[Scan]
initial_time=2016-01-18T21:36:59
final_time=2016-01-18T21:37:22
ip_count=19
run=1024
dataset=8
scan=619
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.0874E-4
ql1_vset=
ql1_vmon=-8.1718E-1
ql1_imon=1.37836E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.96534E-9
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=1.66059E-10
ql4_vset=
ql4_vmon=-9.14247E0
ql4_imon=-1.24121E-10
mult1=-1.06039E-8
mult2=-2.74633E-9
rf_tmon=-4.27674E-3
rf_agc=3.36957E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=1.68958E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19526E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=3.16506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.10202E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.37311E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=3.04108E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.27486E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.28553E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.38611E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63413E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20644E0
cs_ionrep_imon=9.49531E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=1.96026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.27354E-8
tplens_vset=1.4E-1
tplens_vmon=1.65285E0
tplens_imon=-4.69992E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26493E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26407E1
iondef2_imon=1.55913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98083E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.03637E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27974E0
ionrepsh_imon=8.47151E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33592E1
lens5b_imon=2.16404E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74393E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5411E0
os_ea2_imon=-8.40089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00735E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.15893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.46678E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=3.41446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.27225E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.08603E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72855E1
iondef1_imon=1.11824E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.10972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.95712E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.55332E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56591E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-7.74273E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.41525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.27466E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23916E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.42708E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07972E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63929E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31827E1
cs_fil1_imon=7.06474E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0026E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66682E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1442E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.03714E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70684E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22344E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19959E-1
res40_imon=-2.30596E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.16774E-1	-7.9782E-1	-9.13172E0	-9.1428E0	4.72069E-3	9.46522E-2	2.73157E1	-3.26632E1	-3.26461E1	2.70839E1	1.20174E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01347E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16774E-1	-7.98106E-1	-9.13203E0	-9.14271E0	4.43459E-3	9.47952E-2	2.73307E1	-3.26928E1	-3.2611E1	2.69616E1	1.20158E-7	2.50989E-3	2.50989E-3	6.29665E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16941E-1	-7.97987E-1	-9.13212E0	-9.14271E0	4.55379E-3	9.52005E-2	2.73341E1	-3.26886E1	-3.26266E1	2.68362E1	1.19991E-7	2.51611E-3	2.51611E-3	6.31879E-3	2.98092E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16774E-1	-7.97796E-1	-9.13165E0	-9.14276E0	4.86374E-3	9.50098E-2	2.73308E1	-3.26713E1	-3.26542E1	2.68238E1	1.20078E-7	2.51575E-3	2.51575E-3	6.33341E-3	2.97786E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-8.16846E-1	-7.98225E-1	-9.13181E0	-9.1428E0	4.62532E-3	9.47475E-2	2.73033E1	-3.2662E1	-3.26095E1	2.67636E1	1.19872E-7	2.51693E-3	2.51693E-3	6.35786E-3	2.95923E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16774E-1	-7.98368E-1	-9.132E0	-9.1424E0	4.62532E-3	9.50098E-2	2.73195E1	-3.26482E1	-3.25888E1	2.69229E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.97647E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16989E-1	-7.98178E-1	-9.13205E0	-9.1424E0	4.48227E-3	9.48668E-2	2.73151E1	-3.26614E1	-3.26402E1	2.68388E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17156E-1	-7.97963E-1	-9.13174E0	-9.14283E0	4.50611E-3	9.4986E-2	2.72883E1	-3.26657E1	-3.26092E1	2.68665E1	1.198E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16774E-1	-7.98035E-1	-9.13169E0	-9.1429E0	4.64916E-3	9.50336E-2	2.73027E1	-3.26398E1	-3.259E1	2.68382E1	1.20226E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16536E-1	-7.9813E-1	-9.13155E0	-9.14257E0	4.74453E-3	9.5129E-2	2.73594E1	-3.26773E1	-3.26107E1	2.67816E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16798E-1	-7.98225E-1	-9.13155E0	-9.14261E0	4.88758E-3	9.50336E-2	2.73171E1	-3.26993E1	-3.2599E1	2.6919E1	1.19749E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16727E-1	-7.98249E-1	-9.13169E0	-9.14259E0	4.91142E-3	9.49621E-2	2.73303E1	-3.26398E1	-3.26344E1	2.69126E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.1687E-1	-7.97915E-1	-9.13165E0	-9.14276E0	5.05447E-3	9.52244E-2	2.73123E1	-3.2641E1	-3.26356E1	2.68166E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16774E-1	-7.98035E-1	-9.1316E0	-9.14266E0	4.88758E-3	9.47475E-2	2.73279E1	-3.26536E1	-3.26218E1	2.67986E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00824E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16846E-1	-7.98273E-1	-9.13179E0	-9.14276E0	4.52995E-3	9.4676E-2	2.73263E1	-3.26596E1	-3.26089E1	2.68911E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16965E-1	-7.9844E-1	-9.13165E0	-9.14247E0	4.69685E-3	9.48429E-2	2.72965E1	-3.26744E1	-3.26401E1	2.67607E1	1.198E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.99941E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.16846E-1	-7.98249E-1	-9.13155E0	-9.14271E0	4.86374E-3	9.49621E-2	2.73617E1	-3.26632E1	-3.2626E1	2.68677E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.97499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16846E-1	-7.98345E-1	-9.13153E0	-9.1423E0	4.74453E-3	9.46999E-2	2.7347E1	-3.2639E1	-3.26372E1	2.68557E1	1.198E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.1718E-1	-7.98202E-1	-9.13184E0	-9.14259E0	4.74453E-3	9.4676E-2	2.73139E1	-3.26313E1	-3.26402E1	2.68244E1	1.198E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.1718E-1	-7.98321E-1	-9.13205E0	-9.14247E0	4.81606E-3	9.48191E-2	2.72855E1	-3.26407E1	-3.26493E1	2.68052E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01223E-1