.7321E1	-3.26148E1	-3.26307E1	2.69031E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02133E-1
2.0E0	5.4E1	0.0E0	3.16E2	1.6E2	-2.09286E0	-8.16607E-1	-7.98249E-1	-9.13186E0	-9.14252E0	4.72069E-3	9.50098E-2	2.73363E1	-3.26389E1	-3.26248E1	2.68743E1	1.19953E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.16631E-1	-7.98011E-1	-9.13184E0	-9.14268E0	4.81606E-3	9.48906E-2	2.73358E1	-3.26413E1	-3.25818E1	2.6822E1	1.19872E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00942E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16751E-1	-7.98106E-1	-9.13191E0	-9.14266E0	4.69685E-3	9.50575E-2	2.72997E1	-3.26416E1	-3.2635E1	2.6828E1	1.20004E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16703E-1	-7.98368E-1	-9.13165E0	-9.14242E0	4.62532E-3	9.48429E-2	2.73086E1	-3.26396E1	-3.26284E1	2.67949E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.98222E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09302E0	-8.16774E-1	-7.9813E-1	-9.13196E0	-9.14254E0	4.69685E-3	9.50336E-2	2.73183E1	-3.26434E1	-3.26344E1	2.6968E1	1.19953E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09333E0	-8.16655E-1	-7.98178E-1	-9.13174E0	-9.14254E0	4.79221E-3	9.48668E-2	2.72859E1	-3.26554E1	-3.26284E1	2.70923E1	1.19601E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09348E0	-8.16655E-1	-7.98297E-1	-9.13165E0	-9.14271E0	4.64916E-3	9.50336E-2	2.73333E1	-3.26615E1	-3.2638E1	2.68442E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16298E-1	-7.98178E-1	-9.13181E0	-9.14242E0	4.72069E-3	9.49621E-2	2.73022E1	-3.26382E1	-3.26254E1	2.6661E1	1.20383E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.16703E-1	-7.97987E-1	-9.13169E0	-9.14273E0	4.69685E-3	9.52721E-2	2.72919E1	-3.26621E1	-3.26735E1	2.68831E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.16464E-1	-7.98011E-1	-9.13174E0	-9.14233E0	4.76837E-3	9.49383E-2	2.73314E1	-3.26758E1	-3.26445E1	2.67632E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.16607E-1	-7.9813E-1	-9.13188E0	-9.14259E0	4.673E-3	9.48906E-2	2.73207E1	-3.2652E1	-3.26104E1	2.66554E1	1.20064E-7	2.5165E-3	2.5165E-3	6.33297E-3	3.02097E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.17299E-1	-7.98392E-1	-9.13196E0	-9.14285E0	4.91142E-3	9.46522E-2	2.72985E1	-3.26609E1	-3.26416E1	2.66881E1	1.20171E-7	2.51642E-3	2.51642E-3	6.32483E-3	3.02025E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16703E-1	-7.98178E-1	-9.13184E0	-9.14257E0	4.8399E-3	9.50336E-2	2.73328E1	-3.26242E1	-3.26077E1	2.70569E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09325E0	-8.16727E-1	-7.97939E-1	-9.13155E0	-9.14242E0	4.79221E-3	9.49621E-2	2.73357E1	-3.26729E1	-3.26446E1	2.70232E1	1.20069E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16584E-1	-7.9813E-1	-9.13181E0	-9.14242E0	4.3869E-3	9.50813E-2	2.73128E1	-3.26661E1	-3.26372E1	2.69252E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3514E-3	3.00824E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.16965E-1	-7.98297E-1	-9.13184E0	-9.14237E0	4.52995E-3	9.50336E-2	2.7338E1	-3.26737E1	-3.26014E1	2.66854E1	1.19991E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.17132E-1	-7.98368E-1	-9.13162E0	-9.1424E0	4.55379E-3	9.48668E-2	2.73529E1	-3.26661E1	-3.26272E1	2.66598E1	1.20132E-7	2.51624E-3	2.51624E-3	6.3201E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-8.17037E-1	-7.98225E-1	-9.13181E0	-9.14254E0	4.45843E-3	9.46999E-2	2.73099E1	-3.26476E1	-3.26044E1	2.66821E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-8.16965E-1	-7.98059E-1	-9.1316E0	-9.14254E0	4.50611E-3	9.50575E-2	2.72927E1	-3.26649E1	-3.26537E1	2.67043E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9943E-1