[Scan]
initial_time=2016-01-18T21:40:01
final_time=2016-01-18T21:40:21
ip_count=19
run=1024
dataset=8
scan=625
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.37314E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.95936E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=1.73533E-10
ql4_vset=
ql4_vmon=-9.14247E0
ql4_imon=-1.48284E-10
mult1=-5.58638E-9
mult2=-2.34933E-9
rf_tmon=-9.25895E-3
rf_agc=2.63039E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.67606E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67094E0
bslens_imon=2.51252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=2.00975E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53913E1
cs_ef1b_imon=3.159E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=1.10058E-5
lens1_vset=-5.0E0
lens1_vmon=-5.405E0
lens1_imon=2.5702E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.97005E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03414E1
cs_ea2_imon=1.36086E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84432E1
cs_ef1a_imon=3.05355E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.26623E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.27821E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15059E1
os_ea1_imon=2.39728E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63904E1
os_ef1bup_imon=3.09354E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23708E0
cs_ionrep_imon=9.52776E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93626E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01986E1
cs_anode1_imon=1.95912E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.26824E-8
tplens_vset=1.4E-1
tplens_vmon=1.68229E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25299E1
iondef3_imon=1.50253E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26266E1
iondef2_imon=1.56165E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98039E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=3.96785E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28695E0
ionrepsh_imon=8.62291E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7443E1
cs_ef2b_imon=3.12503E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52007E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71452E1
cs_ef2a_imon=3.17245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05662E0
os_ef2alow_imon=-2.4781E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00569E-1
os_ef2bup_imon=-5.12131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.112E1
os_restr2_imon=3.41412E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.08615E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7373E1
iondef1_imon=1.09229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.10529E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.89805E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.52638E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16081E0
cs_ionaccel_imon=-8.32722E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47477E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.84707E-6
window_vset=0.0E0
window_vmon=2.39633E-1
window_imon=-7.15954E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39056E-4
mask2_vset=0.0E0
mask2_vmon=-1.86509E1
mask2_imon=-6.02724E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92693E3
multa_neg_imon=7.31071E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.36839E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24818E0
defgridb_imon=5.9949E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.41536E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08013E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6385E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31817E1
cs_fil1_imon=6.91567E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.66385E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66238E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26028E-2
os_fil2_imon=-2.31376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20954E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.06936E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2997E-1
cs_fil2_imon=-2.40812E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.66698E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22248E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01415E-1
res40_imon=-2.45333E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16798E-1	-7.97939E-1	-9.13177E0	-9.14266E0	4.50611E-3	9.51052E-2	2.73169E1	-3.27086E1	-3.26071E1	2.67662E1	1.19705E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.97704E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16965E-1	-7.97749E-1	-9.13181E0	-9.14257E0	4.52995E-3	9.4986E-2	2.73063E1	-3.26609E1	-3.26278E1	2.681E1	1.2026E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16607E-1	-7.97892E-1	-9.13184E0	-9.14257E0	4.673E-3	9.50098E-2	2.73169E1	-3.26885E1	-3.26154E1	2.67972E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01347E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16393E-1	-7.97892E-1	-9.13217E0	-9.14254E0	4.50611E-3	9.52482E-2	2.73476E1	-3.26685E1	-3.26225E1	2.68803E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16607E-1	-7.98202E-1	-9.13215E0	-9.14218E0	5.07832E-3	9.50098E-2	2.7342E1	-3.26512E1	-3.26344E1	2.67176E1	1.20184E-7	2.51746E-3	2.51746E-3	6.32313E-3	3.00671E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16846E-1	-7.97939E-1	-9.13208E0	-9.14254E0	4.81606E-3	9.49144E-2	2.73095E1	-3.26572E1	-3.26223E1	2.69529E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16798E-1	-7.98154E-1	-9.13196E0	-9.14278E0	4.62532E-3	9.49383E-2	2.73207E1	-3.26546E1	-3.26403E1	2.68445E1	1.19925E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.99613E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16894E-1	-7.98106E-1	-9.13198E0	-9.14245E0	4.60148E-3	9.4986E-2	2.73213E1	-3.2641E1	-3.26254E1	2.69097E1	1.20034E-7	2.51709E-3	2.51709E-3	6.33161E-3	3.006E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.1687E-1	-7.98011E-1	-9.13177E0	-9.14278E0	4.72069E-3	9.52005E-2	2.73183E1	-3.26494E1	-3.26182E1	2.6816E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.17132E-1	-7.97963E-1	-9.13184E0	-9.14261E0	4.86374E-3	9.51529E-2	2.73243E1	-3.26891E1	-3.26008E1	2.67523E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16727E-1	-7.97868E-1	-9.13174E0	-9.14283E0	4.81606E-3	9.50813E-2	2.73165E1	-3.26639E1	-3.26434E1	2.69223E1	1.19809E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16679E-1	-7.98106E-1	-9.13169E0	-9.14245E0	4.76837E-3	9.50575E-2	2.73057E1	-3.26437E1	-3.26189E1	2.6708E1	1.19851E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.98156E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16894E-1	-7.98202E-1	-9.13172E0	-9.14254E0	4.72069E-3	9.51529E-2	2.73393E1	-3.26609E1	-3.26038E1	2.67121E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.1718E-1	-7.98082E-1	-9.13191E0	-9.14278E0	4.72069E-3	9.53674E-2	2.72943E1	-3.26657E1	-3.26158E1	2.69385E1	1.19861E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9978E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16941E-1	-7.98225E-1	-9.13188E0	-9.14259E0	4.74453E-3	9.4986E-2	2.7349E1	-3.26663E1	-3.26122E1	2.67091E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9952E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16989E-1	-7.98035E-1	-9.13177E0	-9.14252E0	4.41074E-3	9.49383E-2	2.73087E1	-3.26675E1	-3.26615E1	2.68863E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.02133E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.1656E-1	-7.98225E-1	-9.13205E0	-9.14271E0	4.81606E-3	9.45807E-2	2.7321E1	-3.2652E1	-3.26248E1	2.69235E1	1.20106E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.02253E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16917E-1	-7.98082E-1	-9.13169E0	-9.14252E0	4.95911E-3	9.4676E-2	2.73279E1	-3.26789E1	-3.26236E1	2.66556E1	1.19913E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.01609E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16917E-1	-7.98297E-1	-9.13174E0	-9.14249E0	4.8399E-3	9.51767E-2	2.73334E1	-3.27051E1	-3.25741E1	2.69003E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.16989E-1	-7.97939E-1	-9.13165E0	-9.14247E0	4.72069E-3	9.50575E-2	2.7373E1	-3.26266E1	-3.25299E1	2.68022E1	1.198E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99686E-1