[Scan]
initial_time=2016-01-18T21:38:31
final_time=2016-01-18T21:38:53
ip_count=19
run=1024
dataset=8
scan=622
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08726E-4
ql1_vset=
ql1_vmon=-8.16846E-1
ql1_imon=1.37434E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=1.95671E-9
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=1.71483E-10
ql4_vset=
ql4_vmon=-9.14271E0
ql4_imon=-1.44696E-10
mult1=-1.0219E-8
mult2=-2.72966E-9
rf_tmon=-5.25401E-3
rf_agc=3.25845E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.65147E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19622E1
lens5a_imon=2.0047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=3.17155E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04591E1
cs_ea1_imon=1.08147E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36174E0
lens1_imon=2.84057E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.36158E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.04541E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.27249E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11574E1
os_restr1_imon=4.27436E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15372E1
os_ea1_imon=2.39836E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63377E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=9.46647E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=1.9653E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.27988E-8
tplens_vset=1.4E-1
tplens_vmon=1.66066E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26498E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26474E1
iondef2_imon=1.55588E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.03965E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=8.57605E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.16044E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55191E0
os_ea2_imon=-6.16582E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00724E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19648E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11087E1
os_restr2_imon=3.4159E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.26576E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01599E1
cs_anode2_imon=2.08748E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73352E1
iondef1_imon=1.0894E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68354E1
iondef4_imon=1.11044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.92184E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.54717E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-7.63461E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.94372E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-4.13876E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.68923E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93672E3
defgrida_imon=6.81683E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.38281E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34743E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.42943E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08278E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63876E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=6.6683E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.6656E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66454E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18289E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.93788E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22261E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.3918E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.1706E-1	-7.98345E-1	-9.13174E0	-9.14259E0	4.36306E-3	9.50098E-2	2.73514E1	-3.26669E1	-3.25725E1	2.68238E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16631E-1	-7.98249E-1	-9.13138E0	-9.14259E0	4.3869E-3	9.49144E-2	2.73082E1	-3.26658E1	-3.26266E1	2.68508E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.16894E-1	-7.97987E-1	-9.13177E0	-9.14228E0	4.45843E-3	9.49383E-2	2.73271E1	-3.26403E1	-3.26123E1	2.68859E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16917E-1	-7.98178E-1	-9.13193E0	-9.14254E0	4.45843E-3	9.50813E-2	2.72943E1	-3.26635E1	-3.26419E1	2.68219E1	1.19822E-7	2.52568E-3	2.52568E-3	6.33809E-3	3.01365E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.17037E-1	-7.98249E-1	-9.13174E0	-9.14247E0	4.3869E-3	9.50813E-2	2.73134E1	-3.26573E1	-3.26172E1	2.68322E1	1.1984E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.17156E-1	-7.97915E-1	-9.1316E0	-9.14273E0	4.86374E-3	9.51052E-2	2.73231E1	-3.26515E1	-3.26196E1	2.68783E1	1.19697E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.95876E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.17037E-1	-7.97868E-1	-9.13148E0	-9.14257E0	4.48227E-3	9.4986E-2	2.73232E1	-3.27233E1	-3.25761E1	2.68269E1	1.20078E-7	2.51369E-3	2.51369E-3	6.323E-3	2.95345E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16822E-1	-7.97844E-1	-9.13153E0	-9.14257E0	4.62532E-3	9.50098E-2	2.73045E1	-3.26573E1	-3.26458E1	2.67475E1	1.19991E-7	2.52066E-3	2.52066E-3	6.30171E-3	2.96483E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16441E-1	-7.98011E-1	-9.13148E0	-9.14237E0	4.50611E-3	9.49621E-2	2.72927E1	-3.2652E1	-3.26254E1	2.68919E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16584E-1	-7.98082E-1	-9.13174E0	-9.14264E0	4.673E-3	9.51052E-2	2.72916E1	-3.2656E1	-3.26493E1	2.68627E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.98481E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.1656E-1	-7.98154E-1	-9.13203E0	-9.14254E0	4.52995E-3	9.50098E-2	2.73435E1	-3.26729E1	-3.26218E1	2.69151E1	1.19819E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.99348E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.16369E-1	-7.97915E-1	-9.13203E0	-9.14252E0	4.50611E-3	9.51052E-2	2.73452E1	-3.26425E1	-3.26166E1	2.68244E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.02253E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.1656E-1	-7.98202E-1	-9.13186E0	-9.14266E0	4.62532E-3	9.4986E-2	2.73249E1	-3.26615E1	-3.26314E1	2.67601E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01609E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16464E-1	-7.98082E-1	-9.13196E0	-9.14261E0	4.55379E-3	9.4986E-2	2.73181E1	-3.26579E1	-3.26083E1	2.68653E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16679E-1	-7.98345E-1	-9.13174E0	-9.14285E0	4.57764E-3	9.50098E-2	2.73394E1	-3.2678E1	-3.26211E1	2.69025E1	1.198E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.9892E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16631E-1	-7.98106E-1	-9.13169E0	-9.14264E0	4.45843E-3	9.50813E-2	2.73387E1	-3.26632E1	-3.26472E1	2.68076E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00676E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.16655E-1	-7.98059E-1	-9.1316E0	-9.14288E0	4.45843E-3	9.51529E-2	2.73105E1	-3.26903E1	-3.26428E1	2.68316E1	1.19851E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.02253E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09348E0	-8.16679E-1	-7.98106E-1	-9.1321E0	-9.14283E0	4.31538E-3	9.50336E-2	2.7344E1	-3.26815E1	-3.26472E1	2.67352E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-8.16751E-1	-7.98106E-1	-9.13227E0	-9.14266E0	4.36306E-3	9.51529E-2	2.73315E1	-3.26506E1	-3.2629E1	2.68869E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.16846E-1	-7.98202E-1	-9.13198E0	-9.14271E0	4.36306E-3	9.50813E-2	2.73352E1	-3.26474E1	-3.26498E1	2.68354E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1