[Scan]
initial_time=2016-01-18T21:37:30
final_time=2016-01-18T21:37:52
ip_count=19
run=1024
dataset=8
scan=620
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.37027E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=1.96441E-9
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=1.44112E-10
ql4_vset=
ql4_vmon=-9.14278E0
ql4_imon=-1.18148E-10
mult1=-9.63202E-9
mult2=-2.71861E-9
rf_tmon=-4.87893E-3
rf_agc=3.24624E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.70809E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.32028E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19683E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05121E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=3.16434E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04693E1
cs_ea1_imon=1.10697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38436E0
lens1_imon=2.64944E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03649E1
cs_ea2_imon=1.36853E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.04649E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.27427E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=4.27544E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15081E1
os_ea1_imon=2.40133E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21375E0
cs_ionrep_imon=9.44157E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=1.96602E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.27784E-8
tplens_vset=1.4E-1
tplens_vmon=1.68214E0
tplens_imon=-3.66136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25918E1
iondef3_imon=1.51329E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.05309E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28218E0
ionrepsh_imon=8.47531E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.16242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49101E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00694E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.37083E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23853E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11075E1
os_restr2_imon=3.41193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7346E1
iondef1_imon=1.11122E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.89879E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.55052E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-8.82392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47529E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.84281E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-4.89559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.66124E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.92151E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.34624E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.41351E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07648E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63901E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31835E1
cs_fil1_imon=7.76751E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.27517E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66604E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22273E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.1215E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16941E-1	-7.98225E-1	-9.13172E0	-9.14276E0	4.41074E-3	9.49383E-2	2.73387E1	-3.26642E1	-3.26266E1	2.69055E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.16822E-1	-7.98273E-1	-9.1316E0	-9.14264E0	4.3869E-3	9.50098E-2	2.73161E1	-3.2648E1	-3.26603E1	2.67247E1	1.19891E-7	2.52342E-3	2.52342E-3	6.31269E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16655E-1	-7.98178E-1	-9.13162E0	-9.14266E0	4.91142E-3	9.50336E-2	2.7321E1	-3.26644E1	-3.26077E1	2.69536E1	1.20084E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.98819E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16393E-1	-7.98249E-1	-9.13181E0	-9.14261E0	4.72069E-3	9.52244E-2	2.72979E1	-3.26615E1	-3.26374E1	2.69794E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09333E0	-8.16441E-1	-7.98202E-1	-9.13155E0	-9.14273E0	4.74453E-3	9.51529E-2	2.73387E1	-3.26488E1	-3.2641E1	2.67686E1	1.20069E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16703E-1	-7.98106E-1	-9.13162E0	-9.14276E0	5.10216E-3	9.4986E-2	2.73204E1	-3.26661E1	-3.25936E1	2.68736E1	1.19907E-7	2.51701E-3	2.51701E-3	6.31827E-3	3.01414E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.1625E-1	-7.98011E-1	-9.13162E0	-9.14268E0	4.55379E-3	9.49383E-2	2.73039E1	-3.26393E1	-3.26057E1	2.68406E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16584E-1	-7.97844E-1	-9.13143E0	-9.14261E0	4.74453E-3	9.52005E-2	2.73496E1	-3.26737E1	-3.25821E1	2.66811E1	1.20243E-7	2.52448E-3	2.52448E-3	6.31798E-3	3.03383E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16751E-1	-7.9813E-1	-9.13186E0	-9.14226E0	4.64916E-3	9.5129E-2	2.73315E1	-3.26506E1	-3.26032E1	2.6977E1	1.1984E-7	2.51411E-3	2.51411E-3	6.33065E-3	3.00363E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16822E-1	-7.98345E-1	-9.13172E0	-9.14252E0	4.50611E-3	9.52005E-2	2.73574E1	-3.26675E1	-3.26068E1	2.68713E1	1.20174E-7	2.5199E-3	2.5199E-3	6.34588E-3	2.9978E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16417E-1	-7.98202E-1	-9.13172E0	-9.14245E0	3.98159E-3	9.53197E-2	2.73075E1	-3.26789E1	-3.25948E1	2.68334E1	1.20174E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16345E-1	-7.98154E-1	-9.13165E0	-9.14245E0	4.26769E-3	9.49621E-2	2.73303E1	-3.26699E1	-3.2602E1	2.67932E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16655E-1	-7.98082E-1	-9.1315E0	-9.14247E0	4.26769E-3	9.47952E-2	2.73321E1	-3.2638E1	-3.26266E1	2.69109E1	1.19653E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17037E-1	-7.98416E-1	-9.13191E0	-9.1424E0	4.26769E-3	9.53674E-2	2.73387E1	-3.26957E1	-3.25996E1	2.68707E1	1.20017E-7	2.51334E-3	2.51334E-3	6.28006E-3	3.00302E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16751E-1	-7.98178E-1	-9.13177E0	-9.14249E0	4.50611E-3	9.49383E-2	2.73122E1	-3.26419E1	-3.26242E1	2.69466E1	1.20226E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16846E-1	-7.97892E-1	-9.13184E0	-9.14242E0	4.3869E-3	9.5129E-2	2.7373E1	-3.26699E1	-3.26182E1	2.69554E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.17347E-1	-7.97963E-1	-9.13203E0	-9.14257E0	4.43459E-3	9.48668E-2	2.72986E1	-3.26549E1	-3.26207E1	2.67085E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16846E-1	-7.97987E-1	-9.13179E0	-9.14259E0	4.52995E-3	9.49621E-2	2.73165E1	-3.26675E1	-3.26284E1	2.66406E1	1.19653E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16751E-1	-7.98011E-1	-9.13198E0	-9.14271E0	4.81606E-3	9.49144E-2	2.73411E1	-3.26638E1	-3.26113E1	2.68615E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16727E-1	-7.97796E-1	-9.13181E0	-9.14278E0	4.88758E-3	9.49621E-2	2.7346E1	-3.26458E1	-3.25918E1	2.68166E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.9892E-1